Near-field lorentz force microscopy

• US 4,992,659 A
• Filed: 07/27/1989
• Issued: 02/12/1991
• Est. Priority Date: 07/27/1989
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Wickramasinghe, Hemantha K., Abraham, David W.
• Primary Examiner(s): Berman, Jack I.
• Assistant Examiner(s): Nguyen, Kiet T.
• Application Number:
  US07/386,330
• Time in Patent Office: 565 Days
• Field of Search: 250/306, 250/307, 324/158 R
• US Class Current: 850/1
• CPC Class Codes: G01N 27/82 for investigating the presence of flaws
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/16 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property
• CPC Class Codes: Y10S 977/865 Magnetic force probe

Abstract

Magnetic structures of a sample are imaged by measuring Lorentz force-induced deflection of the tip of a scanning tunneling microscope. While scanning the sample, an a.c. voltage signal at a first predetermined frequency equal to the resonance frequency of the tip is applied to the tip for generating a current between the tip and the surface of the sample for causing the tip to undergo vibratory motion relative to the sample. The tip motion, indicative of the presence of a magnetic field, is optically detected. In an alternative embodiment for providing improved resolution the tip is made to undergo motion at a second predetermined frequency in a direction parallel to the longitudinal axis of the tip and normal to the surface of the sample. The tip motion is optically detected at the sum or difference frequency of the first and second predetermined frequencies for providing improved lateral resolution of the magnetic field measurements using a scanning tunneling microscope. In the alternative embodiment the sum or difference frequency, which ever is detected, is made equal to the resonance frequency of the tip. The magnetic field measurement and tip position are provided to a computer which, in turn, provides an output signal to a device for providing a graphical representation of the magnetic field at different positions on the surface of the sample.

Claims

1. An apparatus for measuring a magnetic field in a sample using a scanning tunneling microscope having a tip comprising:

drive means for controlling the distance between the tip and a surface of the sample and a position of the tip for enabling scanning of the surface and for providing a signal indicative of the position of the tip relative to the sample;

generator means coupled to said tip for providing a current signal at a frequency substantially equal to the resonance frequency of said tip for generating a current between said tip and the surface for causing the tip to undergo vibratory motion in the presence of a magnetic field;

detector means disposed for measuring the motion of the tip in a direction substantially parallel to the plane of the surface of the sample and providing a signal indicative of such motion, and

computer means coupled to said detector means and said drive means for providing an output signal indicative of a position of the tip and a magnetic field magnitude corresponding to the position.

2. An apparatus as set forth in claim 1 further comprising output device means coupled to said computer means for providing an image of the magnetic field magnitude at corresponding positions of the tip.

3. An apparatus as set forth in claim 2, wherein said output device means comprises a screen.

4. An apparatus as set forth in claim 2, wherein said output device means comprises a plotter.

5. An apparatus as set forth in claim 1, wherein said drive means comprises piezoelectric drive means for positioning the tip relative to the surface.

6. An apparatus as set forth in claim 5, wherein said piezoelectric drive means positions the tip relative to a stationary surface.

7. An apparatus as set forth in claim 5, wherein said piezoelectric drive means position the surface relative to a stationary tip.

8. An apparatus as set forth in claim 1, wherein said computer means provides another output indicative of the topography of the surface of the sample.

9. An apparatus as set forth in claim 1, wherein said detector means is an optical heterodyned interferometer.

10. A method for measuring a magnetic field in a sample using a scanning tunneling microscope having a tip comprising the steps of:

disposing the tip in close proximity to a surface of a sample and scanning the surface;

providing to the tip a current signal at a frequency substantially equal to the resonance frequency of the tip for generating a current between the tip and the surface for causing the tip to undergo vibratory motion in the presence of a magnetic field;

measuring the motion of the tip in a direction substantially parallel to the plane of the surface of the sample and providing a signal indicative of such motion, and

computing the position of the tip and a magnetic field magnitude corresponding to the position.

11. A method as set forth in claim 10, further comprising the step of displaying the position of the tip and the magnetic field magnitude corresponding to the tip position.

12. A method as set forth in claim 10, further comprising the step of simultaneously measuring the topography of the surface of the sample.

13. A method as set forth in claim 12, further comprising the step of simultaneously displaying the topography of the surface of the sample.

