Angular rate sensor

• US 5,014,554 A
• Filed: 04/13/1990
• Issued: 05/14/1991
• Est. Priority Date: 04/14/1989
• Status: Expired due to Fees

• Current Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Nozu, Mikio, Ichinose, Toshihiko, Manabe, Takahiro, Terada, Jiro, Takenaka, Hiroshi, Ueda, Kazumitsu, Senda, Hiroshi, Osada, Yasuhito
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US07/508,639
• Time in Patent Office: 396 Days
• Field of Search: 73/505, 73/526, 310/327, 310/329, 310/370
• US Class Current: 73/504.16
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

An angular rate sensor has a tuning fork structure composed of vibratory components. The vibratory components include piezoelectric drive and detection elements which are joined together into a tuning fork configuration, the drive and detection elements lying in respective orthogonal planes. Leads are electrically connected to the drive and detection elements, and lead terminals are electrically connected to the leads, respectively. The vibratory components are covered with a coating which is of a material having a lower elasticity than the elasticities of the vibratory components. The coating on the vibratory components effectively reduces the propagation of unwanted vibrations, thereby reducing output signal drifts.

Claims

1. An angular rate sensor comprising a tuning fork structure composed of vibratory components which include:

a pair of parallel piezoelectric drive elements;

a pair of parallel piezoelectric detection elements;

said drive elements and said detection elements being joined together into a tuning fork configuration, said drive and detection elements lying in respective orthogonal planes;

a plurality of leads electrically connected to said drive and detection elements; and

a plurality of lead terminals electrically connected to said leads, respectively;

said vibratory components being covered with a coating which is of a material having a lower elasticity than the elasticities of the vibratory components.

2. An angular rate sensor according to claim 1, wherein said tuning fork structure is hermetically sealed in a gas under a pressure lower than one atmospheric pressure.

3. An angular rate sensor according to claim 1, wherein said material is selected from the group consisting of silicone rubber, polyurethane rubber, and silicone varnish.