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Ion beam irradiation apparatus

  • US 5,012,111 A
  • Filed: 06/15/1989
  • Issued: 04/30/1991
  • Est. Priority Date: 06/21/1988
  • Status: Expired due to Fees
First Claim
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1. An ion beam irradiation apparatus comprising:

  • a particle accelerator for developing an ion beam;

    first deflection means disposed in the path of said ion beam, for deflecting said ion beam in a first direction perpendicular to the axis of the path of said ion beam;

    second deflection means disposed in the path of said ion beam, for deflecting said ion beam in a second direction perpendicular to the axis of the path of said ion beam and perpendicular to said first direction in which the path of said ion beam is deflected by said first deflection means;

    a first power supply for supplying a first exciting current having a first ac component and a first dc bias component to said first deflection means;

    a second power supply for supplying a second exciting current having a second ac component and a second dc bias component to said second deflection means; and

    control means for varying magnetic fields developed by said first and second deflection means in response to the amplitude and phase of said first and second ac components and the polarity and magnitude of said first and second dc bias components and thereby controlling the size and the direction scanned by said ion beam.

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