Semiconductor device having tungsten plugs

• US 4,981,550 A
• Filed: 11/09/1988
• Issued: 01/01/1991
• Est. Priority Date: 09/25/1987
• Status: Expired due to Term

• Current Assignee: Agere Systems Guardian Corp. (Broadcom, Inc.)
• Original Assignee: AT&T, Inc.
• Inventors: Tsai, Nun-Sian, Huttemann, Robert D.
• Primary Examiner(s): Simmons, David
• Assistant Examiner(s): Dang, Thi
• Application Number:
  US07/270,389
• Time in Patent Office: 783 Days
• Field of Search: 156/643, 156/646, 156/656, 156/657, 156/653, 156/665, 156/664, 437/192, 437/190, 437/194, 437/195, 437/978, 204/192.32, 204/182.35
• US Class Current: 438/672
• CPC Class Codes: H01L 21/32136 using plasmas
• CPC Class Codes: H01L 21/76882 Reflowing or applying of pressure to better fill the contact hole

Abstract

A metallization scheme useful for integrated circuits uses a buffer layer to ensure that the etch back of a contact metal, such as tungsten, deposited over the buffer layer, can be controlled to form a complete tungsten plug in a via while the tungsten on the dielectric is completely removed. The buffer layer, once exposed, reacts with the plasma etch to form non-volatile compounds which decrease the free surface mobility of the etching species. This active species depletion thus decreases the etch rate of the tungsten within the vias. Continued exposure of unreacted buffer material is ensured by performing a sputter cleaning simultaneously with the plasma etch.

Claims

1. A method of making a semiconductor integrated circuit having a metalization comprising the steps of:

depositing a dielectric layer on a substrate;

patterning said dielectric layer to form windows in selected areas above said substrate;

depositing a buffer layer over said dielectric layer;

blanket depositing a contact layer so as to completely cover said buffer layer and at least fill said windows formed by the patterning, said contact layer being of a different material than said buffer layer;

plasma-etching said contact layer and underlying buffer layer with a fluorine-based etch which preferentially forms non-volatile fluoride compounds with said buffer layer as compared to reacting with said contact layer; and

simultaneously with the preceding step, sputtering said buffer layer to remove fluoride compounds and expose unreacted buffer material, the simultaneous plasma-etching and sputtering operations continuing until essentially all of the contact layer outside of the windows is removed.

2. A method as recited in claim 1 in which said contact layer comprises tungsten.

3. A method as recited in claim 2 in which said buffer layer comprises at least one material selected from the group consisting of aluminum, titanium, tantalum, silicon nitride, titanium nitride and PSG.

4. A method as recited in claim 3 in which said at least one material comprises aluminum.

5. A method as recited in claim 1 in which said buffer layer is deposited before said patterning step is performed such that both the dielectric layer and buffer layer are patterned.

6. A method as recited in claim 3 in which said at least one material comprises titanium.

7. A method as recited in claim 1 in which the buffer material is deposited to a thickness in the range of approximately 150-300 nm.