Vacuum apparatus

• US 4,990,047 A
• Filed: 05/24/1989
• Issued: 02/05/1991
• Est. Priority Date: 05/24/1988
• Status: Expired due to Term

• Current Assignee: Balzers Aktiengesellschaft (OC Oerlikon Corporation AG)
• Original Assignee: Balzers Aktiengesellschaft (OC Oerlikon Corporation AG)
• Inventors: Martin, Bader, Eberhard, Moll, Wagner, Rudolf, Van Agtmaal, J. G., Zanardo, Renzo
• Primary Examiner(s): Bennet, Henry A.
• Assistant Examiner(s): KILNER, CHRISTOPHER B
• Application Number:
  US07/356,872
• Time in Patent Office: 622 Days
• Field of Search: 414/217, 414/225, 414/226, 414/416, 432/205, 432/241
• US Class Current: 414/217
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: Y10S 414/135 Associated with semiconductor wafer handling
• CPC Class Codes: Y10S 414/137 including means for charging or discharging wafer cassette
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber

Abstract

A vacuum apparatus for treating disk-shaped workpieces includes a central distribution chamber into which the workpieces are brought from a lock through a communication opening which can be closed by a closing member. A transporting mechanism, preferably in the form of a robot arm, is located in the distribution chamber which is adjoined by intermediate chambers distributed along its circumference as exchangeable modules whereby the communication between them can be shut off at each point of connection by a closing member. An intermediate chamber communicates with at least one treatment chamber via an allocated communication opening which, in order to allow a separation of the treatment chamber, is accessible from the intermediate chamber. In the intermediate chamber a further transport mechanism is arranged for taking over the workpieces from the first transport mechanism, which further transport mechanism places the workpieces onto an elevating table located under the treatment chamber. The table forwards the workpiece into the allocated treatment chamber and separates it thereby at the same time from the distribution chamber. Preferably a plurality of treatment chambers are allocated to each intermediate chamber. The closing members at the communication openings between the chambers are controlled during the treatment procedures so that no undesired passing of gases and particles from one treatment station into the other is possible.

Claims

1. A vacuum apparatus for the treatment of workpieces, comprising:

at least one distribution chamber with at least three ports, said ports being shutable with respective vacuum-tight shut-off members;

pumping means connected to said distribution chamber for evacuating at least said distribution chamber;

at least one intermediate chamber with at least three ports;

pumping means connected to said intermediate chamber for evacuating at least said intermediate chamber;

at least two treatment chambers each having a port, said at least two treatment chambers being connected at their ports to two respective ports of said intermediate chamber, said intermediate chamber having a remaining port;

said distribution chamber being connected at one of its ports to the remaining port of said intermediate chamber, said distribution chamber having two remaining ports;

said two remaining ports of said distribution chamber being connected to respective ports of at least two of the group including;

a workpiece input chamber having a port;

a workpiece output chamber having a port;

a workpiece input and output chamber having a port;

a treatment chamber having a port;

a further distribution chamber having at least three ports, and a further intermediate chamber having at least three ports;

first transport means within said at least one distribution chamber for transporting workpieces to and from said at least three ports of said distribution chamber; and

second transport means within said at least one intermediate chamber for transporting workpieces to and from said at least three ports of said intermediate chamber.

2. The vacuum apparatus of claim 1, comprising at least one further intermediate chamber each with at least two treatment chambers, said at least one further intermediate chamber being connected to said distribution chamber.

3. The vacuum apparatus of claim 1, in which said first transport means comprises a robot arm arranged rotatably in said distribution chamber.

4. The vacuum apparatus of claim 1, in which said second transport means comprises a supporting structure which is rotatable around a vertical axis.

5. The vacuum apparatus of claim 4, in which said treatment chambers are located axially above said structure connectable therewith for passage by selectively closable openings located above a circular path said rotatable supporting structure.

6. The vacuum apparatus of claim 5, including elevating mechanisms operative to lift said workpieces into and out of said treatment chambers, located below a circuit path of said supporting structure and aligned with said ports of said treatment chambers.

