Apparatus and method for producing high purity diamond films at low temperatures

• US 4,981,568 A
• Filed: 04/02/1990
• Issued: 01/01/1991
• Est. Priority Date: 09/20/1988
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Smith, David A., Taranko, Alexander R.
• Primary Examiner(s): Nguyen, Nam X.
• Application Number:
  US07/503,107
• Time in Patent Office: 274 Days
• Field of Search: 204/192.11, 204/192.15, 204/192.16, 204/192.26, 204/192.31, 204/298.04, 204/298.05, 204/298.16, 118/50.1, 118/719, 118/723, 118/724, 118/725, 118/726, 427/35, 427/38, 427/47, 427/49, 250/423 R, 250/425, 250/492.3
• US Class Current: 427/474
• CPC Class Codes: C23C 14/0611 Diamond
• CPC Class Codes: C23C 14/221 Ion beam deposition C23C14/46, C23C14/48 take precedence
• CPC Class Codes: C23C 14/30 by electron bombardment
• CPC Class Codes: C30B 23/02 Epitaxial-layer growth
• CPC Class Codes: C30B 29/04 Diamond

Abstract

Apparatus and method for producing diamond films. A source of free electrons is used to bombard a carbon block. Incident electrons vaporize the carbon surface, and free carbon atoms are ionized from collisions of the electrons with the carbon atoms. A collimating plate located above the carbon block includes an aperture for permitting the vaporized carbon ions to be collimated. On the other side of the collimating plate are first and second deflector plates, symmetrical with respect to the axis of the collimating plate aperture. A voltage potential therebetween produces an electrostatic field perpendicular to the axis of the aperture. Substrates located in the electrostatic field receive a carbon ion film which is essentially a diamond film structure.

Claims

1. A method of depositing diamond carbon material on a substrate, the method comprising the steps of:

(a) positioning a solid carbon source composed of substantially pure carbon at a carbon-source position in a vacuum chamber, a surface portion of the solid carbon source defining a carbon-vapor-source area;

(b) positioning a substrate at a substrate position in the vacuum chamber, a surface portion of the substrate defining a carbon-deposition area, a carbon-ion-transport path extending within the vacuum chamber from the carbon-vapor-source area of the solid carbon source to the carbon-deposition area of the substrate, the carbon deposition area of the substrate being shielded from any line-of-sight exposure to the carbon-vapor-source area;

(c) evacuating an interior of the vacuum chamber to a vacuum;

(d) imposing an electromagnetic ion/neutral separation field over an ion/neutral separation region in the vacuum chamber, the carbon-ion-transport path extending through the ion/neutral separation region, the carbon-ion transport path having an initial line-of-sight portion extending from the carbon-vapor-source area of the solid carbon source into the ion/neutral separation region; and

(e) electrically vaporizing and ionizing carbon material from the carbon-vapor-source area of the solid carbon source to form a carbon vapor of neutral carbon species and ionized carbon species, carbon vapor travelling along the initial line-of-sight portion of the carbon-ion transport path into the ion/neutral separation region, the electromagnetic ion/neutral separation field having an intensity and direction effective to separate at least a fraction of ionized carbon species of a first polarity in the carbon vapor from the neutral carbon species in the carbon vapor and any ionized carbon species of a second opposite polarity in the carbon vapor and substantially selectively to direct such ionized carbon species of the first polarity to impact the carbon-deposition area of the substrate, essentially no neutral carbon species and ionized carbon species of the second polarity arriving at the carbon-deposition area of the substrate, the ionized carbon species of the first polarity impacting the carbon-deposition area of the substrate forming diamond carbon material on the substrate.

2. The method of claim 1 in which the substrate is initially essentially diamond free.

3. The method of claim 2 further including the step of maintaining the substrate at a temperature in the range of from room temperature to about 200°

C.

4. The method of claim 2 in which the electromagnetic ion/neutral separation field is an electrostatic field.

5. The method of claim 4 in which the electrostatic ion/neutral separation field is imposed by impressing a potential difference between a first electrode and a second electrode, the two electrodes being located in the vacuum chamber and spaced apart from one another on opposing sides of the initial line-of-sight portion of the carbon-ion transport path, the potential difference being in the range of from about 100 volts to about 1000 volts.

6. The method of claim 5 in which the potential difference impressed between the two electrodes has a value effective to produce an electrostatic field strength of about 100 volts/cm.

7. The method of claim 2 in which the step of electrically vaporizing and ionizing carbon material from the carbon-vapor-source area of the solid carbon source includes directing an electron beam onto the carbon-vapor-source area.

