Miniaturized oxygen electrode and miniaturized biosensor and production process thereof
First Claim
1. A miniaturized oxygen electrode comprising:
- a semiconductor substrate having outer surfaces and at least one recess formed on one of the surfaces thereof by anisotropic etching for receiving an aqueous electrolyte solution, the substrate having an insulating layer on the surfaces thereof, the recess having a bottom area;
two electrodes including a cathode and an anode which are formed on the insulating layer on at least part of the outer surface of the substrate, each electrode being at least partially extended to the bottom area of the recess;
a solid or semi-solid, porous, aqueous electrolyte solution-containing material filling the recess; and
an oxygen gas-permeable membrane covering and sealing the recess with the porous material therein.
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Abstract
Miniaturized Clark-type oxygen electrodes includes a substrate having at least one recess groove formed on a surface thereof for receiving an electrolyte solution, and two electrodes acting as a cathode and an anode formed through an insulating layer on the surface of the substrate. Each of the electrodes is at least partially disposed in a bottom area of the recess. A solid or semi-solid, porous, electrolyte solution-containing material fills the recess, and an oxygen gas-permeable membrane covers and seals the recess and porous material received therein. Miniaturized biosensors are made using the oxygen electrode as a transducer. The oxygen electrodes and biosensors, which are extremely accurate, can be mass-produced and can be widely used in various fields such as clinical analysis, industrial processing, and in the determination of environmental conditions. The biosensors can be particularly used in clinical diagnosis and in monitoring devices for both in vivo and in vitro measurements.
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Citations
36 Claims
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1. A miniaturized oxygen electrode comprising:
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a semiconductor substrate having outer surfaces and at least one recess formed on one of the surfaces thereof by anisotropic etching for receiving an aqueous electrolyte solution, the substrate having an insulating layer on the surfaces thereof, the recess having a bottom area; two electrodes including a cathode and an anode which are formed on the insulating layer on at least part of the outer surface of the substrate, each electrode being at least partially extended to the bottom area of the recess; a solid or semi-solid, porous, aqueous electrolyte solution-containing material filling the recess; and an oxygen gas-permeable membrane covering and sealing the recess with the porous material therein. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A process for the production of miniaturized oxygen electrodes which comprises the steps of:
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forming at least one recess on a semiconductor substrate having outer surfaces by photolithographic and anixotropic etching, the recess having a bottom area, forming an insulating layer on the surface of the substrate including the recess, forming two electrodes on a surface of the insulating layer such that the electrodes are on at least part of the outer surfaces and are at least partially extended to the bottom area of the recess, filling the recess with a solid or semi-solid, porous, aqueous electrolyte solution-containing material, and covering and sealing the recess containing the porous material with an oxygen gas-permeable membrane. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A miniaturized biosensor comprising:
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an oxygen electrode having a sensitive site and including a semiconductor substrate having at least one recess having a bottom area and being formed by anisotropic etching on a surface thereof for receiving an aqueous electrolyte solution, an insulating layer formed on the substrate, two electrodes which act as a cathode and an anode and are formed on the insulating layer on the surface of the substrate and each of which electrodes is at least partially on the surface and are extended to the bottom area of the recess, and a solid or semi-solid, porous, aqueous electrolyte solution-containing material filling the recess, an oxygen gas-permeable membrane covering and sealing the recess and porous material contained therein; and an immobilized biological substance capable of catalyzing the oxidation of biochemical organic compounds and being positioned on the sensitive site of the oxygen electrode. - View Dependent Claims (32, 33, 34, 35, 36)
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Specification