Double buffer vacuum system

• US 5,002,464 A
• Filed: 12/08/1988
• Issued: 03/26/1991
• Est. Priority Date: 04/16/1987
• Status: Expired due to Fees

• Current Assignee: Hyeong G. Lee
• Original Assignee: Hyeong G. Lee
• Inventors: Lee, Hyeong G.
• Primary Examiner(s): Smith, Leonard E.
• Assistant Examiner(s): Blackmon, Robert N.
• Application Number:
  US07/285,967
• Time in Patent Office: 838 Days
• Field of Search: 417/152, 417/53, 417/423.2, 220/420
• US Class Current: 417/152
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: H01L 21/67011 Apparatus for manufacture or treatment processes H01L21/30, H01L21/46; for production or after-treatment of single crystals or homogeneous polycrystalline material C30B35/00

Abstract

The subject invention provides a double buffer vacuum system having a high vacuum inner chamber, a rough vacuum outer chamber, two rough vacuum pumps, a high vacuum pump, and two vacuum gauges. The double buffer vacuum system is adaptable for use in equipment requiring high or ultrahigh vacuum. The subject invention facilitates manufacturing and reduces the cost of materials used in the walls of the chambers. In addition, this system minimizes vacuum leakage through its use of a two vacuum system.

Claims

1. A double buffer vacuum system which comprises:

a rough vacuum outer chamber capable of being hermetically sealed and being divided into an upper and lower portion by a plate, the upper portion of the outer chamber having a hermetically sealable door;

a high vacuum inner chamber capable of being hermetically sealed and being positioned within the upper portion of the outer chamber and hermetically attached to the plate which divides the upper and lower portions of the outer chamber, the inner chamber having a hermetically sealable door;

a high vacuum pump located within the lower outer chamber and hermetically connected to the inner chamber;

a first exhaust valve hermetically connected to the inner chamber and capable of controlling the vacuum communication between the inner chamber and the upper outer chamber;

a second exhaust valve located in and transversing the plate and capable of controlling the vacuum communication between the upper and lower outer chambers; and

a rough vacuum pump connected in vacuum communication with the lower outer chamber.

2. A double buffer vacuum system of claim 1, wherein the high vacuum inner chamber is formed by hermetically bolting walls onto a frame composed of a plurality of bars which are end-to-end welded.

3. A double buffer vacuum system of claim 1, wherein the high vacuum inner chamber maintains a vacuum of greater than about 10^-7 mbar and the outer chamber maintains a vacuum of greater than about 10^-3 mbar.

4. A double buffer vacuum system of claim 2, wherein the walls are made from stainless steel 304, or aluminum alloy.

5. A double buffer vacuum system of claim 1, wherein the high vacuum inner chamber is formed by hermetically bolting walls onto a frame composed of a plurality of bars which are bolted to each other in the presence of a vacuum leak sealant.

6. A double buffer vacuum system of claim 1, wherein the hermetically sealable doors are hinged.

7. A double buffer system of claim 1 which further comprises an additional rough vacuum pump connected in vacuum communication to the high vacuum pump.

8. A double buffer system of claim 1 which further comprises a heating and cooling coil present within the inner chamber.

9. A double buffer system of claim 1 which further comprises a heating and cooling coil present within the outer chamber.