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Method of manufacturing capacitor

  • US 4,990,463 A
  • Filed: 06/29/1989
  • Issued: 02/05/1991
  • Est. Priority Date: 07/05/1988
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing a capacitor, comprising:

  • a first step of nitriding a surface of a first conductive layer, to form a first nitride or oxynitride film;

    a second step of depositing a second nitride film on a surface of said first nitride film;

    a third step of forming an insulating film on a surface of said second nitride film; and

    a fourth step of depositing a second conductive layer on a surface of said insulating film.

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