Data handling system for pattern inspector or writer

• US 4,979,223 A
• Filed: 03/25/1988
• Issued: 12/18/1990
• Est. Priority Date: 03/25/1988
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Wood, Anthony B., Manns, William G., Norwood, David A.
• Primary Examiner(s): Boudreau, Leo H.
• Assistant Examiner(s): Cammarata, Michael R.
• Application Number:
  US07/173,523
• Time in Patent Office: 998 Days
• Field of Search: 382/8, 382/20, 382/27, 382/56, 358/107
• US Class Current: 382/149
• CPC Class Codes: G03F 1/84 Inspecting
• CPC Class Codes: G03F 7/70383 Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams maskless lithography using a programmable mask G03F7/70291
• CPC Class Codes: G03F 7/7065 Defects, e.g. optical inspection of patterned layer for defects
• CPC Class Codes: G06T 11/00 2D [Two Dimensional] image generation
• CPC Class Codes: G06T 2207/20021 Dividing image into blocks, subimages or windows
• CPC Class Codes: G06T 2207/30141 Printed circuit board [PCB]
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0002 Inspection of images, e.g. flaw detection
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon'"'"'s data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect are a consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.

Claims

1. A pattern inspection system, comprising:

a data expansion computer system for expanding in real-time a compact database representation of an ideal pattern into a bit-mapped representation of the ideal pattern, which ideal pattern is stored in a plurality of frames of data, and in which the overall geometric shape of the ideal pattern is partitioned into a plurality of constituent contiguous polygons, each contiguous polygon residing in a separate frame of data;

a data-acquisition system for generation pixel data for an inspected pattern; and

a comparator, in electrical communication with the data-acquisition system and the data expansion computer system, for bit-by-bit comparison of the bit-mapped representations of the ideal pattern with the pixel data for the inspected pattern.

2. The pattern inspection system of claim 1, further comprising;

a data process for processing the compact database into a turnpoint polygon data representation of the contiguous polygons comprising the ideal pattern.

3. The pattern inspection system of claim 1, further comprising:

a plurality of parallel pipelines for processing the data frames into the bit-mapped representation of the ideal pattern.

4. The pattern inspection system of claim 3, further comprising:

a data processor for outputting contiguous data frames to different ones of the pipelines.