Manufacturing method of a detector using resistance elements

• US 5,014,415 A
• Filed: 05/22/1990
• Issued: 05/14/1991
• Est. Priority Date: 05/29/1989
• Status: Expired due to Term

• Current Assignee: Wacoh Company
• Original Assignee: Wacoh Company
• Inventors: Okada, Kazuhiro
• Primary Examiner(s): ECHOLS, PERCY W
• Application Number:
  US07/526,837
• Time in Patent Office: 357 Days
• Field of Search: 29/621.1, 29/412, 338/4, 338/5, 338/47, 73/720, 73/721, 73/726, 73/727, 73/517 R, 73/862.04, 73/862.65
• US Class Current: 29/621.1
• CPC Class Codes: G01L 19/147 Details about the mounting of the sensor to support or covering means
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
• CPC Class Codes: Y10T 29/49103 Strain gauge making
• CPC Class Codes: Y10T 29/49789 Obtaining plural product pieces from unitary workpiece

Abstract

A first substrate having a working region, a flexible region, and a fixed region is prepared. Resistance elements are formed within the flexible region on a first surface of this substrate. A portion of the first substrate is removed. Thus, the flexible region is allowed to have flexibility. A second substrate is connected to a second surface of the first substrate. The second substrate is cut later into two portions of a working portion and a pedestal. The working portion is connected to the working region of the first substrate, and the pedestal is connected to the fixed region of the first substrate. In order to control displacements in upward and downward directions of the working portion, control substrates are further connected. A force applied to the working portion by acceleration or magnetism is detected as changes in the resistance values of the resistance elements.

Claims

1. A method of manufacturing a sensor using a resistance element, comprising:

a step of defining, on a first substrate, a working region, a fixed region, and a flexible region positioned therebetween,

a step of forming a resistance element within said flexible region on a first surface of said first substrate,

a step of partially removing said first substrate in order to allow said flexible region to have flexibility,

a step of connecting a second substrate to a second surface of said first substrate, and

a step of cutting said second substrate to thereby form a working body connected to said working region of said first substrate and constituted by a portion of said second substrate and a pedestal connected to said fixed region of said first substrate and constituted by a portion of said second substrate.

2. A method of manufacturing a sensor using a resistance element, comprising:

a step of defining a plurality of unit regions on a first substrate, and defining, within each unit region, a working region, a fixed region and a flexible region positioned therebetween,

a step of forming resistance elements within said respective flexible regions on a first surface of said first substrate,

a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility,

a step of connecting a second substrate to a second surface of said first substrate,

a step of cutting said second substrate to thereby form, within each unit region, a working body connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal connected to said fixed region of said first substrate and constituted by a portion of said second substrate, and

a step of cutting off said first and second substrates of every unit region to form independent sensors, respectively.

3. A method of manufacturing a sensor using a resistance element, comprising:

a step of defining a plurality of unit regions on a first substrate, and defining, within each unit region, a working region, a fixed region, and a flexible region positioned therebetween,

a step of forming resistance elements within said respective flexible regions on a first surface of said first substrate,

a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility,

a step of connecting a first surface of a second substrate to a second surface of said first substrate,

a step of cutting said second substrate to thereby form, within each unit region, a working body connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal connected to said fixed region of said first substrate and constituted by a portion of said second substrate,

a step of forming, on the side of a first surface of a third substrate, a groove such that said working body can move with a predetermined degree of freedom thereafter to connect said first surface of said third substrate to a second surface of said second substrate, and

a step of cutting off said first, second and third substrates of every unit region to form independent sensors, respectively.

4. A method of manufacturing a sensor using a resistance element, comprising:

a step of defining a plurality of unit regions on a first substrate, and defining, within each unit region, a working region, a fixed region, and a flexible region positioned therebetween,

a step of forming resistance elements within said respective flexible regions on a first surface of said first substrate,

a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility,

a step of connecting a first surface of a second substrate to a second surface of said first substrate.

a step of cutting said second substrate to thereby form, within each unit region, a working body connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal connected to said fixed region of said first substrate and constituted by a portion of said second substrate,

a step of forming, on the side of a first surface of a third substrate, a groove such that said working portion of said first substrate can move with a predetemined degree of freedom thereafter to connect said first surface of said third substrate to said first surface of said first substrate, and

a step of cutting off said first, second and third substrates of every unit regions to form independent sensors, respectively.

5. A method of manufacturing a sensor using a resistance element comprising:

a step of defining a plurality of unit regions on a first substrate, and defining, within each unit region, a working region at a central portion of each unit region, a flexible region around said working region, and a fixed region around said flexible region, respectively,

a step of forming resistance elements within said respective flexible regions on a first surface of said first substrate so as to enable detection of a force exerted on said each working region with respect to at least two axis directions of three axis directions of a first axis and a second axis included in a plane defining said first surface of said first substrate and perpendicular to each other, and a third axis perpendicular to said first axis and said second axis,

a step of partially removing said first substrate in order to allow said respective flexible regions to have flexibility,

a step of connecting a first surface of a second substrate to a second surface of said first substrate,

a step of cutting said second substrate to form, within each unit region, a working body connected to said working region of said first substrate and constituted by a portion of said second substrate, and a pedestal connected to said fixed region of said frist substrate and constituted by a portion of said second substrate, and

a step of cutting off said first substrate and said second substrate of every unit region to form independent sensors, respectively.