Silicon accelerometer responsive to three orthogonal force components and method for fabricating

• US 4,969,359 A
• Filed: 04/06/1989
• Issued: 11/13/1990
• Est. Priority Date: 04/06/1989
• Status: Expired due to Term

• Current Assignee: University of Michigan
• Original Assignee: Ford Motor Company
• Inventors: Mikkor, Mati
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US07/334,253
• Time in Patent Office: 586 Days
• Field of Search: 73/517 R, 73/651, 338/2, 338/5, 338/46
• US Class Current: 73/514.36
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/12 by alteration of electrical resistance G01P15/0897, G01P15/105 take precedence
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

An accelerometer fabricated from silicon which is responsive to the three orthogonal components of an applied force. A method is also disclosed for etching the accelerometer from a single silicon substrate. Three rectangular beams or cantilevers are formed each having vertical sidewalls lying in crystalline planes orthogonal to one another. Each of the beams is directly responsive to one of the three orthogonal force components.

Claims

1. An accelerometer responsive to three orthogonal components of an applied force, comprising:

a supporting frame etched from a silicon substrate having top and bottom surfaces lying in a set of <

100>

crystalline planes;

a first abutment etched from said substrate and having adjacent sidewalls lying substantially in a set of <

111>

crystalline planes;

a second abutment etched from said substrate and having adjacent sidewalls lying substantially in a set of <

111>

crystalline planes;

a first rectangular beam etched from said substrate and longitudinally extending from said first abutment for detecting the first orthogonal component of the applied force, said first rectangular beam having vertical sidewalls lying in a first crystalline plane of said <

100>

crystalline planes, said vertical sidewalls forming approximately a (b 135 degree angle with said first abutment;

a second rectangular beam etched from said substrate and longitudinally extending from said second abutment for detecting the second orthogonal component of the applied force, said second rectangular beam having vertical sidewalls lying in a second crystalline plane of said <

100>

crystalline planes orthogonal to said first crystalline plane, said vertical sidewalls forming approximately a 135 degree angle with said second abutment; and

a third rectangular beam etched from said substrate and longitudinally extending from said frame for detecting the third orthogonal component of the applied force, said third rectangular beam having horizontal sidewalls lying in a third crystalline plane of said <

100>

crystalline planes orthogonal to both said first and said second crystalline planes.

2. The accelerometer recited in claim 8 further comprising a third abutment formed between said frame and said third beam, said third abutment forming approximately a 135 degree angle with said third rectangular beam.

3. The accelerometer recited in claim 8 further comprising a mass suspended from an end of each of said rectangular beams.

4. The accelerometer recited in claim 8 wherein said substrate further comprises a first cavity partially surrounding said first rectangular beam and a second cavity partially surrounding said second rectangular beam and a third cavity partially surrounding said third rectangular beam.