Ultra precision pressure regulator

• US 5,014,031 A
• Filed: 07/21/1989
• Issued: 05/07/1991
• Est. Priority Date: 07/21/1989
• Status: Expired due to Fees

• Current Assignee: SVG Lithography Systems Incorporated (ASML Holding NV)
• Original Assignee: SVG Lithography Systems Incorporated (ASML Holding NV)
• Inventors: Nusser, Heinz
• Primary Examiner(s): Harris, George
• Application Number:
  US07/382,943
• Time in Patent Office: 655 Days
• Field of Search: 335/229, 335/230, 335/234, 335/270, 335/273, 335/279, 251/129.14, 251/129.18
• US Class Current: 335/230
• CPC Class Codes: F16K 31/082 using a electromagnet and a permanent magnet
• CPC Class Codes: G05D 16/2013 using throttling means as controlling means
• CPC Class Codes: H01F 7/08 with armatures

Abstract

A valve actuator for use in a pressure regulator. It comprises an electromagnetic having a plurality of pole pieces. A valve actuating permanent magnet is moveably secured to one of the pole pieces. The pole pieces are so disposed relative to each other that four distinct magnetic forces combine to urge the permanent magnet in a first or second direction depending on the polarity of current applied to a coil disposed about one of said pole pieces.

Claims

1. An electromagnet comprising:

an armature of magnetic material having an inner pole piece disposed between two outer pole pieces;

permanent magnet means fixed to said inner pole piece and movable relative thereto;

means forming an orifice in one of said outer pole pieces disposed opposite a pole of said permanent magnet means at a distance such that said magnet is normally attracted to said one outer pole piece for holding said permanent magnet means against said orifice;

adjustable means associated with the other of said outer pole pieces for controlling the magnetic force at which said permanent magnet means is held against said orifice.

2. An electromagnet according to claim 1 comprising:

coil means disposed about said inner pole piece for causing said outer pole pieces to be of a first or second polarity and said inner pole piece to be of the opposite polarity depending on the polarity of the current applied to said coil means.

3. An electromagnet according to claim 2 wherein said orifice forming means extends a distance so that said permanent magnet means is separated from the main body of said pole piece when it contacts said orifice forming means.

4. An electromagnet according to claim 3 wherein said adjustable means comprises:

screw means which effectively varies the distance said other pole piece is from said permanent magnet means.

5. An electromagnet means according to claim 4 wherein said permanent magnet means comprises:

a permanent magnet;

cylinder means fixed to said inner pole piece;

said permanent magnet slidably disposed in said cylinder.

6. An electromagnet according to claim 4 wherein said permanent magnet means comprises:

a permanent magnet;

flexure means fixing said permanent magnet to said inner pole piece.

7. An electromagnet according to claim 5 further comprising:

tank means for communicating with the ambient via said orifice,

servo control means connected between said tank means and said coil means for applying current to said coil means of a magnitude and polarity for opening or closing said orifice to maintain pressure within said tank means at a predetermined amount.

8. An electromagnet according to claim 6 further comprising:

tank means for communicating with the ambient via said orifice;

servo control means connected between said tank means and said coil means for applying current to said coil means of a magnitude and polarity for opening or closing said orifice to maintain pressure within said tank means at a predetermined amount.