14. A method as set forth in claim 10, wherein said measuring the motion is optically measuring the motion.

15. An apparatus for measuring a magnetic field in a sample using a scanning tunneling microscope having a tip comprising:

piezoelectric drive means for controlling the distance between the tip and a surface of the sample and a position of the tip for enabling scanning of the surface and providing a signal indicative of the position of the tip;

generator means for providing a current at a frequency substantially equal to the resonance frequency of the tip for generating a current signal between the tip and the surface of the sample for causing the tip to undergo vibratory motion in the presence of a magnetic field;

optical heterodyned interferometric means disposed for measuring the motion of the tip in a direction substantially parallel to the plane of the surface of the sample and providing a signal indicative of such motion;

computer means coupled to said optical heterodyned interferometric means and said piezoelectric drive means for providing an output signal indicative of a position of the tip and a magnetic field magnitude corresponding to the position, and

output device means for providing a display responsive to said output signal.

16. An apparatus as set forth in claim 15 said computer means providing another output signal indicative of the topography of the surface of the sample.

17. An apparatus for measuring a magnetic field in a sample using a scanning tunneling microscope having a tip comprising:

drive means for controlling the distance between the tip and a surface of the sample and a position of the tip for enabling scanning of the surface and for providing a signal indicative of the position of the tip relative to the sample;

generator means coupled to the tip for providing a current signal at a first predetermined frequency for generating a current between the tip and the surface for causing the tip to undergo vibratory motion in the presence of a magnetic field;

means coupled to said drive means for causing the tip to undergo vibratory motion relative to the surface at a second predetermined frequency along an axis substantially normal to the plane of the surface of the sample;

detector means disposed for measuring the motion of the tip in a direction substantially parallel to the plane of the surface of the sample and providing a signal indicative of such motion, and

computer means coupled to said detector means and said drive means for providing an output signal indicative of a position of the tip and a magnetic field magnitude corresponding to the position.

18. An apparatus as set forth in claim 17 further comprising output device means coupled to said computer means for providing an image of the magnetic field magnitude at corresponding positions of the tip.

19. An apparatus as set forth in claim 18, wherein said output device means comprises a screen.

20. An apparatus as set forth in claim 18, wherein said output device means comprises a plotter.

21. An apparatus as set forth in claim 17, wherein said drive means comprises piezoelectric drive means for positioning the tip relative to the surface.

22. An apparatus as set forth in claim 21, wherein said piezoelectric drive means positions the tip relative to a stationary surface.

23. An apparatus as set forth in claim 21, wherein said piezoelectric drive means position the surface relative to a stationary tip.

24. An apparatus as set forth in claim 17, wherein said detector means is an optical heterodyned interferometer means.

25. An apparatus as set forth in claim 17, wherein said detector means measures the motion of the tip at a sum frequency substantially equal to the sum of said first predetermined frequency and said second predetermined frequency and the sum frequency is substantially equal to the resonance frequency of the tip.

26. An apparatus as set forth in claim 25 wherein said detector means is an optical heterodyned interferometer means.

27. An apparatus as set forth in claim 17, wherein said detector means measures the motion of the tip at a difference frequency substantially equal to the difference of said first predetermined frequency and said second predetermined frequency and the difference frequency is substantially equal to the resonance frequency of the tip.

28. An apparatus as set forth in claim 27 wherein said detector means is an optical heterodyned interferometer means.

29. An apparatus as set forth in claim 17, wherein said computer means provides another output indicative of the topography of the surface of the sample.

30. A method for measuring a magnetic field in a sample using a scanning tunneling microscope having a tip comprising the steps of:

disposing the tip in close proximity to a surface of a sample and scanning the surface;

providing to the tip a current signal at a first predetermined frequency for generating a current between the tip and the surface for causing the tip to undergo vibratory motion in the presence of a magnetic field;

simultaneously vibrating the tip at a second predetermined frequency along an axis substantially normal to the plane of the surface of the sample;

measuring the motion of the tip in a direction substantially parallel to the plane of the surface of the sample and providing a signal indicative of such motion, and

computing the position of the tip and a magnetic field magnitude corresponding to the position.

31. A method as set forth in claim 30 further comprising the step of displaying the position of the tip and the magnetic field magnitude corresponding to the tip position.

