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Pressure transducer apparatus and method for making same

  • US 4,972,717 A
  • Filed: 09/18/1989
  • Issued: 11/27/1990
  • Est. Priority Date: 09/18/1989
  • Status: Expired due to Fees
First Claim
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1. A capacitive pressure transducer comprising a relatively rigid substrate having an outer periphery and a top, the top having a concave curved surface extending essentially across the entire top to the outer periphery thereof, a relatively flexible diaphragm formed of material having essentially zero elastic hysteresis,a layer of electrically conductive material attached to a central portion of the top and the diaphragm respectively, electrically conductive lead means connected to the respective layers and adapted to be coupled to signal conditioning circuit means,the diaphragm disposed on, in contact with and supported by the substrate in alignment with the curved surface and annular securing means received on and in engagement with the curved surface of the substrate adjacent the outer periphery for securing the diaphragm to the substrate.

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