Avalanche breakdown semiconductor device
First Claim
1. An avalanche breakdown semiconductor device comprising:
- (a) a semiconductor substrate [42] having a main face [44] and comprising;
(1) a first region [56] of a first conductivity type partly exposed at the main face of the semiconductor substrate;
(2) a second region [60] of a second conductivity type, opposite to the first conductivity type, exposed at the main face of the semiconductor substrate and disposed contiguous to the first region; and
(3) at least one third region [62] of the first conductivity type exposed at the main face of the semiconductor substrate and disposed contiguous to both the first and second regions so that the second and third regions provide therebetween a pn junction which is exposed at the main face of the semiconductor substrate, the third region being surrounded by the second region, as seen at the main face of the semiconductor substrate, and being higher in impurity concentration than the first region;
(b) an insulating layer [46] formed on the main face of the semiconductor substrate so as to cover the pn junction between the second and third regions and substantially all the surface of the third region exposed at the main face of the semiconductor substrate;
(c) a first electrode [48] formed on the main surface of the insulating layer so as to cover substantially all the exposed surface of the third region of the semiconductor substrate via the insulating layer and electrically connected to the second region of the semiconductor substrate; and
(d) a second electrode [52] formed on the face opposite to the main face of the semiconductor substrate and electrically connected to the first region thereof.
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Accused Products
Abstract
A Zener diode comprising a semiconductor substrate having an n-type region partly exposed at a main force of the substrate, a p+ -type region disposed contiguous to the n-type region and exposed at the main face of the semiconductor substrate, and an n+ -type region also exposed at the main face of the substrate and contiguously surrounded by the p+ -type region besides being contiguous to the p+ -type region. The arrangement of the semiconductor regions in relation to one another, and an an insulating layer on the main face of the substrate and to a pair of electrodes thereon, is such that the breakdown voltage is free from the influence of temperatures and of the ions contained in the insulating layer.
23 Citations
11 Claims
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1. An avalanche breakdown semiconductor device comprising:
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(a) a semiconductor substrate [42] having a main face [44] and comprising; (1) a first region [56] of a first conductivity type partly exposed at the main face of the semiconductor substrate; (2) a second region [60] of a second conductivity type, opposite to the first conductivity type, exposed at the main face of the semiconductor substrate and disposed contiguous to the first region; and (3) at least one third region [62] of the first conductivity type exposed at the main face of the semiconductor substrate and disposed contiguous to both the first and second regions so that the second and third regions provide therebetween a pn junction which is exposed at the main face of the semiconductor substrate, the third region being surrounded by the second region, as seen at the main face of the semiconductor substrate, and being higher in impurity concentration than the first region; (b) an insulating layer [46] formed on the main face of the semiconductor substrate so as to cover the pn junction between the second and third regions and substantially all the surface of the third region exposed at the main face of the semiconductor substrate; (c) a first electrode [48] formed on the main surface of the insulating layer so as to cover substantially all the exposed surface of the third region of the semiconductor substrate via the insulating layer and electrically connected to the second region of the semiconductor substrate; and (d) a second electrode [52] formed on the face opposite to the main face of the semiconductor substrate and electrically connected to the first region thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An avalanche breakdown semiconductor device comprising:
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(a) a semiconductor substrate having a main face and comprising; (1) a first region [98] of a first conductivity type partly exposed at the main face of the semiconductor substrate; (2) a second region [100] of a second conductivity type, opposite to the first conductivity type, exposed at the main face of the semiconductor substrate and disposed contiguous to the first region; (3) a third region [104] of the first conductivity type exposed at the main face of the semiconductor substrate and disposed contiguous to both the first and second regions so that the second and third regions provide therebetween a pn junction which is exposed at the main face of the semiconductor substrate the third region being surrounded by the second region, as seen at the main face of the semiconductor substrate, and being higher in impurity concentration than the first region; (4) a fourth region [96] of the second conductivity type disposed contiguous to the first region; and (5) a fifth region [102] of the first conductivity type contiguously surrounded by the second region and exposed at the main face of the semiconductor substrate; (b) an insulating layer [46] formed on the main face of the semiconductor substrate so as to cover the pn junction between the second and third regions and substantially all the surface of the third region exposed at the main face of the semiconductor substrate; (c) a first main electrode [108] electrically connected to the fifth region o the semiconductor substrate; (d) a second electrode [106] electrically connected to the fourth region of the semiconductor substrate; and (e) a gate electrode [110] formed on the surface of the insulating layer so as to cover substantially all the exposed surface of the third region of the semiconductor substrate and electrically connected to the second region of the semiconductor substrate.
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11. An avalanche breakdown semiconductor device comprising:
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(a) a semiconductor substrate [42a] having a main face [44] and comprising; (1) a first region [56] of a first conductivity type partly exposed at the main face of the semiconductor substrate; (2) a second region [60] of a second conductivity type, opposite to the first conductivity type, exposed at the main face of the semiconductor substrate and disposed contiguous to the first region; and (3) at least one third region of the first conductivity type exposed at the main face of the semiconductor substrate and disposed contiguous to both the first and second regions so that the second and third regions provide therebetween a pn junction which is exposed at the main face of the semiconductor substrate, the third region being surrounded by the second region, as seen at the main face of the semiconductor substrate, and being higher in impurity concentration than the first region, the third region comprising a first subregion [62] contiguously surrounded by the second region [60] and a second subregion [80] contiguously surrounded by the first subregion and being higher in impurity concentration that the first subregion [62] thereof; (b) an insulating layer [46] formed on the main face of the semiconductor substrate so as to cover the pn junction between the second and third regions and substantially all the surface of the third region exposed at the main face of the semiconductor substrate; (c) a first electrode [48]]formed on the surface of the insulating layer so as to cover substantially all the exposed surface of the first subregion [62] and electrically connected to the second region of the semiconductor substrate; and (d) a second electrode [52] formed on the face opposite the main face of the semiconductor substrate and electrically connected to the first region thereof.
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Specification