8. A method of depositing diamond carbon material on a substrate, the method comprising the steps of:

(a) providing a carbon source at a carbon-source position in a vacuum chamber, a portion of eh carbon source defining a carbon-vapor-source region;

(b) positioning a substrate at a substrate position in the vacuum chamber, the substrate initially being essentially diamond free, a surface portion of the substrate defining a carbon-deposition area, a carbon ion-transport path extending within the vacuum chamber from the carbon-vapor-source region of the carbon source to the carbon-deposition area of the substrate, the carbon deposition area of the substrate being shielded from any line-of-sight exposure to the carbon-vapor-source region;

(c) evacuating the vacuum chamber to a vacuum;

(d) imposing an electromagnetic ion/neutral separation field over an ion/neutral separation region in the vacuum chamber, the carbon-ion-transport path extending through the ion-neutral separation region, the carbon-ion transport path having an initial line-of-sight portion extending from the carbon-vapor-source region of the carbon source into the ion/neutral separation region; and

,

(e) ionizing carbon material from the carbon-vapor-source region of the carbon source to form a carbon vapor comprising neutral carbon species and ionized carbon species, carbon vapor travelling along the initial line-of-sight portion of the carbon-ion-transport path into the ion/neutral separation region, the electromagnetic ion/neutral separation field having an intensity and direction effective to separate at least a fraction of the ionized carbon species of a first polarity in the carbon vapor from neutral carbon species in the carbon vapor and any ionized carbon species of a second opposite polarity in the carbon vapor and substantially selectively to direct such ionized carbon species of the first polarity to impact the carbon-deposition area of the substrate, essentially no neutral carbon species and ionized carbon species of the second polarity arriving at the carbon-deposition area of the substrate, the ionized carbon species of the first polarity impacting the carbon deposition area of the substrate forming diamond carbon material on the substrate.

9. The method of claim 8 in which the carbon source is solid and is composed of substantially carbon, the carbon-vapor-source region being a surface portion of the solid carbon source, and in which the step of ionizing carbon material from the carbon-vapor-source, and in which the step of ionizing carbon material from the carbon-vapor-source region comprises electrically vaporizing and ionizing carbon material from the carbon-vapor-source region of the solid carbon source.

10. The method of claim 9 in which the step of electrically vaporizing and ionizing carbon material from the carbon-vapor-source area of the solid carbon source includes directing an electron beam onto the carbon-vapor-source region.

11. The method of claim 8 further including the step of maintaining the substrate at a temperature in the range of from room temperature to about 200°

C.

12. The method of claim 8 in which the electromagnetic ion/neutral separation field is an electrostatic field.

13. The method of claim 12 in which the electrostatic ion/neutral separation field is imposed by impressing a potential difference between a first electrode and a second electrode, the two electrodes being located in the vacuum chamber and spaced apart from one another on opposite sides of the initial line-of-sight portion of the carbon-ion-transport path, the potential difference being in the range of from about 100 volts to about 1000 volts.

14. The method of claim 13 in which the potential difference impressed between the two electrodes has a value effective to produce an electrostatic field strength of about 100 volts/cm.

15. A diamond-carbon-material-deposition apparatus for depositing diamond carbon material on a substrate, the apparatus comprising:

(a) a vacuum-tight vacuum chamber;

(b) a carbon-source positioner for positioning a solid carbon source composed of substantially pure carbon at a carbon-source position in the vacuum chamber so that in operation a surface portion of the solid carbon source defines a carbon-vapor-source area;

(c) a substrate positioner for positioning a substrate at a substrate position in the vacuum chamber so that in operation a surface portion of the substrate defines a carbon-deposition area;

(d) a neutral-carbon-species shield located in the vacuum chamber, the neutral-carbon-species shield being shaped and positioned relative to the carbon-vapor-source area and the carbon-deposition area to shield the carbon-deposition deposition area of the substrate from any line-of-sight exposure to the carbon-vapor-source area, a carbon-ion-transport path being defined to extend within the vacuum chamber from the carbon-vapor-source area of the solid carbon source through the neutral-carbon species shield to the carbon-deposition area of the substrate;

(e) a first electrode and a second electrode, the two electrodes being located in the vacuum chamber and spaced apart from one another, a region between the first and the second electrodes defining an ion/neutral separation region in the vacuum chamber, the carbon-ion-transport path extending through the ion/neutral separation region, the carbon-ion-transport path having an initial line-of-sight portion extending from the carbon-vapor-source area of the solid carbon source into the ion/neutral separation region; and

(f) a carbon vaporizer and ionizer for electrically vaporizing and ionizing carbon material from the carbon-vapor-source area of the solid carbon source to form a carbon vapor of neutral carbon species and ionized carbon species so that in operation carbon vapor travels along the initial line-of-sight portion of the carbon-ion-transport path into the ion/neutral separation region to be exposed to an electromagnetic ion/neutral separation field imposed between the first and the second electrodes, the ion/neutral separation field having an intensity and direction effective to separate at least a fraction of ionized carbon species of a first polarity in the carbon vapor from the neutral carbon species in the carbon vapor and any ionized carbon species of a second opposite polarity in the carbon vapor and substantially selectively to direct such ionized carbon species of the first polarity to impact the carbon-deposition area of the substrate, essentially no neutral carbon species and ionized carbon species of the second polarity arriving at the carbon-deposition area of the substrate, the ionized carbon species of the first polarity impacting the carbon-deposition area of the substrate forming diamond carbon material on the substrate.

16. The apparatus of claim 15 in which the carbon vaporizer and ionizer includes an E-gun for directing an electron beam onto the carbon-vapor-source area of the solid carbon source.

17. The apparatus according to claim 16 in which the substrate positioner is adapted to position the substrate adjacent to one of the two electrodes.

18. The apparatus according to claim 17 in which the neutral-carbon-species shield is a collimator plate having a collimator aperture passing through it, the collimator plate being positioned between the carbon-vapor-source area and the two electrodes, the two electrodes being spaced an approximately equal distance from an axis o the collimator aperture which extends generally parallel to the initial line-of-sight portion of the carbon-ion-transport path.