Integrated accelerometer assembly
First Claim
Patent Images
1. An integrated accelerometer comprising, in combination:
- (a) a planar support base having a central aperture;
(b) a pendulous member including two arms;
(c) a pair of spaced flexible hinges, a first end of each of said hinges being welded to said support base and a second end of each being welded to one of said arms whereby said pendulous member is pivotally supported within said aperture(d) a pair of limit stops welded to opposed sides of said support base for limiting the movement of said pendulous member; and
(e) said support base includes a plurality of copper filled apertures for anchoring said hinge welds and said limit stop welds and said pendulous member includes a plurality of copper filled apertures for anchoring said hinge welds.
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Abstract
An assembly for use in a dry accelerometer. The assembly includes a flat ceramic base with an interior aperture, two metal hinges and a pendulous mass supported within the aperture by such hinges. A light emitting diode and photodetector are provided for measuring movement of the pendulous mass. The assembly is readily fabricated and tested with batch processes.
36 Citations
7 Claims
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1. An integrated accelerometer comprising, in combination:
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(a) a planar support base having a central aperture; (b) a pendulous member including two arms; (c) a pair of spaced flexible hinges, a first end of each of said hinges being welded to said support base and a second end of each being welded to one of said arms whereby said pendulous member is pivotally supported within said aperture (d) a pair of limit stops welded to opposed sides of said support base for limiting the movement of said pendulous member; and (e) said support base includes a plurality of copper filled apertures for anchoring said hinge welds and said limit stop welds and said pendulous member includes a plurality of copper filled apertures for anchoring said hinge welds. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification