Reflection electron holography apparatus

• US 4,998,788 A
• Filed: 01/10/1990
• Issued: 03/12/1991
• Est. Priority Date: 01/13/1989
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Osakabe, Nobuyuki, Tonomura, Akira
• Primary Examiner(s): Arnold, Bruce Y.
• Assistant Examiner(s): Ryan, J. P.
• Application Number:
  US07/462,769
• Time in Patent Office: 426 Days
• Field of Search: 350/3.6, 350/3.67, 350/3.8, 250/306, 250/307, 250/311
• US Class Current: 359/1
• CPC Class Codes: H01J 2237/1514 Prisms
• CPC Class Codes: H01J 37/29 Reflection microscopes

Abstract

An apparatus forming a reflection electron hologram, wherein a fraction of an electron wave from an electron source illuminate a specimen and caused to be reflected thereat, the remaining electron wave does not illuminate the specimen, but passes aside, the specimen, and the electron wave reflected from the specimen and the electron wave not illuminating, but passes aside, the specimen, are superimposed one upon the other.

Claims

1. A reflection electron holography apparatus comprising:

an electron source for emitting an electron wave;

means for guiding the electron wave emitted from the electron source so that one part of the electron wave illuminates a surface of a specimen and is reflected along a first predetermined path and another part of the electron wave is directly passed along a second predetermined path without illuminating the surface of the specimen; and

means for controlling both the first and second predetermined paths of the one and another parts of the electron wave so as to effect an electron wave interference image of the one and another parts of the electron wave on a screen.

2. A reflection electron holography apparatus according to claim 4, wherein the means for guiding the electron wave comprises:

1,

a condenser lens for converging the electron wave emitted from the electron source;

a plate having an aperture for enabling the converged electron wave to pass therethrough; and

a deflector for regulating the direction of the electron wave passed through the aperture of the plate in order to guide the one and another parts of the electron wave.

3. A reflection electron holography apparatus according to claim 1, wherein the means for controlling both the first and second predetermined paths comprises:

an objective lens for focusing the one part of the electron wave reflected from the surface of the specimen along the first predetermined path and the another part of the electron wave directly passed along the second predetermined path;

a plate having an aperture for passing therethrough the one and another parts of the electron wave focused by the objective lens; and

at least one biprism for controlling both the first and second predetermined paths of the one and another parts of the electron waves passed through the plate so as to effect an electron wave interference image on the screen.

4. A reflection electron holography apparatus according to claim 3, wherein the plate has a single aperture for passing therethrough the focused one and another parts of the electron wave.

5. A reflection electron holography apparatus according to claim 4, wherein the at least one biprism includes two biprisms arranged in cascade along the first and second predetermined paths of the one and another parts of the electron wave.

6. A reflection electron holography apparatus according to claim 1, wherein the means for guiding the electron wave comprises:

a condenser lens for converging the electron wave;

a plate having an aperture for passing the converged electron wave therethrough;

a deflector for regulating the direction of the electron wave passed through the aperture of the plate; and

a biprism for separating the electron wave so as to form the one part of the electron wave for illuminating the surface of the specimen and reflection therefrom along a first predetermined path and the another part of the electron wave for directly passing along the second predetermined path.

7. A reflection electron holography apparatus comprising:

an electron source for emitting an electron wave;

a condenser lens for converging the electron wave;

a plate having an aperture for passing the converged electron wave therethrough;

a deflector for regulating the direction of the electron wave passed through the aperture for enabling guidance of one part of the electron wave so as to illuminate a surface of a specimen and be reflected therefrom and another part of the electron wave so as to directly pass along a predetermined path without illuminating the surface of the specimen;

an objective lens for focusing both of the one and another parts of the electron wave;

a plate having an aperture for passing therethrough the one and another parts of the electron wave focused by the objective lens; and

a biprism for controlling paths of the one and another parts of the electron wave passed through the plate so as to effect an electron wave interference image of the one and another parts of the electron wave on a screen.

8. A reflection electron holography apparatus comprising:

an electron source for emitting an electron wave;

a condenser lens for converging the electron wave;

a plate having an aperture for passing the converged electron wave therethrough;

a deflector for regulating the direction of the electron wave passed through the plate;

a biprism for separating the electron wave so as to form one part of the electron wave to illuminate a surface of a specimen and be reflected therefrom and another part of the electron wave to directly pass along a predetermined path without illuminating the surface of the specimen;

an objective lens for focusing both of the one part of the electron wave reflected from the surface of the specimen and the another part of the electron wave directly passed along the predetermined path;

a plate having a single aperture for passing therethrough both of the focused one and another parts of the electron wave; and

two biprisms arranged in cascade for controlling paths of the one and another parts of the electron wave passed through the plate so as to effect an electron wave interference image on a screen of the one and another parts of the electron wave.