Gas phase selective beam deposition

• US 5,017,317 A
• Filed: 12/04/1989
• Issued: 05/21/1991
• Est. Priority Date: 12/04/1989
• Status: Expired due to Fees

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Marcus, Harris L.
• Primary Examiner(s): Powell, William A.
• Application Number:
  US07/444,882
• Time in Patent Office: 533 Days
• Field of Search: 156/643, 156/272.2, 156/272.8, 156/345, 156/242, 264/81, 264/85, 425/174, 425/174.4, 118/715, 118/728, 118/50.1, 118/620, 427/12, 427/35, 427/38, 427/53.1, 427/248.1, 427/249, 427/255.1, 219/121.12, 219/121.15, 219/121.29, 219/121.36, 219/121.6, 219/121.8
• US Class Current: 264/81
• CPC Class Codes: B29C 64/153 using layers of powder being selectively joined, e.g. by selective laser sintering or melting
• CPC Class Codes: B29C 64/159 using only gaseous substances, e.g. vapour deposition
• CPC Class Codes: B29C 64/40 Structures for supporting 3D objects during manufacture and intended to be sacrificed after completion thereof
• CPC Class Codes: B33Y 10/00 Processes of additive manufacturing
• CPC Class Codes: B33Y 70/00 Materials specially adapted for additive manufacturing
• CPC Class Codes: C23C 16/01 on temporary substrates, e.g. substrates subsequently removed by etching
• CPC Class Codes: C23C 16/047 using irradiation by energy or particles

Abstract

A method and apparatus for selectively depositing a layer of material from a gas phase to produce a part comprising a plurality of deposited layers. The apparatus includes a computer controlling a directed energy beam, such as a laser, to direct the laser energy into a chamber substantially containing the gas phase to preferably produce photodecomposition or thermal decomposition of the gas phase and selectively deposit material within the boundaries of the desired cross-sectional regions of the part. For each cross section, the aim of the laser beam is scanned over a target area and the beam is switched on to deposit material within the boundaries of the cross-section. Each subsequent layer is joined to the immediately preceding layer to produce a part comprising a plurality of joined layers. In an alternate embodiment of the present invention, a gas phase is condensed on a surface and a laser beam is used to selectively evaporate, transform, activate or decompose material in each layer. A subsequent layer is condensed and the evaporation, transformation, activation or decomposition step is repeated to produce a part comprising a plurality of joined layers. The apparatus of the present invention preferably comprises a computer controlled laser generating and scanning system aiming at least one laser beam into a chamber comprising at least one gas phase and controlling the aim and selectively depositing or evaporating material to produce a part.

Claims

1. A method of producing a part comprising the steps of:

positioning a first gas phase proximate a target area;

scanning the aim of at least one directed energy beam relative to said target area and selectively depositing material from said first gas phase in a first layer on said target area;

positioning a second gas phase proximate said target area;

scanning the aim of at least one directed energy beam relative to said target area and selectively depositing material from said second gas phase in a second layer on said target area, including the substeps of

joining said first and second layers during the scanning and depositing of the second layer; and

positioning successive gas phases over said target area and scanning the aim of at least one directed energy beam over said target area and selectively depositing material to produce successive layers joined to a previously deposited layer and producing a part comprising a plurality of joined layers.

2. The method of claim 1 wherein said first and second gas phases comprise at least one gas selected from the group consisting of organometallic, hydrocarbon, chloride, fluoride, oxide, nitride and polymer precursor gases.

3. The method of claim 1 wherein said first and second gas phases comprise substantially identical chemical compositions.

4. The method of claim 1 wherein each said scanning step comprises the substep of thermally decomposing at least one of each said gas phases.

5. The method of claim 1 wherein each said scanning step comprises the substep of photodecomposing at least one of each said gas phases.

6. The method of claim 1 wherein each said scanning step further comprises the substep of selecting at least one wavelength of said at least one energy beam to selectively deposit material from said gas phase.

7. The method of claim 6 wherein said wavelength selection substep further comprises the substep of selectively decomposing said gas phase.

8. The method of claim 1 wherein each said scanning step further comprises the substep of selecting at least one wavelength of said at least one energy beam to selectively decompose said gas phase.

9. The method of claim 1 wherein each said scanning step further comprises the substep of selectively heating said target area to selectively deposit material from said gas phase.

10. The method of claim 9 wherein said selectively heating substep further comprises the substep of selectively dissociating gas molecules of said gas phase.

