Spent solvent recovery in circuit processing

• US 5,017,199 A
• Filed: 10/02/1989
• Issued: 05/21/1991
• Est. Priority Date: 10/02/1989
• Status: Expired due to Fees

• Current Assignee: Newport Fab, LLC (Tower Semiconductor Limited)
• Original Assignee: Rockwell International Corporation
• Inventors: Etchepare, Eduard E.
• Primary Examiner(s): Woo, Jay H.
• Assistant Examiner(s): BUSHEY, CHARLES S
• Application Number:
  US07/415,827
• Time in Patent Office: 596 Days
• Field of Search: 55/466, 55/355, 55/57, 137/132, 137/171, 137/177, 137/179, 137/187
• US Class Current: 95/267
• CPC Class Codes: B01D 53/002 by condensation
• CPC Class Codes: Y10T 137/2774 Periodic or accumulation responsive discharge
• CPC Class Codes: Y10T 137/3003 Fluid separating traps or vents
• CPC Class Codes: Y10T 137/3021 Discriminating outlet for liquid
• CPC Class Codes: Y10T 137/3052 Level responsive

Abstract

The invention provides an apparatus and method for removing spent solvent from manufacturing apparatus during operation. The apparatus uses a collection housing having input, exhaust, and output ports with U-shaped output transfer tubing positioned inside the housing and connected on one end to the output port. The output tubing arches upward inside the housing and has a tapered opening positioned near the bottom of the housing. Negative pressure is applied to the exhaust port to move cleaned air out of the housing and solvent laden air into the housing through the input port. Solvent precipitates from the air and collects as a liquid in the housing until the liquid level rises above the arched bottom of the transfer tubing. At this point, the solvent flows through the tubing and the output port, and out of the housing under the influence of gravity at atmospheric pressure. In further embodiments, a liquid level indicator using translucent is secured between a pair of access ports extending outward from a sidewall of the housing.

Claims

1. A method of removing solvent from a manufacturing system during processing, comprising the steps of:

connecting a substantially fluid tight chamber to said manufacturing system, said chamber having input means for receiving air laden with solvent from the system, exhaust means for removing cleaned air from the chamber, and a fluid output port disposed on a sidewall of said chamber adjacent a bottom portion thereof through which spent solvent is transferred out of said chamber;

connecting an inverted U-shaped tubing member on one end to said output port;

positioning a second end of said tubing member adjacent the chamber bottom;

extending said tubing upward away from said output port and then downward toward said chamber a bottom in a generally inverted U configuration within said housing interior;

applying a negative pressure to said exhaust means so as to draw solvent laden air into said housing and reduced solvent content air out of said chamber; and

providing a predetermined minimum volume of solvent within said chamber so as to maintain a predetermined minimum pressure barrier between said applied negative pressure and pressure exterior of said chamber to which said tubing member is connected.

2. The method of claim 1 wherein said step of providing a predetermined minimum volume of solvent comprises the step of maintaining a sufficient volume of solvent within said chamber to submerge substantially all of said tubing member.

14. The apparatus of claim 1 wherein said tubing member comprises stainless steel.

15. The apparatus of claim 14 wherein said tubing member comprises multiple interconnected segments.

3. Apparatus for recovering solvent from a manufacturing process comprising:

a collection housing having a substantially fluid tight interior volume;

input means connected to said housing for receiving air laden with solvent from said process;

exhaust means connected to said housing for removing cleaned air from said housing;

at least one fluid output port disposed on a sidewall of said housing adjacent a bottom portion thereof for transferring collected solvent out of the interior of said housing; and

an arcuate tubing member positioned within said housing interior, having an opening on a first end connected to said output port and an opening on a second end extending downward toward a housing bottom region, said tubing member having a central portion that extends upward in a generally inverted U shape from and between said first and second ends.

4. The recovery apparatus of claim 3 wherein said collection housing comprises generally cylindrical sidewalls terminating on one end in a generally circular bottom wall.

5. The recovery apparatus of claim 4 wherein said collection housing terminates on a second end in a removable cover with a fluid seal between said sidewall and said cover;

and

said input means comprises at least one inlet port disposed on said removable cover for passage of solvent laden air.

6. The recovery apparatus of claim 4 wherein said exhaust means comprises at least one exhaust port disposed on said removable cover.

7. The apparatus of claim 3 further comprising input and output port means connected to a sidewall of said housing in vertical alignment and a viewing tube connected between said ports so as to receive a portion of fluid residing in said housing.

8. The apparatus of claim 7 wherein said viewing tube is translucent.

9. The apparatus of claim 8 wherein said viewing tube is transparent.

10. The apparatus of claim 8 wherein said viewing tube comprises a material chosen from the group of plastic or glass.

11. The apparatus of claim 3 wherein said collection housing comprises a generally cylindrical sidewall and a closed bottom joined thereto and being substantially fluid tight.

12. The apparatus of claim 11 wherein said housing comprises a material chosen from the group of stainless steel, plastic, or glass.

13. The apparatus of claim 11 wherein said housing employs a threaded top edge for engaging a support cover.

16. The apparatus of claim 3 wherein said output ports comprises a passage in a sidewall of said collection housing and said tubing member first end extends therethrough, and is sealed about its periphery to said housing.

17. The apparatus of claim 3 wherein said output ports comprises a threaded tubular body extending through a sidewall of said housing being configured to accept compression type fittings on each end thereof and further comprising:

at least one annular seal disposed about said body adjacent an inner wall of said housing;

at least one backing washer disposed about said body adjacent said annular seal;

at least a first backing nut disposed about said body adjacent said backing washer; and

at least a second backing nut disposed about said body adjacent an outer wall of said housing.

18. The apparatus of claim 3 wherein said central portion is positioned so as to remain submerged below a desired minimum fluid level in said housing.

19. The apparatus of claim 3 further comprising a support foot connected to said second end of said tubing member.

20. The apparatus of claim 3 wherein said second end of said tubing member comprises a sharply tapered opening.