Expansion of compact database for pattern inspector or writer

• US 4,989,255 A
• Filed: 03/25/1988
• Issued: 01/29/1991
• Est. Priority Date: 03/25/1988
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Bambenek, Theodore R., Wood, Anthony B., Manns, William G., Norwood, David A.
• Primary Examiner(s): Bouderau, Leo H.
• Assistant Examiner(s): Cammarata, Michael
• Application Number:
  US07/173,710
• Time in Patent Office: 1,040 Days
• Field of Search: 382/8, 382/20, 382/27, 382/56, 358/107
• US Class Current: 382/145
• CPC Class Codes: G03F 1/84 Inspecting
• CPC Class Codes: G03F 7/70383 Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams maskless lithography using a programmable mask G03F7/70291
• CPC Class Codes: G03F 7/7065 Defects, e.g. optical inspection of patterned layer for defects
• CPC Class Codes: G06T 2207/20021 Dividing image into blocks, subimages or windows
• CPC Class Codes: G06T 2207/30141 Printed circuit board [PCB]
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon'"'"'s data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.

Claims

1. A computerized method of expanding a compact database representation of an ideal pattern, to a bit-mapped representation of the ideal pattern, in a optical, pattern writing or inspection system, comprising the steps of:

(a) partitioning an ideal pattern and a target pattern into a plurality of strips;

(b) partitioning each strip of said ideal pattern and said target pattern into a plurality of data frames and target frames respectively;

(c) partitioning the ideal pattern into a plurality of polygons each of which is completely contained within a single data frame; and

(d) organizing the compact database to include a data frame for each corresponding target frame so that each polygon be described completely within the data frame that corresponds to the target frame.

2. The method of claim 1, further comprising the step of:

converting the polygon data descriptions in each data frame, to turnpoint polygon data representations.

3. The method of claim 2, further comprising the step of:

Converting the turnpoint polygon data descriptions in each data frame, into bit-mapped data descriptions of the polygons.

4. The method of claim 3, wherein the step of generating bit-mapped data descriptions, includes the steps of:

processing the data frames in parallel.

5. The method of claim 3, wherein each bit of the bit-mapped data description, corresponds one-to-one with a pixel on the target.

6. The method of claim 3, further comprising the step of:

generating a bit-mapped representation of the target which includes the bit-mapped data descriptions of the polygons.