Reflectance infrared microscope having high radiation throughput

• US 5,011,243 A
• Filed: 09/16/1986
• Issued: 04/30/1991
• Est. Priority Date: 09/16/1986
• Status: Expired due to Fees

• Current Assignee: Orbital Sciences Corporation (Northrop Grumman Corporation)
• Original Assignee: Laser Precision Corp. (GN Store Nord A/S)
• Inventors: Hughes, Norman S., Doyle, Walter M.
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US06/907,995
• Time in Patent Office: 1,687 Days
• Field of Search: 350/1.2, 350/1.1, 350/523, 350/527, 350/505, 350/511, 350/526, 350/620, 350/525, 250/330, 250/353, 356/73
• US Class Current: 359/356
• CPC Class Codes: G01N 21/35 using infrared light G01N21/39 takes precedence
• CPC Class Codes: G01N 21/55 Specular reflectivity
• CPC Class Codes: G02B 21/0004 specially adapted for specific applications
• CPC Class Codes: G02B 21/082 for incident illumination only

Abstract

An infrared microscope is disclosed which provides illumination for reflectance by the sample. This illumination follows a path through the objective toward the sample, and again, after reflection, through the objective toward the detector. The reflectance illumination is directed toward the objective and sample by a fully reflective mirror, which injects approximately half of the interferometer beam into the microscope, and permits substantially all of the reflected beam to reach the detector.

Claims

1. In an optical instrument having a sample supported in the instrument, a fully-reflecting objective, means for observing visible radiation at the sample location, a detector of infrared radiation, and means for causing a post-interferometer infrared radiation beam to enter the instrument, an infrared optical system combining transmission mode and reflectance mode functions, comprising:

transmission mode means for directing the post-interferometer radiation beam into and completely through the objective from one direction for transmission illumination of the sample;

reflectance mode means for directing the post-interferometer infrared radiation beam into and completely through the objective from the opposite direction for reflectance illumination of the sample;

the reflectance mode means including a beamsplitter which (a) incorporates a fully reflecting mirror, (b) is located at a distance from the objective, and (c) causes approximately half of the interferometer infrared radiation beam to pass through the objective to be reflected by the sample; and

means for directing substantially an entire sample-reflected radiation to the detector.

2. The optical instrument of claim 1 in which the mirror is so located that it directs the reflected half of the incoming radiation toward the objective, allows the unreflected half of the incoming radiation to follow an exiting path, and allows the path of the sample-reflected radiation to pass across its edge as the radiation travels to the detector along a path which crosses laterally the radiation exiting path.

3. The optical instrument of claim 1 in which the radiation beam at the beamsplitter has the cross-sectional size of a substantially collimated beam.

4. An infrared microscope operable in either a transmission mode or a reflectance mode, comprising:

a source of infrared radiation which supplies a beam entering the microscope;

means for supporting a sample in a position to be illuminated by the infrared radiation in either the transmission mode or the reflectance mode;

a detector which receives radiation after it has illuminated the sample;

an all-reflecting microscope objective whose optical elements are mirrors, and whose location is such that (a) post-sample radiation passes through the objective in the transmission mode, and (b) both pre-sample radiation and post-sample radiation pass through the objective in the reflectance mode;

a first focusing reflector which directs source-provided radiation to the sample in the transmission mode;

a second focusing reflector which, in the reflectance mode, directs source-provided converging radiation through the objective to focus at the sample, and receives post-sample diverging radiation from the objective and directs it toward the detector;

means for directing substantially collimated source-supplied radiation toward the second focusing reflector in the reflectance mode; and

a fully-reflecting flat beam-dividing mirror which, in the reflectance mode, causes approximately half of such collimated radiation to be reflected by the second focusing reflector toward the sample, and permits substantially the entire post-sample radiation to travel from the second focusing reflector to the detector.

5. The infrared microscope of claim 4 in which the objective comprises:

a relatively large area mirror which (a) has a central aperture, (b) has its focal point at the sample, (c) reflects only post-sample radiation in the transmission mode, and (d) reflects both pre-sample and post-sample radiation in the reflectance mode; and

a relatively small area mirror which (a) reflects radiation passing through the aperture in the larger Cassegrain mirror, such radiation having a focal point between the sample and the detector, (b) reflects radiation coming from a larger Cassegrain mirror in the transmission mode, and (c) both reflects radiation toward, and reflects radiation from, the larger Cassegrain mirror in the reflectance mode.

6. The infrared microscope of claim 4 which also comprises:

two confocal parabolic reflectors;

one of which receives the source-provided radiation and provides a converging beam traveling toward a focal point; and

the other of which receives a diverging beam traveling from said focal point and reflects it as a collimated beam to the flat beam-dividing mirror.

7. In a microscope having a sample located by a supporting member, a fully-reflecting microscope objective, means for observing visible radiation at a sample location, a detector of infrared radiation, and means for causing a post-interferometer infrared radiation beam to enter the microscope, an infrared optical system combining transmission mode and reflectance mode functions, comprising:

transmission mode means for directing an entering infrared radiation beam into the objective from one direction for transmission illumination of the sample;

reflectance mode means for directing the entering infrared radiation beam into the objective from the opposite direction for reflectance illumination of the sample;

the reflectance mode means including a beamsplitter which incorporates a fully reflecting mirror and which intersects half of the entering beam so as to cause half of the entering beam to pass to the sample for reflectance; and

the reflectance mode means including means for causing half of the entering beam to travel through one half of the objective, then to illuminate the sample, and then to return through the other half of the objective to illuminate the detector.

8. The microscope of claim 7 in which the radiation beam intersected by the beamsplitter has the cross-sectional size of a substantially collimated beam.

9. In a microscope having a sample supported therein, a detector of infrared radiation, and means for causing a post-interferometer infrared radiation beam to enter the microscope, an infrared optical system combining transmission mode and reflectance mode functions, comprising:

transmission mode means for causing the post-interferometer radiation beam to provide transmission illumination of the sample;

reflectance mode means for causing the post-interferometer infrared radiation beam to provide reflectance illumination of the sample;

the reflectance mode means including;

(a) a sample image plane at a distance from the sample at which plane the radiation beam focuses before and after illuminating the sample; and

(b) a beam divider which receives the radiation beam at a distance ahead of the sample image plane, and which causes half of the radiation beam to be removed from the optical system and the remaining half of the radiation beam to illuminate the sample and then pass to the detector without further obstruction by the beam divider.

10. The microscope of claim 9 in which the beam divider is a mirror whose edge extends across the center of the radiation beam cross-section.

11. The microscope of claim 9 in which:

the transmission mode means causes substantially the entire radiation beam to provide transmision illumination of the sample and thereafter travel to the detector without obstruction by the beam divider.