Digital integrated circuit propagation delay regulator

• US 4,980,586 A
• Filed: 10/07/1987
• Issued: 12/25/1990
• Est. Priority Date: 10/07/1987
• Status: Expired due to Term

• Current Assignee: Credence Systems Corporation (COHU Incorporated)
• Original Assignee: Tektronix Incorporated (Fortive Corp.)
• Inventors: Murray, Donald F., Sullivan, Steven K.
• Primary Examiner(s): Miller, Stanley D.
• Assistant Examiner(s): PHAN, TRONG Q
• Application Number:
  US07/106,102
• Time in Patent Office: 1,175 Days
• Field of Search: 307/591, 307/592, 307/595, 307/602, 307/310, 328/3, 328/11, 328/55, 328/58, 361/93, 361/94, 361/97, 361/98, 361/101, 219/497, 324/73 R, 331/69, 331/70
• US Class Current: 327/262
• CPC Class Codes: G01R 31/31725 Timing aspects, e.g. clock distribution, skew, propagation delay for tester hardware G01R31/31937
• CPC Class Codes: G01R 31/3191 Calibration
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H03K 19/00323 Delay compensation

Abstract

In accordance with the present invention, a heater is included on an integrated circuit, together with a circuit for controlling the heater to selectively heat the integrated circuit and control the propagation delay time of signals passing through the integrated circuit. In a specific form of the invention, the propagation delay time of signals passing through at least a portion of an integrated circuit is measured and compared with a reference propagation delay time. The heater is controlled to increase the heat it produces when the measured propagation delay time is less than the reference propagation delay time. In addition, the heater is controlled to decrease the heat it provides when the measured propagation delay time is greater than the reference propagation delay time.

Claims

1. A circuit for monitoring and controlling the propagation delay time of signals passing through an integrated circuit, the integrated circuit being of the type in which propagation delay time varies with variations in the temperature of the integrated circuit, comprising:

temperature varying means on the integrated circuit for varying the temperature of the integrated circuit; and

means for sensing propagation delay time and coupled to the temperature varying means for controlling the temperature varying means to selectively vary the temperature of the integrated circuit to control the propagation delay time.

2. A circuit for monitoring and controlling the propagation delay time of signals passing through an integrated circuit, the integrated circuit being of the type in which propagation delay time varies with variations in the temperature of the integrated circuit, comprising:

a heater on the integrated circuit;

means coupled to the heater for controlling the heater to selectively heat the integrated circuit to control the propagation delay time;

delay measuring means for measuring the signal propagation delay time of signals passing through at least a portion of the integrated circuit; and

the means for controlling the heater being coupled to the delay measuring means and comprising means responsive to the delay measuring means for controlling the heater to produce a first level of heating when the measured signal propagation delay time is of a first magnitude, to produce a second level of heating greater than the first level of heating when the measured signal propagation delay time is of a second magnitude which is less than the first magnitude, and to generate third level of heating less than the first level of heating and less than the second level of heating when the measured signal propagation delay time is of a third magnitude which is greater than the first magnitude and greater than the second magnitude.

3. A circuit according to claim 2 including means coupled to the means for controlling the heater for adjusting the first level of heating.

4. A circuit for monitoring and controlling the propagation delay time of signals passing through an integrated circuit, the integrated circuit being of the type in which propagation delay time varies with variations in the temperature of the integrated circuit, comprising:

a heater on the integrated circuit;

means coupled to the heater for controlling the heater to selectively heat the integrated circuit to control the propagation delay time;

reference propagation delay signal means for providing a reference signal output corresponding to a reference propagation delay time;

delay measuring means for measuring the signal propagation delay time of signals passing through at least a portion of the integrated circuit, the delay measuring means comprising means for producing a measured signal output corresponding to the measured propagation delay time;

comparator means coupled to the reference propagation delay signal means and to the delay measuring means for comparing the reference signal output and the measured signal output and for producing a comparator output signal corresponding to the difference between the reference signal and measured signal outputs; and

the means for controlling the heater comprising means coupled to the comparator means and responsive to the comparator output signal for controlling the heater to increase the heat provided by the heater when the measured propagation delay time is less than the reference propagation delay time and to decrease the heat provided by the heater when the measured propagation delay time is greater than the reference propagation delay time.

