Method for fabricating a silicon accelerometer responsive to three orthogonal force components

• US 4,981,552 A
• Filed: 01/09/1990
• Issued: 01/01/1991
• Est. Priority Date: 04/06/1989
• Status: Expired due to Fees

• Current Assignee: Ford Motor Company
• Original Assignee: Ford Motor Company
• Inventors: Mikkor, Mati
• Primary Examiner(s): Powell, William A.
• Application Number:
  US07/462,190
• Time in Patent Office: 357 Days
• Field of Search: 156/647, 156/651, 156/654, 156/657, 156/659.1, 156/661.1, 156/662, 73/517 R, 73/517 AV, 73/517 A
• US Class Current: 438/52
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/12 by alteration of electrical resistance G01P15/0897, G01P15/105 take precedence
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

An accelerometer fabricated from silicon which is responsive to the three orthogonal components of an applied force. A method is also disclosed for etching the accelerometer from a single silicon substrate. Three rectangular beams or cantilevers are formed each having vertical sidewalls lying in crystalline planes orthogonal to one another. Each of the beams is directly responsive to one of the three orthogonal force components.

Claims

1. A method for etching an accelerometer from silicon responsive to three orthogonal components of an applied force, comprising the steps of:

preparing a silicon substrate having nominal planes lying in a set of {100} crystalline planes and {111} crystalline planes intersecting said {100} crystalline planes in <

110>

crystalline directions;

anisotropically etching a first rectangular beam responsive to the first orthogonal force component and having vertical sidewalls lying in a first crystalline plane of said {100} crystalline planes;

anisotropically etching a second rectangular beam responsive to the second orthogonal force component and having vertical sidewalls lying in a second crystalline plane of said {100} crystalline planes orthogonal to said first crystalline plane; and

anisotropically etching a third rectangular beam responsive to the third orthogonal force component and having horizontal sidewalls lying in a third crystalline plane of said {100} crystalline planes orthogonal to both said first and second crystalline planes.

2. The method recited in claim 1 wherein said anisotropically etching steps act against said {100} crystalline planes at a rate substantially greater than said anisotropically etching steps act against said {111} crystalline planes of said substrate. 20

3. The method recited in claim 2 wherein said anistropically etching steps include application of an etchant comprised of aqueous potassium hydroxide.

4. The method recited in claim 1 wherein said anisotropically etching steps form said rectangular beams extending in <

100>

crystalline directions.

5. A method for etching an accelerometer from silicon responsive to three orthogonal components of an applied force, comprising the steps of:

aligning a first etchant mask segment on a silicon substrate having nominal planes lying in a set of {100} crystalline planes and {111} crystalline planes intersecting said {100} crystalline planes in <

110>

crystalline directions, said first etchant mask segment having openings aligned in a first crystalline direction of <

100>

crystalline directions;

aligning a second etchant mask segment on said substrate having openings aligned in a second crystalline direction of <

100>

crystalline directions orthogonal to said first crystalline direction;

aligning a third etchant mask segment on said substrate having openings aligned in said first crystalline direction;

applying an anisotropic etchant to said first etchant mask segment etching against {100} planes to form a first rectangular beam responsive to the first orthogonal force component having vertical sidewalls lying in a first crystalline plane of said {100} crystalline planes;

applying an anisotropic etchant to said second etchant mask segment etching against {100} planes to form a second rectangular beam responsive to the second orthogonal force component having vertical sidewalls lying in a second crystalline plane of said {100} crystalline planes orthogonal to said first crystalline plane and;

applying an anisotropic etchant to said third etchant mask segment etching against {100} planes to form a third rectangular beam responsive to the third orthogonal force component having horizontal sidewalls lying in a third crystalline plane of said {100} crystalline planes orthogonal to both said first and second crystalline planes.

6. The method recited in claim 5 wherein said etchant acts against said {100} crystalline planes at a rate substantially greater than said etchant acts against said {111} crystalline planes of said substrate.

7. The method recited in claim 5 wherein said etchant comprises aqueous potassium hydroxide.

8. The method recited in claim 5 wherein said etchant forms said rectangular beams extending in <

100>

crystalline directions.

9. The method recited in claim 5 wherein said steps of applying said anisotropic etchant to said first and second etchant mask segments are concurrent.