Vacuum apparatus
First Claim
1. A vacuum apparatus for the treatment of workpieces, comprising:
- at least one distribution chamber with at least three ports, said ports being shutable with respective vacuum-tight shut-off members;
pumping means connected to said distribution chamber for evacuating at least said distribution chamber;
at least one intermediate chamber with at least three ports;
pumping means connected to said intermediate chamber for evacuating at least said intermediate chamber;
at least two treatment chambers each having a port, said at least two treatment chambers being connected at their ports to two respective ports of said intermediate chamber, said intermediate chamber having a remaining port;
said distribution chamber being connected at one of its ports to the remaining port of said intermediate chamber, said distribution chamber having two remaining ports;
said two remaining ports of said distribution chamber being connected to respective ports of at least two of the group including;
a workpiece input chamber having a port;
a workpiece output chamber having a port;
a workpiece input and output chamber having a port;
a treatment chamber having a port;
a further distribution chamber having at least three ports, and a further intermediate chamber having at least three ports;
first transport means within said at least one distribution chamber for transporting workpieces to and from said at least three ports of said distribution chamber; and
second transport means within said at least one intermediate chamber for transporting workpieces to and from said at least three ports of said intermediate chamber.
5 Assignments
0 Petitions
Accused Products
Abstract
A vacuum apparatus for treating disk-shaped workpieces includes a central distribution chamber into which the workpieces are brought from a lock through a communication opening which can be closed by a closing member. A transporting mechanism, preferably in the form of a robot arm, is located in the distribution chamber which is adjoined by intermediate chambers distributed along its circumference as exchangeable modules whereby the communication between them can be shut off at each point of connection by a closing member. An intermediate chamber communicates with at least one treatment chamber via an allocated communication opening which, in order to allow a separation of the treatment chamber, is accessible from the intermediate chamber. In the intermediate chamber a further transport mechanism is arranged for taking over the workpieces from the first transport mechanism, which further transport mechanism places the workpieces onto an elevating table located under the treatment chamber. The table forwards the workpiece into the allocated treatment chamber and separates it thereby at the same time from the distribution chamber. Preferably a plurality of treatment chambers are allocated to each intermediate chamber. The closing members at the communication openings between the chambers are controlled during the treatment procedures so that no undesired passing of gases and particles from one treatment station into the other is possible.
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Citations
22 Claims
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1. A vacuum apparatus for the treatment of workpieces, comprising:
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at least one distribution chamber with at least three ports, said ports being shutable with respective vacuum-tight shut-off members; pumping means connected to said distribution chamber for evacuating at least said distribution chamber; at least one intermediate chamber with at least three ports; pumping means connected to said intermediate chamber for evacuating at least said intermediate chamber; at least two treatment chambers each having a port, said at least two treatment chambers being connected at their ports to two respective ports of said intermediate chamber, said intermediate chamber having a remaining port; said distribution chamber being connected at one of its ports to the remaining port of said intermediate chamber, said distribution chamber having two remaining ports; said two remaining ports of said distribution chamber being connected to respective ports of at least two of the group including;
a workpiece input chamber having a port;
a workpiece output chamber having a port;
a workpiece input and output chamber having a port;
a treatment chamber having a port;
a further distribution chamber having at least three ports, and a further intermediate chamber having at least three ports;first transport means within said at least one distribution chamber for transporting workpieces to and from said at least three ports of said distribution chamber; and second transport means within said at least one intermediate chamber for transporting workpieces to and from said at least three ports of said intermediate chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A vacuum apparatus for the treatment of workpieces, comprising:
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an intermediate chamber with at least three ports, at least a first one of said ports being positioned in a periphery of said intermediate chamber and at least a second and third one of said ports being positioned in an end wall of said intermediate chamber; workpiece supplying and receiving means connected to said at least one first port for supplying and receiving workpieces through said first port in a direction parallel to a plane of said end wall; a treatment chamber connected to each of said second and third ports for treating a workpiece supplied through each of said second and third ports; first conveying means mounted for rotation about an axis perpendicular to said plane for moving a workpiece into a plurality of locations in said intermediate chamber, at least a part of said locations being respectively aligned in a direction parallel to said axis, with one of said second and third ports; and second conveying means aligned with each of said part of said locations for linearly moving a workpiece at each of said part of said locations from said first and second conveying means into one of said second and third ports, said first and second conveying means being structured to avoid any interaction between said first conveying means and said second conveying means when said second conveying means linearly move a workpiece into one of said second and third ports. - View Dependent Claims (22)
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Specification