5. A circuit according to claim 4 including means coupled to the reference propagation delay signal means for varying the reference signal output to vary the reference propagation delay time.

6. A circuit for monitoring and controlling the propagation delay time of signals passing through an integrated circuit, the integrated circuit being of the type in which propagation delay time varies with variations in the temperature of the integrated circuit, comprising:

a heater on the integrated circuit;

means coupled to the heater for controlling the heater to selectively heat the integrated circuit to control the propagation delay time; and

in which the heater comprises plural integrated circuit heat generating elements which generate heat when energized, the means for controlling the heater comprising means for controlling the energization of the heat generating elements to control the heat from the heater.

7. A circuit according to claim 6 in which the heat generating elements comprise plural MOS transistor means with different channel widths for generating heat when energized.

8. A circuit for monitoring and controlling the propagation delay time of signals passing through an integrated circuit, the integrated circuit being of the type in which propagation delay time varies with variations in the temperature of the integrated circuit, comprising:

a heater on the integrated circuit;

means coupled to the heater for controlling the heater to selectively heat the integrated circuit to control the propagation delay time;

delay measuring means for measuring the signal propagation delay time of signals passing through at least a portion of the integrated circuit;

the means for controlling the heater being coupled to the delay measuring means and comprising means responsive to the delay measuring means for controlling the heater to produce a first level of heating when the measured signal propagation delay time is of a first magnitude, to produce a second level of heating greater than the first level of heating when the measured signal propagation delay time is of a second magnitude which is less than the first magnitude, and to generate a third level of heating less than the first level of heating and less than the second level of heating when the measured signal propagation delay time is of a third magnitude which is greater than the first magnitude and greater than the second magnitude;

test signal source means for generating propagation time delay test signals;

the delay measuring means having a test signal input and comprising an oscillator having a gating input and N logic elements of the integrated circuit connected in series to form a ring with the output of each logic element being connected to the input of the succeeding logic element such that a pulse continuously circulates around the ring in response to a test signal delivered to the test signal input from the test signal source means applied to the gating input, the oscillator logic elements having propagation delay characteristics typical of the other logic elements on the integrated circuit, the output of the oscillator being a delay measuring signal comprised of pulses of a frequency which is a function of the propagation delay of each logic element of the ring, the propagation delay of the logic elements being in part a function of the temperature of the integrated circuit; and

the means for controlling the heater including frequency counter means coupled to the output of the oscillator for producing a frequency counter output signal corresponding to the frequency of the delay measuring signal and also including means coupled to and responsive to the frequency counter output signal for controlling the heat from the heater means.

9. A circuit according to claim 8 in which the test signal source means comprises means for generating a stream of test signals which are not all of the same duration.

10. A circuit according to claim 8 in which the test signal source means comprises means for generating a periodic stream of test signals having first, second and third progressively increasing durations, the stream comprising multiple test signals of the first and third durations to each test signal of the second duration.

11. A circuit according to claim 10 in which the test signal source means comprises means for generating a stream of alternating test signals of the first and third duration with periodic test signals of the second durations interspersed therebetween.

12. A circuit according to claim 8 including a first storage means for storing a reference frequency value corresponding to a reference propagation delay time, the frequency counter means being coupled to the storage means and comprising means for receiving the reference frequency value from the first storage means at the start of each test signal and for decrementing the received reference frequency value in response to each pulse of the delay measuring signal, the frequency counter output signal corresponding to the value to which the reference frequency value is decremented at the end of each test signal.