7. The vacuum apparatus of claim 1, comprising a control unit connected to shut-off members and operating so that a simultaneous spatial communication between said treatment chambers is impossible during a treatment operation.

8. The vacuum apparatus of claim 5, wherein said ports of said treatment chambers are arranged in a circle around said axis.

9. The vacuum apparatus of claim 5, including means for selectively closing the ports of said treatment chambers.

10. The vacuum apparatus of claim 2, including shut-off members for each port of said treatment chambers, and a control unit connected to said shut-off members for moving said shut-off members to open and close the ports of said treatment chambers.

11. The vacuum apparatus of claim 1, wherein said at least three ports of said distribution chamber lie in a common plane around said distribution chamber, said first transport means including a robot arm mounted for rotation about an axis extending perpendicularly to the common plane for transporting workpieces to and from each of the at least three ports of said distribution chamber, the two ports of said intermediate chamber which are connected to the two ports of said at least two treatment chambers, lying in a plane parallel to said common plane, said second transport means comprising a carrier mounted for rotation in said intermediate chamber about an axis extending perpendicularly to said common plane, and handling means connected to at least one of said carrier and said robot arm for transferring a workpiece between said robot arm and said carrier.

12. The vacuum apparatus of claim 11, wherein said second transport means includes elevator means under said carrier for lifting a workpiece from said carrier to one of said two ports to which said ports of said treatment chambers are connected, said elevator means, and said one of said two ports being aligned in a direction perpendicular to said common plane.

13. The vacuum apparatus of claim 1 wherein said shut-off members each comprise controllable valve means for opening and closing said ports.

14. The vacuum apparatus of claim 1, wherein at least one of said treatment chambers is connected at its port by a controllable shut-off members to said intermediate chamber.

15. The vacuum apparatus of claim 11, wherein said carrier comprises at least two depositing areas on which workpieces can be deposited by said handling means.

16. The vacuum apparatus according to claim 11, wherein said carrier comprises at least one depositing area on which a workpiece may be deposited by said handling means, and an indexing drive connected to said carrier for moving said depositing area into alignment with each of said treatment chamber ports.

17. The vacuum apparatus of claim 16, wherein said second transport means comprises at least one elevator means movable parallel to said axis of said carrier, said elevator means being aligned with one of said ports, said carrier comprising at least one depositing area for receiving a workpiece thereon by said handling means, said depositing area being rotatable by said carrier into alignment with said elevator means and said one port, said elevator means being movable through said aligned depositing area to said one port.

18. The vacuum apparatus of claim 17, wherein said elevator means comprises sealing means for sealing said one port when a workpiece is moved by said elevator means through said one port into the treatment chamber of said one port.

19. The vacuum apparatus of claim 17, wherein said elevator means comprises a support surface for carrying a workpiece during treatment of the workpiece in the treatment chamber of said one port.

20. The vacuum apparatus of claim 19, wherein said support surface comprises means for controlling a treatment process for the workpiece in said treatment chamber of said one support.

21. A vacuum apparatus for the treatment of workpieces, comprising:

an intermediate chamber with at least three ports, at least a first one of said ports being positioned in a periphery of said intermediate chamber and at least a second and third one of said ports being positioned in an end wall of said intermediate chamber;

workpiece supplying and receiving means connected to said at least one first port for supplying and receiving workpieces through said first port in a direction parallel to a plane of said end wall;

a treatment chamber connected to each of said second and third ports for treating a workpiece supplied through each of said second and third ports;

first conveying means mounted for rotation about an axis perpendicular to said plane for moving a workpiece into a plurality of locations in said intermediate chamber, at least a part of said locations being respectively aligned in a direction parallel to said axis, with one of said second and third ports; and

second conveying means aligned with each of said part of said locations for linearly moving a workpiece at each of said part of said locations from said first and second conveying means into one of said second and third ports, said first and second conveying means being structured to avoid any interaction between said first conveying means and said second conveying means when said second conveying means linearly move a workpiece into one of said second and third ports.

22. A vacuum apparatus according to claim 21 wherein said end wall comprises an upper wall of said intermediate chamber, said second conveying means comprising elevator means for elevating a workpiece from said first conveying means to one of said second and third ports.