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Semiconductor integrated circuit and method of manufacturing the same

  • US 5,012,427 A
  • Filed: 01/30/1989
  • Issued: 04/30/1991
  • Est. Priority Date: 01/30/1988
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing a semiconductor integrated circuit device, comprising the steps of:

  • forming, on a semiconductor chip, a plurality of cell arrays including at least one cell array having at least one main cell and at least one feed-through cell;

    arranging a plurality of clock driver cells on said plurality of cell arrays so that at least one of said clock driver cells is provided in each of said cell arrays;

    determining the number of said main cells in each of said cell arrays which are to be driven by said clock driver cells;

    detecting the maximum number of said main cells which it is determined are to be driven in the above step;

    calculating the difference between the detected maximum number of said main cells and the total number of said main cells included in each of said cell arrays; and

    connecting, to said clock driver cells, said feed-through cells, the number of which corresponds to the calculated difference, so that loads imposed on said clock driver cells are made substantially uniform.

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