13. A circuit according to claim 12 in which the means responsive to the frequency counter output signal comprises heater counter means for storing an initial heater value, the heater counter means being responsive to the frequency counter output signal for incrementing and decrementing the heater value between limits in response to the frequency counter output signal, the heater counter means comprising means for producing a heater control signal corresponding to the value to which the initial heater value is incremented and decremented in response to the frequency counter output signal, and the heater being coupled to the heater counter means to receive the heater control signal and comprising means for generating heat which varies with the heater control signal.

14. A circuit according to claim 13 including means coupled to the first storage means for varying the reference frequency value stored in the first storage means.

15. A circuit according to claim 14 including means coupled to the heater counter means for varying the initial heater value.

16. A circuit according to claim 13 in which the heater comprises plural integrated circuit heat generating elements coupled to the heater counter means and which are selectively energized in response to the heater control signal for generating heat when energized.

17. A circuit for monitoring and controlling the propagation delay time of signals passing through an integrated circuit composed of logic elements, the integrated circuit being of the type in which propagation delay time varies with variations in the temperature of the integrated circuit, comprising:

test signal source means for generating propagation time delay test signals;

delay measuring means for measuring the signal propagation delay time of signals passing through at least a portion of the integrated circuit, the delay measuring means having a test signal input and comprising an oscillator having a gating input and N logic elements of the integrated circuit connected in series to form a ring with the output of each logic element being connected to the input of the succeeding logic element such that a pulse continuously circulates around the ring in response to a test signal delivered to the test signal input from the test signal source means applied to the gating input, the oscillator logic elements having propagation delay characteristics typical of the other logic elements on the integrated circuit, the output of the oscillator being a delay measuring signal comprised of pulses of a frequency which is a function of the propagation delay of each logic element of the ring, the propagation delay of the logic elements being in part a function of the temperature of the integrated circuit;

first storage means for storing a reference frequency value corresponding to a reference propagation delay time;

means coupled to the first storage means for varying the reference frequency value stored in the first storage means;

a heater on the integrated circuit;

means coupled to the heater for controlling the heater to selectively heat the integrated circuit to control the propagation delay time, the means for controlling the heater including frequency counter means coupled to the output of the oscillator for producing a frequency counter output signal corresponding to the frequency of the delay measuring signal;

the frequency counter means comprising means coupled to the first storage means for receiving the reference frequency value from the first storage means at the start of each test signal and for decrementing the received reference frequency value in response to each pulse of the delay measuring signal, the frequency counter output signal corresponding to the value to which the reference frequency value is decremented at the end of each test signal;

means coupled to the frequency counter means and responsive to the frequency counter output signal for controlling the heat from the heater, the means responsive to the frequency counter output signal comprising heater counter means for storing an initial heater value, the heater counter means being responsive to the frequency counter output signal for incrementing and decrementing the heater value between limits in response to the frequency counter output signal, the heater counter means comprising means for producing a heater control signal corresponding to the value to which the initial heater value is incremented and decremented in response to the frequency counter output signal; and

the heater being coupled to the heater counter means and comprising means for generating heat which varies with the heater control signal.

18. A circuit according to claim 17 in which the heater comprises plural integrated circuit heat generating elements coupled to the heater control means which are selectively energized in response to the heater control signal for generating heat when energized.

19. A circuit according to claim 18 in which the test signal source means comprises means for generating a periodic stream of test signals having first, second and third progressively increasing durations, the stream comprising multiple test signals of the first and third durations to each test signal of the second duration, and the circuit also including means coupled to the heater counter means for varying the initial heater value.

20. A circuit for monitoring and controlling the propagation delay time of signals passing through an integrated circuit, the integrated circuit being of the type in which propagation delay time varies with variations in the temperature of the integrated circuit, comprising:

temperature varying means on the integrated circuit for varying the temperature of the integrated circuit;

delay time sensing means for continuously sensing the propagation delay time;

means coupled to the temperature varying means and to the delay time sensing means for controlling the temperature varying means in response to the delay time sensing means to selectively vary the temperature of the integrated circuit to control the propagation delay time.