Processing systems with intelligent article tracking

• US 4,974,166 A
• Filed: 12/29/1989
• Issued: 11/27/1990
• Est. Priority Date: 05/18/1987
• Status: Expired due to Term

• Current Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Original Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Inventors: Bonora, Anthony C., Brain, Michael D., Parikh, Mihir, Maney, George A.
• Primary Examiner(s): RUGGIERO, JOSEPH F
• Application Number:
  US07/458,767
• Time in Patent Office: 333 Days
• Field of Search: 364/468, 364/478, 364/424.01, 364/424.02, 235/375, 235/376, 235/492, 414/331, 414/273, 414/274, 414/403, 414/410, 414/416, 414/417, 414/217, 340/825.3, 340/825.31, 104/88, 198/341, 198/349, 198/349.5-349.95, 198/356, 198/358
• US Class Current: 700/113
• CPC Class Codes: G03F 7/70525 Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
• CPC Class Codes: G03F 7/70541 Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/31002 Computer controlled agv conveys workpieces between buffer and cell
• CPC Class Codes: G05B 2219/31286 Detect position of articles and equipment by receivers, identify objects by code
• CPC Class Codes: G05B 2219/31323 Database for CIM
• CPC Class Codes: G05B 2219/31432 Keep track of conveyed workpiece, batch, tool, conditions of stations, cells
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container. The system may also include a storage station for receiving said transportable container, for providing communication between the data processing devices provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing device.

Claims

1. A system for performing a series of processing steps for an article, each processing step being performed at a corresponding workstation, comprising:

a transportable container for the article, said transportable container including;

first interface means for controlling access to the article in said transportable container, and

container data processing means for receiving, storing and transmitting data relating to the identity and processing history of the article;

second interface means, provided at each workstation, for interfacing with said first interface means;

workstation data processing means, provided at each workstation, for receiving data from and transmitting data to said container data processing means, for processing the data received from said container data processing means, and for controlling said first and second interface means to permit access to the article in said transportable container based on a comparison of the processing history of the article and the identity of the workstation; and

central data processing means for receiving data from and transmitting data to each of said container and workstation data processing means and for processing data received from each of said container and workstation data processing means.

2. A system according to claim 1, wherein said container data processing means and said workstation data processing transmit data related to the status of the article and the status of the workstation to said central data processing means.

3. A semiconductor wafer processing system, comprising:

a transportable container for storing semiconductor wafers, comprising;

a door having a latch for preventing unauthorized access to articles stored in said container, and

first data processing means for storing data related to the wafers stored in said container, for transmitting said data, and for receiving data related to articles stored in said container;

a plurality of workstations, each workstation comprising;

an interface station for receiving said container and operating said door of said SMIF container,

a processing station,

transfer means for transferring semiconductor wafers between said interface station and said processing station, and

second data processing means for storing workstation identification information, for receiving and transmitting data, for processing data, for comparing data received from said container and said workstation identification information, for controlling said interface station in response to said comparison of said data received from said container and said workstation identification information, and for controlling said processing station; and

third data processing means for receiving data from and transmitting data to each of said second data processing means and for processing data received from each of said communication means.

4. A semiconductor wafer processing system according to claim 3, wherein said first data processing means is for storing data including the identity of, the processing steps to be performed on and the processing history for each wafer stored in said container.

5. A system for transporting and processing articles, comprising:

at least one transportable container having an interior region adapted to receive an article;

first means, provided on each said transportable container, for receiving, storing, transmitting and displaying information related to the article received by the corresponding transportable container;

a plurality of workstations, each said workstation comprising;

second means for receiving one of said transportable containers,

third means for processing the article transported by the transportable container received by said second means, and

fourth means, responsive to said information stored by the first means provided on the transportable container received by said second means, for controlling said second means and said third means, and for transmitting information related to the processing performed by said third means to the first means; and

fifth means for communicating with said third means of at least one said workstation to receive information related to the status of the corresponding workstation, to transmit information regarding the processing to be performed by said third means of the workstation, and to receive information stored by the first means provided on the transportable container received by the second means of the workstation.

6. A system according to claim 5, further comprising sixth means for storing one of said transportable containers and for providing communication between the first means of the transportable container stored therein and said fifth means.

7. A system according to claim 6, further comprising:

first network means for providing communication between the third means of each of a first group of said plurality of workstations;

second network means for providing communication between the third means of each of a second group of said plurality of workstations;

first local processing means for controlling said first network means and for providing communication between said first network means and said fifth means; and

second local processing means for controlling said second network means and for providing communication between said second network means and said fifth means.

8. A system for storing, transporting and processing articles, comprising:

a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles;

data processing means provided on each said transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container;

a plurality of workstations, each said workstation comprising;

first means for receiving one of said transportable containers,

second means for processing selected ones of the articles transported by the transportable container received by said first means, and

third means, responsive to said information stored by the data processing means provided on the transportable container received by said first means, for (i) verifying that at least one of the articles in the transportable container received by said first means has arrived at the appropriate workstation, (ii) controlling said data processing means to display the identify of the appropriate workstation if the articles have not arrived at the appropriate workstation, (iii) storing processing information various articles to be processed by the workstation, (iv) controlling said first means and said second means to process the selected ones of the articles in accordance with the verification and the processing information for the selected articles, (v) reporting the time of the processing of the article to said central processing unit, and (vi) controlling said data processing means of the transportable container received by said first means to display information related to the subsequent processing step;

a central processing unit for communicating with said third means of at least one said workstation to receive information related to the status of the corresponding workstation, to transmit information regarding the processing to be performed by said second means of the workstation, and to receive information stored by the data processing means provided on the transportable container received by the first means of the workstation; and

a storage station including means for receiving said transportable container, for providing communication between the data processing means provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing means.

9. A system according to claim 8, wherein said storage station updates the information stored by said data processing means.

10. A system according to claim 8, wherein each said data processing means includes an control means for causing said data processing means to display the information stored therein.

11. A system for storing, transporting and processing articles, comprising:

a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles;

data processing means provided on each said transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container;

a plurality of workstations, each said workstation comprising means for processing selected ones of the articles;

a central processing unit for communicating with each said workstation to receive information related to the status of the corresponding workstation, to download information regarding the processing to be performed by said workstation, and to receive information stored by the data processing means provided on the transportable container; and

a storage station including means for receiving said transportable container, for providing communication between the data processing means provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing means.