Films of dithiolene complexes in gas-detecting microsensors
First Claim
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1. A chemical microsensor for detection of gases and vapors, comprising:
- a. an insulating substrate;
b. a film comprising a dithiolene complex of a transition metal covering the substrate wherein a measurable physical property of the film changes upon exposure to gases and vapors;
c. a sensing element to detect any change in physical properties of the film.
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Abstract
Chemical microsensors are fabricated by applying dithiolene transition metal complexes as thin films to chemiresistor devices using the Langmuir-Blodgett technique. The thin films interact with ambient gases and change electrical conductivity upon exposure to a particular gas or vapor. The film material determines the chemical sensitivity and selectivity. The degree of current change depends on the particular gas or vapor and its concentration. These compounds are different in structure and electrical conductive response to gas or vapors than previous materials used for chemical microsensors. This invention is particularly suited for hydrazine detection.
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Citations
15 Claims
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1. A chemical microsensor for detection of gases and vapors, comprising:
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a. an insulating substrate; b. a film comprising a dithiolene complex of a transition metal covering the substrate wherein a measurable physical property of the film changes upon exposure to gases and vapors; c. a sensing element to detect any change in physical properties of the film. - View Dependent Claims (2, 3, 4)
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5. A chemical microsensor comprising
a. a substrate of insulating material; -
b. a conductive material microfabricated in a pattern on the substrate; and c. a film covering the substrate and the conductive material wherein the electrical conductivity of the film changes upon exposure to gases and vapors and wherein the film is a bis(dithiolene) complex of a transition metal of the following formula;
##STR9## wherein M is a divalent metal and R1, R2, R3 and R4 are chosen from the group consisting of hydrogen, alkyl, aryl, a substituted alkyl and a substituted aryl;d. a sensing element to detect any change in electrical conductivity.
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6. A chemiresistor for detection of gases and vapors chosen from the group consisting of water, ammonia, nitrogen dioxide, sulfur dioxide, dimethylmethylphosphonate, diethylsulfide, hydrazine and substituted hydrazine compounds in which the electrical conductivity changes upon exposure to the gases and vapors, comprising:
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a. a substrate of insulating material; b. a conductive material microfabricated in a pattern on the substrate; and c. a film covering the conductive material wherein the electrical conductivity of the film changes upon exposure to gases and vapors and wherein the film comprises a bis(dithiolene) complex of a transition metal of the following formula;
##STR10## wherein M is a divalent metal and R1, R2, R3 and R4 are chosen from the group consisting of hydrogen, alkyl, aryl, a substituted alkyl and a substituted aryl;d. a sensing element to detect any change in electrical conductivity. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
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15. A surface acoustic wave device for detection of gases and vapors, comprising:
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a. a substrate; b. a film covering the substrate wherein the mass and/or electrical conductivity of the film changes upon exposure to gases and vapors resulting in a detectable change in frequency and wherein the film is a bis(dithiolene) complex of a transition metal of the following formula;
##STR12## wherein M is a divalent metal and R1, R2, R3 and R4 are chosen from the group consisting of hydrogen, alkyl, aryl, a substituted alkyl and a substituted aryl.d. a sensing element to detect any change in electrical conductivity and mass.
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Specification