Transmission electron microscope

• US 5,004,919 A
• Filed: 07/02/1990
• Issued: 04/02/1991
• Est. Priority Date: 07/05/1989
• Status: Expired due to Fees

• Current Assignee: JEOL Limited
• Original Assignee: JEOL Limited
• Inventors: Kondo, Yukihito
• Primary Examiner(s): Berman, Jack I.
• Application Number:
  US07/547,477
• Time in Patent Office: 274 Days
• Field of Search: 250/311, 250/306, 250/307, 250/310
• US Class Current: 250/311
• CPC Class Codes: H01J 37/285 Emission microscopes, e.g. field-emission microscopes

Abstract

A transmission electron microscope capable of operating in photoelectron emission microscopy mode as well as in transmission electron microscopy mode. A negative voltage is applied to a specimen placed between the magnetic pole pieces of the objective lens. In the photoelectron emission microscopy mode, the specimen is irradiated with exciting rays to induce photoelectrons from the rear surface of the specimen. The exciting rays can be soft x-rays or ultraviolet rays produced from a high-pressure mercury lamp. The soft x-rays can be produced by directing the electron beam emitted from the electron gun of the microscope either onto the specimen or onto one or more targets placed over the specimen.

Claims

1. A transmission electron microscope comprising:

an electron gun producing an electron beam;

a condenser lens system which focuses the electron beam onto a specimen;

an imaging lens system consisting of an objective lens, an intermediate lens, and a projector lens;

a display means upon which an image created by the electrons emitted from the specimen is displayed;

a voltage-applying means for applying a negative voltage to the specimen placed between the magnetic pole pieces of the objective lens; and

means for irradiating the specimen with exciting rays to induce photoelectrons from the lower surface of the specimen, whereby the photoelectrons emitted from the specimen are imaged by the imaging lens system.

2. The transmission electron microscope of claim 1, further comprising a selector switch for connecting the specimen either with the voltage-applying means or with a ground and a means for switching the exciting current supplied to the imaging lens system to another value when the operation mode of the microscope is switched from a transmission electron microscopy mode to a photoelectron emission microscopy mode or vice versa.

3. The transmission electron microscope of claim 1, wherein said exciting rays are soft x-rays produced by the incidence of the electron beam upon the upper surface of the specimen.

4. The transmission electron microscope of claim 1, wherein said means for irradiating includes a target disposed over the specimen, and wherein said exciting rays are soft x-rays produced from the target by the irradiation of the electron beam.

5. The transmission electron microscope of claim 1, wherein said means for irradiating includes a light source directed toward the lower surface of the specimen, and wherein said exciting rays are the light emitted from the light source.

6. The transmission electron microscope of claim 5, wherein said means for irradiating includes a reflector which reflects said light to the lower surface of the specimen.

7. The transmission electron microscope of claim 1, wherein said means for irradiating includes at least one target that generates x-rays and is mounted below the specimen inside the objective lens and a deflector for directing the electron beam to the target in such a way that the beam is deflected away from the specimen.

8. The transmission electron microscope of claim 7, wherein at least one target comprises plural kinds of targets disposed at different positions inside the objective lens.

9. The transmission electron microscope of claim 1, further comprising an electrode mounted adjacent the underside of the specimen and a means for applying a lower voltage to the specimen than the negative voltage applied to the specimen.

10. The transmission electron microscope of claim 9, further comprising a means for modulating the voltage applied to the electrode;

an image sensor which converts the image created by the photoelectrons into an electrical signal; and

a means for extracting that component of the electrical signal from the image sensor which is modulated in response to the modulation of the voltage and for supplying the extracted component to the display means.

11. The transmission electron microscope of claim 1, wherein the exciting coil of the objective lens is disposed inside the yoke so constructed and arranged that the center of the coil is located over the specimen, and wherein the yoke of the objective lens is provided with a hole to direct the exciting rays to the lower surface of the specimen from the lower side of the specimen, the hole being located below the specimen.

12. The transmission electron microscope of claim 1, wherein the exciting coil of the objective lens is disposed inside the yoke so constructed and arranged that the center of the exciting coil is located over the specimen, and wherein the yoke of the objective lens is provided with a hole to direct vapor emanating from a vapor source to the lower surface of the specimen from the lower side of the specimen, the vapor source and the hole being located below the specimen.