Differential force balance apparatus

• US 5,009,111 A
• Filed: 08/31/1988
• Issued: 04/23/1991
• Est. Priority Date: 08/31/1988
• Status: Expired due to Fees

• Current Assignee: At&T Venture Company, L.P.
• Original Assignee: QuanScan, Inc.
• Inventors: Hovsepian, Mirik, West, Paul, Thomas, Ronald
• Primary Examiner(s): NOT, DEFINED
• Application Number:
  US07/239,365
• Time in Patent Office: 965 Days
• Field of Search: 73/517 B, 73/862.61, 73/701, 250/306, 250/307
• US Class Current: 73/862.61
• CPC Class Codes: G01P 1/006 used for thermal compensation
• CPC Class Codes: G01P 15/0894 by non-contact electron transfer, i.e. electron tunneling
• CPC Class Codes: G01P 15/133 with piezoelectric counterbalancing means

Abstract

A force measurement apparatus that provides means to compensate for thermal or other disturbances. The apparatus utilizes non-contact electron transfer mechanisms to provide indications of force sensed on a test mass. A plurality of electrodes are used in a differential measurement mode to provide self-zeroing and distortion compensation.

Claims

1. A force balance apparatus comprising:

a first test mass including a first electrically conductive means for conducting an electrical current;

second electrically conductive means for conducting an electrical current spaced apart from and in close proximity to said first electrically conductive means;

first current means for providing an electrical current between said first and second electrically conductive means by way of non-contact electron transfer mechanism;

first maintaining means cooperative with said first current providing means for maintaining said first electrically conductive means a constant distance from said second electrically conductive means, said first maintaining means having a measurable voltage when maintaining the constant distance between said first and second electrically conductive means;

a second test mass including a third electrically conductive means for conducting an electrical current;

a fourth electrically conductive means for conducting an electrical current spaced apart from and in close proximity to said third electrically conductive means;

second current means for providing an electrical current between said third and fourth electrically conductive means by way of non-contact electron transfer mechanisms;

second maintaining means cooperative with said second current providing means for maintaining said third electrically conductive means a constant distance from said fourth electrically conductive means, said second maintaining means having a measurable electrical voltage when maintaining the constant distance between said third and fourth electrically conductive means; and

means for differentially measuring the voltages of said first and second maintaining means.

2. The apparatus as defined in claim 1 wherein said means for differentially measuring said voltages of said first and second maintaining means comprise a differential amplifier.

3. The apparatus as defined in claim 1 wherein said first maintaining means and first current providing means comprise:

an electromechanical component operatively linked with said first electrically conductive means to move said first electrically conductive means in response to an electrical signal; and

a feedback loop circuit operatively linked with said electromechanical component for maintaining a constant distance between said first and second electrically conductive means, said loop circuit being responsive to current changes existing between said first and second electrically conductive means.

4. The apparatus as defined in claim 3 wherein said electromechanical component is a piezoelectric component.

5. The apparatus as defined in claim 3 wherein said electromechanical component defines said first test mass.

6. The apparatus as defined in claim 3 wherein said second maintaining means and second current providing means comprise:

a second electromechanical component operatively linked with said third electrically conductive means to move said third electrically conductive means in response to an electrical signal; and

a feedback loop circuit operatively linked with said electromechanical component for maintaining a constant distance between said third and fourth electrically conductive means, said loop circuit being responsive to current changes existing between said third and fourth electrically conductive means.

7. The apparatus as defined in claim 6 wherein said second electromechanical component is a piezoelectrical component.

8. The apparatus as defined in claim 6 wherein said second electromechanical component comprises said second test mass.

9. The apparatus as defined in claim 1 wherein said first and second test masses are positioned with respect to each other such that a force acting on the apparatus will cause movement of said first electrically conductive means relative to said second electrically conductive means that is opposite to movement of said third electrically conductive means relative to said fourth electrically conductive means.

10. The apparatus as defined in claim 9, further including a stationary reference member having first and second substantially parallel surfaces, said second electrically conductive means being placed on said first surface and said fourth electrically conductive means being placed on said second surface.

11. The apparatus as defined in claim 10 wherein said stationary reference member is disposed between said first and second test masses.

12. A force measurement apparatus which comprises:

a first element incorporating a first electrode;

a second electrode in a spaced-apart relationship to said first electrode;

means for causing a current to exist between said first and second electrodes by non-contact electron transfer mechanisms;

first distance maintenance means for maintaining the distance between said first and second electrodes at a constant value, said first maintenance means having a measurable electrical property when maintaining the distance at the constant value;

a second element incorporating a third electrode;

a fourth electrode in spaced apart relationship to said third electrode;

means for causing a current to exist between said third and fourth electrodes by non-contract electron transfer mechanisms;

second distance maintenance means for maintaining the distance between said third and fourth electrodes at a constant value, said second maintenance means having a measurable electrical property when maintaining the distance at the constant value; and

means for measuring the electric properties of said first and second distance maintenance means.

13. The apparatus as defined in claim 12 wherein said first element and second element are oriented such that a force acting on the apparatus will cause movement of said first electrode relative to said second electrode that is opposite to movement of said third electrode relative to said fourth electrode.

14. The apparatus as defined in claim 13 wherein said first maintenance means is responsive to any changes of current between said first and second electrodes and said second maintenance means is responsive to any changes of current between said third and fourth electrodes.

15. A force balance apparatus comprising:

I

a first elastically-suspended member having a first electrically conductive means;

a reference member having first and second surfaces that are substantially parallel to each other;

a second electrically conductive means located on said first surface of said reference member that is spaced apart and in close proximity to sai first conductive means, said first elastically-suspended member being suspended relative to said reference member to cause movement of said first conductive means relative to said second conductive means when said first elastically-suspended member is subjected to a force;

first current providing means for providing a current flow between said first and second conductive means by way of noncontact electron transfer mechanisms;

first maintaining means operatively linked with said first current providing means for maintaining said first conductive means a constant distance from said second conductive means, said first maintaining means including electrical means having a measurable electrical property when said first maintaining means operates;

a second elastically-suspended member having a third electrically conductive means;

a fourth electrically conductive means located on said second surface of said reference member that is spaced apart and in close proximity to said third conductive means, said second elastically-suspended member being suspended relative to said reference member to cause movement of said third conductive means relative to said fourth conductive means when said second elastically-suspended member is subjected to a force;

second current providing means for providing a current flow between said third and fourth conductive means by way of noncontact electron transfer mechanisms;

second maintaining means operatively linked with said second current providing means for maintaining said third conductive means a constant distance from said fourth conductive means, said second maintaining means including electrical means having a measurable electrical property when said second maintaining means operates; and

means for differentially measuring the electrical properties of said first and second maintaining means.

16. The apparatus as defined in claim 15 wherein said first and second elastically suspended members are oriented such that a force acting on the apparatus will cause movement of said first conductive means relative to said second conductive means that is opposite to movement of said third conductive means relative to said fourth conductive means.

17. The apparatus as defined in claim 16 wherein sai first and second elastically-suspended members comprise piezoelectric components.

18. The apparatus as defined in claim 17 wherein said reference member is disposed between said first and second elastically-suspended members.

19. The apparatus as defined in claim 18 wherein said first and second elastically-suspended members and said reference member are symmetrical.

20. The apparatus as defined in claim 18 wherein said first and third conductive means are probes.