Plasma polymerized polysiloxane membrane
First Claim
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1. An oxygen sensing device, comprising:
- at least three electrodes, including a working electrode and a reference electrode;
means for creating an electric potential between the working electrode and the reference electrode; and
a permselective membrane formed upon the three electrodes by polymerizing a silicon-containing monomer directly onto the electrode;
the silicon-containing monomer having the general formula
space="preserve" listing-type="equation">R.sub.1 --Si--O--Si--R.sub.2 ;
wherein R1 and R2 are selected from the group consisting of--(CH3)3--O--(CH2)n --CH3, where n=0 to 5,--CH2 --C6 H5,--C6 H5,--(CH2)n --COOH, where n=0 to 5,--CO--(CH2)n --CH3, where n=0 to 5, and--(CH2)n --CH3, where n=0 to 5.
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Abstract
An ultrathin selectively permeable membrane made by glow discharge plasma polymerization of a single siloxane monomer with the deposition of the polymer as a single layer upon a nonporous support material. The resulting membrane has an oxygen content between about 10% and 60% and is highly permselective. The support material can be an electrode, thereby forming an electrode that is resistant to fouling or contamination but readily accessible to oxygen.
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8 Claims
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1. An oxygen sensing device, comprising:
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at least three electrodes, including a working electrode and a reference electrode; means for creating an electric potential between the working electrode and the reference electrode; and a permselective membrane formed upon the three electrodes by polymerizing a silicon-containing monomer directly onto the electrode; the silicon-containing monomer having the general formula
space="preserve" listing-type="equation">R.sub.1 --Si--O--Si--R.sub.2 ;wherein R1 and R2 are selected from the group consisting of --(CH3)3 --O--(CH2)n --CH3, where n=0 to 5, --CH2 --C6 H5, --C6 H5, --(CH2)n --COOH, where n=0 to 5, --CO--(CH2)n --CH3, where n=0 to 5, and --(CH2)n --CH3, where n=0 to 5. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification