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Miniaturized oxygen electrode and miniaturized biosensor and production process thereof

  • US 4,975,175 A
  • Filed: 06/15/1989
  • Issued: 12/04/1990
  • Est. Priority Date: 03/27/1987
  • Status: Expired due to Term
First Claim
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1. A miniaturized oxygen electrode comprising:

  • a semiconductor substrate having outer surfaces and at least one recess formed on one of the surfaces thereof by anisotropic etching for receiving an aqueous electrolyte solution, the substrate having an insulating layer on the surfaces thereof, the recess having a bottom area;

    two electrodes including a cathode and an anode which are formed on the insulating layer on at least part of the outer surface of the substrate, each electrode being at least partially extended to the bottom area of the recess;

    a solid or semi-solid, porous, aqueous electrolyte solution-containing material filling the recess; and

    an oxygen gas-permeable membrane covering and sealing the recess with the porous material therein.

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