Monolithic detection or infrared imaging structure and its production process

• US 5,008,541 A
• Filed: 11/17/1989
• Issued: 04/16/1991
• Est. Priority Date: 11/29/1988
• Status: Expired due to Fees

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Schaub, Bernard, Peuzin, Jean C., Audaire, Luc
• Primary Examiner(s): FIELDS, CAROLYN
• Application Number:
  US07/438,768
• Time in Patent Office: 515 Days
• Field of Search: 250/338.3, 250/338.4, 250/349, 250/332, 250/333, 250/370.08
• US Class Current: 250/338.3
• CPC Class Codes: G01J 5/34 using capacitors, e.g. pyroelectric capacitors
• CPC Class Codes: H10N 15/10 Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Abstract

The structure comprises an electrically and thermally insulating polyimide layer, infrared sensors which are insulated from one another and have a polyvinyl pyroelectric film, whose face in contact with the polyimide is equipped with two comb-shaped electrodes, whose teeth are imbricated, the pyroelectric film being polarized in a plane parallel to the film and in directions parallel and perpendicular to the comb teeth, an integrated circuit having a face in contact with the polyimide layer, equipped with the reading circuit, and electric contact zones completely traverse the polyimide layer and connect the electrodes of each sensor to a reading circuit.

Claims

1. A monolithic detection or infrared imaging structure comprising at least one electrically and thermally insulating polymer layer (114, 216, 218, 220), infrared sensors (102, 102a, 102b, 102c, 102d), which are insulated from one another and have a pyroelectric polymer film (104), whose face (109) in contact with the insulating layer (114) is equipped with two comb-shaped electrodes (106, 108), whose teeth (110, 112) are imbricated, the pyroelectric polymer film (104) being polarized (111) in a plane parallel to said face of the film in directions parallel (x) and perpendicular (y) to the teeth of the combs, an integrated circuit (116) having a face (134) in contact with the insulating layer (114) equipped with reading circuits (117, 117a, 117b, 117c, 117d) and electrical contact zones (130, 132, 222, 224, 226) completely traversing the insulating layer and connecting the electrodes (106, 108) of each sensor to a reading circuit (117, 117a, 117b, 117c, 117d).

2. A monolithic structure according to claim 1, characterized in that the insulating layer (114, 216, 218, 220) is a polyimide layer.

3. A monolithic structure according to claim 1, characterized in that the polymer film (104) is a polymer or copolymer of polyvinylidene fluoride.

4. A monolithic structure according to claim 1, characterized in that each reading circuit comprises two MOS transistors (118, 120) operating as a switch and connected to a differential amplifier (122).

5. A monolithic structure according to claim 1, characterized in that it comprises three stacked electrical and thermal insulating layers (216, 218, 220), n sensors (102a-102d), an integrated circuit (116) having n+2 reading circuits (117a-117d) and electric contact zones (222, 224, 226) at least traversing an insulating layer and arranged in such a way that the sensor i, with 1≦

i≦

n, is connected to the three reading circuits i, i+1 and i+2.

6. A process for the deposition of a monolithic detection or infrared imaging structure comprising the following stages:

(a) depositing at least one electrically and thermally insulating polymer layer (210, 216, 218,

     220) on the surface of an integrated circuit (116) equipped with reading circuits (117, 117a-117d), followed by polymerization,

(b) production of electric contact zones (130, 132, 222, 224,

     226) facing the reading circuits and passing through the insulating layer,

(c) deposition of conductive layer (208) on the surface of the insulating layer and contact zones,

(d) production of electrode pairs (106,

     108) in the conductive layer (208) and which are shaped like combs, said electrodes facing the electric contact zones, the teeth (110,

     112) of the electrodes of each pair being imbricated,

(e) deposition of a pyroelectric polymer film (212) on the structure obtained in (d), followed by the polymerization of said film,

(f) production of a pyroelectric contact element (104) in the pyroelectric film facing each electrode pair and

(g) polarization (111) of the contact elements in a plane parallel to the surface of the insulating layer and in directions parallel (x) and perpendicular (y) to the teeth (110,

     112) of the combs, each polarized contact element and the pair of electrodes in contact with it constituting an infrared sensor (102, 102a-102d).

7. The process according to claim 6, characterized in that the insulating layer is a polyimide layer.

8. The process according to claim 7, characterized in that the contact zones are formed in the insulating layer (200, 220, 222, 224) by local chemical modification of said layer.

9. The process according to claim 6, characterized in that the pyroelectric film (214) is of polyvinylidene fluoride.

10. The process accordin to claim 6, characterized in that the pyroelectric contact elements are simultaneously polarized by using the electrodes (106, 108) of each sensor to carry the polarization signal.

11. The process according to claim 6, characterized in that the electrodes (106, 108) are formed by anisotropic etching of the conductive layer (208) using an appropriately shaped etching mask (210).

12. The process according to claim 6, characterized in that the polymer elements are formed by anisotropic etching of the polymer film (200) using an appropriately shaped etching mask (202a).