32. A method as set forth in claim 30, further comprising the step of simultaneously measuring the topography of the surface of the sample.

33. A method as set forth in claim 32, further comprising the step of simultaneously displaying the topography of the surface of the sample.

34. A method as set forth in claim 32 wherein said measuring is optical measuring.

35. A method as set forth in claim 30 wherein said measuring measures the motion of the tip at a sum frequency substantially equal to the sum of said first predetermined frequency and said second predetermined frequency and the sum frequency is substantially equal to the resonance frequency of the tip.

36. A method as set forth in claim 35 wherein said measuring is optical measuring.

37. A method as set forth in claim 30 wherein said measuring measures the motion of the tip at a difference frequency substantially equal to the difference between said first predetermined frequency and said second predetermined frequency and the difference frequency is substantially equal to the resonance frequency of the tip.

38. A method as set forth in claim 37 wherein said measuring is optical measuring.

39. An apparatus for measuring a magnetic field in a sample using a scanning tunneling microscope having a tip comprising:

piezoelectric drive means for controlling the distance between the tip and a surface of the sample and a position of the tip for enabling scanning of the surface and providing a signal indicative of the position of the tip;

generator means coupled to the tip for providing a current signal at a first predetermined frequency for generating a current between the tip and the surface for causing the tip to undergo vibratory motion in the presence of the magnetic field;

means coupled to said piezoelectric drive means for causing the tip to undergo vibratory motion at a second predetermined frequency along an axis substantially normal to the plane of the surface of the sample;

optical heterodyned interferometric means disposed for measuring the motion of the tip in a direction substantially parallel to the plane of the surface of the sample and providing a signal indicative of such motion;

computer means coupled to said optical heterodyned interferometric means and said piezoelectric drive means for providing an output signal indicative of a position of the tip and a magnetic field magnitude corresponding to the position, and

output drive means for providing a display responsive to said output signal.

40. An apparatus as set forth in claim 39 said computer means providing another output signal indicative of the topography of the surface of the sample.

41. An apparatus as set forth in claim 39 wherein said optical heterodyned interferometric means measures the motion of the tip at a sum frequency substantially equal to the sum of said first predetermined frequency and said second predetermined frequency and said sum frequency is substantially equal to the resonance frequency of the tip.

42. An apparatus as set forth in claim 39 wherein said optical heterodyne means measures the motion of the tip at a difference frequency substantially equal to the difference between said first predetermined frequency and said second predetermined frequency and said difference frequency is substantially equal to the resonance frequency of the tip.

43. An apparatus for measuring a magnetic field in a sample using a scanning tunneling microscope having a tip comprising:

drive means for controlling the distance between the tip and a surface of the sample and a position of the tip for enabling scanning of the surface and for providing a signal indicative of the position of the tip relative to the sample;

generator means coupled to said tip for providing a signal for generating a current between said tip and the surface;

detector means disposed for measuring the motion of the tip in a direction substantially parallel to the plane of the surface and providing a signal indicative of such motion, and

computer means coupled to said detector means and said drive means for providing an output signal indicative of a position of the tip and a magnetic field magnitude corresponding to the position.

44. An apparatus as set forth in claim 43 further comprising output device means coupled to said computer means for providing an image of the magnetic field magnitude at corresponding positions of the tip.

45. An apparatus as set forth in claim 43, wherein said computer means provides another output indicative of the topography of the surface of the sample.

46. An apparatus as set forth in claim 43, wherein said detector means is an optical heterodyned interferometer.

47. A method for measuring a magnetic field in a sample using a scanning tunneling microscope having a tip comprising the steps of:

disposing the tip in close proximity to a surface of a sample and scanning the surface;

providing to the tip a signal for generating a current between the tip and the surface;

measuring the motion of the tip in a direction substantially parallel to the plane of the surface and providing a signal indicative of such motion, and

computing the position of the tip and a magnetic field magnitude corresponding to the position.

48. A method as set forth in claim 47, further comprising the step of displaying the position of the tip and the magnetic field magnitude corresponding to the tip position.

49. A method as set forth in claim 47, further comprising the step of simultaneously measuring the topography of the surface of the sample.

50. A method as set forth in claim 49, further comprising the step of simultaneously displaying the topography of the surface of the sample.