Method for determining positional errors and for compensating for such errors, and apparatus for carrying out the method

• US 4,982,504 A
• Filed: 02/17/1989
• Issued: 01/08/1991
• Est. Priority Date: 02/18/1988
• Status: Expired due to Fees

• Current Assignee: C.E. Johansson AB (MKS Instruments Incorporated)
• Original Assignee: C.E. Johansson AB (MKS Instruments Incorporated)
• Inventors: Naeve, Ambjorn, Soderberg, Bo, Hocke, Ulf, Pettersson, Bo
• Primary Examiner(s): Cuchlinski, Jr., William A.
• Assistant Examiner(s): FULTON, CHRISTOPHER W
• Application Number:
  US07/311,950
• Time in Patent Office: 690 Days
• Field of Search: 33/502, 33/503-505, 33/626, 33/556, 73/1 J, 364/571.01, 364/571.02
• US Class Current: 33/502
• CPC Class Codes: G01B 21/045 Correction of measurements G01B9/02055 takes precedence
• CPC Class Codes: G05B 2219/37101 Vector gauge, telescopic ballbar
• CPC Class Codes: G05B 2219/37619 Characteristics of machine, deviation of movement, gauge,
• CPC Class Codes: G05B 2219/41176 Compensation control, position error with data from lookup memory

Abstract

A method for determining and correcting positional errors or deviations which occur when measuring the position of a point in space, or when positioning to a point which has a specific position in space, where the position refers to a specific coordinate system, such as a rectangular coordinate system. The method comprises making a comparison between a multiple of measured values and at least one reference, and determining a correction on the basis of this comparison, wherewith a positionable member, such as a contact probe, a tool holder or corresponding device (1, 13) is moved to a given position in space during the measuring or positioning process. The method is particularly characterized in that the reference consists of a geometry of known kind, and in that the measured values are correlated to a geometry of known kind, this correlation being used to calculate corrections for the coordinate axes of the system. There is also an apparatus for carrying out the method.

Claims

1. A method for determining and correcting positional errors which occur when measuring the position of a point in space or when positioning to a point which has a specific position in space, where said position refers to a specific coordinate system, such as a rectangular coordinate system, said method comprising comparing a multiple of measured values with at least one reference and determining a correction of positional errors on the basis of the comparison, and moving a positionable member to a given position in space during said measuring or defining process, characterized in that said reference is a geometry of known kind, and in that the correlation is used to calculate corrections for the coordinate axes (3, 6, 7) of the system, and wherein linear errors and non-linear errors are made the basis of said correction, where, for the purpose of determining corrections with respect to non-linear errors or deviations, several geometries are used, the differences between said different geometries being such as to enable detection of the influence of non-linear errors or deviations on the measured values.

2. A method according to claim 1, characterized in that said correction of positional errors is effected in respect of linear errors or deviations, such as angular errors or deviations between the different coordinate axes.

3. A method according to claim 1, characterized in that at least two different geometrics are used.

4. A method according to claim 1, characterized in that said geometry is that of a spherical surface.

5. A method according to claim 1, characterized in that said geometry is obtained with the aid of position establishing devices (8, 14, 15) against which measurements are determined and which are caused to adopt several positions.

6. A method according to claim 1, characterized in that calculated corrections are stored in a memory unit.

7. A method according to claim 1, characterized in that positional measurement values are corrected, preferably automatically, on the basis of calculated corrections.

8. A method according to claim 1, characterized in that when positioning to a given point in space, control signals are corrected, preferably automatically, on the basis of calculated corrections.

9. A method according to claim 1, characterized in that two or more separate coordinate systems intended for use as parts of a larger, common system are mutually adapted by using the same geometry for said different coordinate systems.

10. A method as defined in claim 1, wherein said positionable member is a contact probe.

11. A method as defined in claim 1, wherein said positionable member is a tool holder.

12. Apparatus for determining and correcting positional errors or deviations which occur when measuring the position of a point in space or when positioning to a point which has a specific position in space, where said position refers to a given coordinate system, such as a rectangular coordinate system, and which apparatus includes a positioning device and means for moving said positioning device to a given position in space during a measuring or positioning process, and also includes means for comparing a multiple of measured values with at least one reference and for determining corrections on the basis of said comparison, characterized in that position establishing devices (8, 14, 15) are provided for establishing positions disposed in accordance with a geometry of known kind, which constitutes said reference, and in that means are provided for calculating corrections for the coordinate axes (3, 6, 7) of the system with the aid of the correlation of said geometry to said measured values, and wherein said correction is based on linear errors or deviations and non-linear errors or deviations, wherewith corrections relating to non-linear errors or deviations are determined with the use of several geometries, the differences between said several geometries being such as to enable the influence of a non-linear error or deviation on said measured values to be detected.

13. Apparatus according to claim 12, characterized in that said correction of positional errors is intended to be based on linear errors or deviations, such as angular errors or deviations between the different coordinate axes (3, 6, 7).

14. Apparatus according to claim 12, characterized by position establishing devices (8, 14, 15) which are effective in engendering at least two mutually different geometries.

15. Apparatus according to claim 12, characterized in that said geometries correspond to a spherical surface.

16. Apparatus according to claim 12, characterized in that the position establishing devices (8, 14, 15) includes a measuring arm (9, 15) of which a first part is pivotally mounted on a journal which during a measuring process has a fixed position relative to a table (12), stand or corresponding structure, and of which a second part (11, 17) spaced from said first part, is intended to coact pivotally with a positionable member (1, 13) for establishing punctiform positions on one and the same spherical surface.

17. Apparatus according to claim 12, characterized by a memory unit for the storage of calculated corrections.

18. Apparatus according to claim 12, characterized by means for correcting positional measurement values, on the basis of calculated corrections.

19. Apparatus according to claim 12, characterized by means for correcting control signals, when positioning to a given point, said correction being effected on the basis of calculated corrections.

20. Apparatus according to claim 12, characterized in that two or more coordinate systems intended and arranged for use as constituents of a larger, common system, are intended to be adapted mutually by using the same geometry for all coordinate systems.

21. Apparatus according to claim 12, wherein said positioning device is a contact probe.

22. Apparatus according to claim 12, wherein said positioning device is a tool holder.