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High voltage rectifier and associated control electronics

  • US 4,999,760 A
  • Filed: 12/12/1989
  • Issued: 03/12/1991
  • Est. Priority Date: 02/20/1989
  • Status: Expired due to Fees
First Claim
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1. High voltage rectifier, in particular for use as a bias voltage supply in vacuum processes such as PVD coating processes, comprising an input transformer and also subsequent rectification, smoothing and switching units and also an arrangement for switch control in dependence on occurring overcurrents, characterised in that in each case, a rectifier (VA, VB, VC) fed from a secondary transformer winding is combined with a subsequent smoothing capacitor (C1A, C1B, C1C), with a first switch (S1A, S1B, S1C) serving as a DC converter for regulation of the output voltage, with a choke (L1A, L1B, L1C) serving for smoothing of the current ripple and also a capacitor (C2A, C2B, C2C) intended for smoothing of the output voltage, and with a second switch (S2A, S2B, S2C) controlled in dependence on occurring overcurrents into a rectifier stage (A, B, C) across the output of which there is connected a recovery diode (D3A, D3B, D3C);

  • and in that the smoothing chokes (L1A, L1B, L1C) can be switched over by the respective second switch (S2A, S2B, S2C) to a first recovery circuit (S1A, L1A, D2A;

    S1B, L1B, D2B;

    S1C, L1C, D2C), wherein, prior to each switching off of the respective second switch (S2A, S2B, S2C) the associated first switch (S1A, S1A, S1C) is brought into the conductive state for a predetermined short period of time and is then switched off.

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