Infra-red transmitting optical components and optical coatings therefor
First Claim
1. An infra-red transmitting optical component having an anti-reflecting coating thereon of boron phosphide, the coating having been deposited on the component by plasma-assisted chemical vapor deposition at a temperature of less than about 500°
- C. and having a disordered non-crystalline structure.
2 Assignments
0 Petitions
Accused Products
Abstract
Infrared transmitting optical components having a wide variety of substrates (e.g. ZnS, ZnSe, Ge, Si, SiO2) are disclosed all with an optical coating of boron phosphide (BP). The boron phosphide may be a single layer coating or one layer of a multilayer coating in which case it is preferably the penultimate layer. Coated components are provided which are very low in absorption, which are operable at high temperatures with minimal transmission loss, and which are transmitting in two IR wavebands. The boron phosphide layer is deposited by plasma-assisted chemical vapor deposition at a temperature in the range 300°-500° C. preferably using feedstock gases which are hydrogen-fee. Boron phosphide coatings of up to 40 μm in thickness have been achieved.
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Citations
13 Claims
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1. An infra-red transmitting optical component having an anti-reflecting coating thereon of boron phosphide, the coating having been deposited on the component by plasma-assisted chemical vapor deposition at a temperature of less than about 500°
- C. and having a disordered non-crystalline structure.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
Specification