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Method of making an ultraminiature pressure sensor

  • US 5,013,396 A
  • Filed: 11/03/1989
  • Issued: 05/07/1991
  • Est. Priority Date: 06/01/1987
  • Status: Expired due to Term
First Claim
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1. A method of making a pressure sensor having a diaphragm and rim structure including bulk silicon, comprising the steps of:

  • (a) providing a silicon wafer;

    (b) forming at least one mesa upon the silicon wafer to be used as part of the rim structure of the pressure sensor;

    (c) impregnating a selected portion of the silicon wafer which includes the mesa with at least a first material which alters an etching characteristic of the first selected portion;

    (d) impregnating a second selected portion of the silicon wafer which will become the diaphragm of the sensor with a second material which alters an etching characteristic of the second selected portion; and

    (e) removing by etching at least a selected third portion of the silicon wafer adjacent to the first and second portions as part of forming the diaphragm and rim structure.

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