Monolithic detection or infrared imaging structure and its production process
First Claim
1. A monolithic detection or infrared imaging structure comprising at least one electrically and thermally insulating polymer layer (114, 216, 218, 220), infrared sensors (102, 102a, 102b, 102c, 102d), which are insulated from one another and have a pyroelectric polymer film (104), whose face (109) in contact with the insulating layer (114) is equipped with two comb-shaped electrodes (106, 108), whose teeth (110, 112) are imbricated, the pyroelectric polymer film (104) being polarized (111) in a plane parallel to said face of the film in directions parallel (x) and perpendicular (y) to the teeth of the combs, an integrated circuit (116) having a face (134) in contact with the insulating layer (114) equipped with reading circuits (117, 117a, 117b, 117c, 117d) and electrical contact zones (130, 132, 222, 224, 226) completely traversing the insulating layer and connecting the electrodes (106, 108) of each sensor to a reading circuit (117, 117a, 117b, 117c, 117d).
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Accused Products
Abstract
The structure comprises an electrically and thermally insulating polyimide layer, infrared sensors which are insulated from one another and have a polyvinyl pyroelectric film, whose face in contact with the polyimide is equipped with two comb-shaped electrodes, whose teeth are imbricated, the pyroelectric film being polarized in a plane parallel to the film and in directions parallel and perpendicular to the comb teeth, an integrated circuit having a face in contact with the polyimide layer, equipped with the reading circuit, and electric contact zones completely traverse the polyimide layer and connect the electrodes of each sensor to a reading circuit.
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Citations
12 Claims
- 1. A monolithic detection or infrared imaging structure comprising at least one electrically and thermally insulating polymer layer (114, 216, 218, 220), infrared sensors (102, 102a, 102b, 102c, 102d), which are insulated from one another and have a pyroelectric polymer film (104), whose face (109) in contact with the insulating layer (114) is equipped with two comb-shaped electrodes (106, 108), whose teeth (110, 112) are imbricated, the pyroelectric polymer film (104) being polarized (111) in a plane parallel to said face of the film in directions parallel (x) and perpendicular (y) to the teeth of the combs, an integrated circuit (116) having a face (134) in contact with the insulating layer (114) equipped with reading circuits (117, 117a, 117b, 117c, 117d) and electrical contact zones (130, 132, 222, 224, 226) completely traversing the insulating layer and connecting the electrodes (106, 108) of each sensor to a reading circuit (117, 117a, 117b, 117c, 117d).
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6. A process for the deposition of a monolithic detection or infrared imaging structure comprising the following stages:
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(a) depositing at least one electrically and thermally insulating polymer layer (210, 216, 218,
220) on the surface of an integrated circuit (116) equipped with reading circuits (117, 117a-117d), followed by polymerization,(b) production of electric contact zones (130, 132, 222, 224,
226) facing the reading circuits and passing through the insulating layer,(c) deposition of conductive layer (208) on the surface of the insulating layer and contact zones, (d) production of electrode pairs (106,
108) in the conductive layer (208) and which are shaped like combs, said electrodes facing the electric contact zones, the teeth (110,
112) of the electrodes of each pair being imbricated,(e) deposition of a pyroelectric polymer film (212) on the structure obtained in (d), followed by the polymerization of said film, (f) production of a pyroelectric contact element (104) in the pyroelectric film facing each electrode pair and (g) polarization (111) of the contact elements in a plane parallel to the surface of the insulating layer and in directions parallel (x) and perpendicular (y) to the teeth (110,
112) of the combs, each polarized contact element and the pair of electrodes in contact with it constituting an infrared sensor (102, 102a-102d). - View Dependent Claims (7, 8, 9, 10, 11, 12)
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Specification