Monolithic resonator for a vibrating beam accelerometer
First Claim
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1. A monolithic resonator for a vibrating beam accelerometer comprising:
- an outer structure including a mounting structure, a proof mass structure, a plurality of flexure beams extending between said mounting and proof mass structures; and
an inner structure including first and second isolator masses, first and second isolator beams each connected at one end to a respective portion of said first and second isolator masses, and at the other end to the mounting structure and proof mass structure, respectively, and a vibrating beam extending between other portions of said isolator masses;
wherein said outer structure has a thickness greater than said inner structure.
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Abstract
A monolithic resonator for a vibrating beam accelerometer is provided which comprises an outer structure including a mounting structure, a proof mass structure, a plurality of flexure beams extending between the mounting and proof mass structures; and an inner structure including first and second isolator masses, first and second isolator beams connected to one portion of the isolator masses, respectively, and a vibrating beam extending between other portions of the isolator masses. The monolithic resonator is non-planar in that the outer structure has a thickness greater than said inner structure.
46 Citations
23 Claims
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1. A monolithic resonator for a vibrating beam accelerometer comprising:
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an outer structure including a mounting structure, a proof mass structure, a plurality of flexure beams extending between said mounting and proof mass structures; and an inner structure including first and second isolator masses, first and second isolator beams each connected at one end to a respective portion of said first and second isolator masses, and at the other end to the mounting structure and proof mass structure, respectively, and a vibrating beam extending between other portions of said isolator masses; wherein said outer structure has a thickness greater than said inner structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A monolithic resonator comprising:
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a vibrating beam; unitary isolator mass means at either end of said beam; isolator beams extending from each of said isolator mass means; a mounting structure to one side of said beam, and a proof mass structure to the other side of said beam; and a plurality of flexure beams extending between said mounting structure and said proof mass structure, below said vibrating beam and substantially perpendicular thereto. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A monolithic resonator comprising:
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a vibrating beam; unitary isolator mass means at either end of said beam; isolator beams extending from each of said isolator mass means; a mounting structure to one side of said beam, and a proof mass structure to the other side of said beam; and a plurality of flexure beams extending between said mounting structure and said proof mass structure, below said vibrating beam and substantially perpendicular thereto; wherein said vibrating beam, said isolator mass means and said isolator beams have thicknesses about three to ten times less than thicknesses of at least said mounting structure and said proof mass structure.
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Specification