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Moment detector using resistance element

  • US 4,969,366 A
  • Filed: 11/07/1989
  • Issued: 11/13/1990
  • Est. Priority Date: 04/24/1987
  • Status: Expired due to Fees
First Claim
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1. A moment detector comprising:

  • a semiconductor substrate having a working point and an opening which produces an uneven stress in said semiconductor substrate when an angular moment is applied to said working point;

    working body means for applying the angular moment to said working point;

    supporting body means spaced from said working point for fixedly supporting a portion of said semiconductor substrate;

    a first resistance element pair comprising two first resistance elements having electric resistances that vary with mechanical deformation, the first resistance elements being at positions on said semiconductor substrate where the electric resistances thereof increase when the working body means applies the angular moment in a predetermined direction;

    a second resistance element pair comprising two second resistance elements having electric resistances that vary with mechanical deformation, the second resistance elements being at positions on said semiconductor substrate where the electric resistances thereof decrease when the working body means applies the angular moment in said predetermined direction; and

    bridge circuit means comprising said first resistance element pair and said second resistance element pair in such a way that said positions of said resistance elements constituting the same resistance element pairs are at opposite sides of said bridge circuit means, respectively, for detecting the angular moment applied to said working point on the basis of a bridge voltage obtained by said bridge circuit means,positions of said first and second resistance element pairs being such that the variations of the electrical resistances from the deformations except for stress are substantially equal to each other.

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