11. The method of claim 1 wherein said at least one directed energy beam comprises at least one laser beam.

12. The method of claim 1 wherein said at least one directed energy beam comprises at least one ion beam.

13. The method of claim 1 wherein said at least one directed energy beam comprises at least one electron beam.

14. The method of claim 1 wherein said at least one directed energy beam comprises at least one focused plasma beam.

15. A method of producing a part comprising the steps of:

positioning a plurality of gas phases proximate a target area;

scanning the aim of at least one directed energy beam relative to said target area and selectively depositing material from said gas phases in a first layer on said target area;

scanning the aim of at least one directed energy beam across said target area and selectively depositing material from said gas phases in a second layer on said target area, including the substeps of

joining said first and second layers during the scanning and depositing of the second layer; and

successively scanning the aim of at least one directed energy beam across said target area and selectively depositing material to produce successive layers joined to a previously deposited layer and producing a part comprising a plurality of joined layers.

16. The method of claim 15 wherein said plurality of gas phases comprises gas phase composite materials and said selectively deposited material comprises composite material.

17. The method of claim 15 wherein said plurality of gas phases comprises a plurality of gases selected from the group consisting of organometallic, hydrocarbon, chloride, fluoride, oxide, nitride and polymer gases.

18. The method of claim 15 wherein each said scanning step comprises the substep of selecting at least one wavelength of said at least one energy beam to selectively deposit material from said plurality of gas phases.

19. The method of claim 18 wherein each said wavelength selecting substep comprises the substep of selecting said at least one wavelength and enabling said at least one energy beam to selectively decompose said plurality of gas phases.

20. The method of claim 15 wherein each said scanning step further comprises the substep of selectively heating said target area to selectively deposit material from said gas phases.

21. The method of claim 20 wherein said selectively heating substep comprises the substep of selectively dissociating gas molecules of said gas phases.

22. A method of producing a part comprising the steps of:

positioning a first gas phase proximate a surface;

controlling the temperature of said surface and enabling a portion of said first gas phase to condense in a first layer on said surface;

scanning the aim of at least one first directed energy beam relative to said surface and selectively evaporating material from said first layer;

positioning a second gas phase proximate said surface;

controlling the temperature of said surface and enabling a portion of said second gas phase to condense on said first layer;

scanning the aim of said at least one first directed energy beam across said surface and selectively evaporating material from said second layer

including the substeps of

joining the first and second layers during the condensing and scanning of the second layer; and

positioning successive gas phases proximate said surface, controlling the temperature of said surface and enabling a portion of said successive gas phases to condense and join in successive layers on said surface, and scanning the aim of at least one first directed energy beam across said surface and selectively evaporating layers of said material and producing a part comprising a plurality of joined layers.

23. The method of claim 22 wherein each said scanning step further comprises the step of scanning the aim of at least one second directed energy beam across said surface and selectively decomposing said gas in each said layer of material.

24. The method of claim 22 wherein each said step of scanning further comprises the substep of controlling wavelengths of said at least one directed energy beam.

25. A method of producing a part comprising the steps of:

positioning a first gas phase proximate a surface;

controlling the temperature of said surface and enabling a portion of said first gas phase to condense in a first layer on said surface;

scanning the aim of at least one first directed energy beam relative to said surface and selectively transforming material in said first layer into a material having a higher melting temperature than said condensed first gas phase material;

positioning a second gas phase proximate said surface;

controlling the temperature of said surface and enabling a portion of said second gas phase to condense on said first layer;

scanning the aim of said at least one first directed energy beam across said surface and selectively transforming material in said second layer into a material having a higher melting temperature than said condensed second gas phase material;

including the substeps of

joining the first and second layers during the condensing and scanning of the second layer; and

positioning successive gas phases proximate said surface, controlling the temperature of said surface and enabling a portion of said successive gas phases to condense and join in successive layers on said surface, and scanning the aim of at least one first directed energy beam across said surface and selectively transforming layers of said material and producing a part comprising a plurality of joined layers.

26. The method of claim 25 wherein each said step of scanning further comprises the step of scanning the aim of at least one second directed energy beam across said surface and selectively decomposing each said layer of material.

27. The method of claim 25 wherein each said step of scanning further comprises the substep of controlling wavelengths of said at least one directed energy beam.

28. A method of forming an integral three-dimensional object, comprising the steps of:

positioning a target in a chamber substantially able to contain a gas phase;

introducing said gas phase into said chamber;

utilizing means for directing an energy beam into the target area to change a property of at least part of said gas phase to deposit a layer of material; and

repeating said depositing and utilizing steps to form a plurality of said layers,

each of said layers being integrally bonded to the next adjacent of said layers by said utilizing steps to form an integral three-dimensional object.

38. The apparatus of claim 28 wherein said scanning means comprises means for positioning said target area relative to said at least one directed energy beam.

29. An apparatus for producing a part comprising:

a chamber housing a target area;

means for introducing a gas phase into said chamber;

means for selectively producing at least one directed energy beam;

means for directing said beam to said target area and for scanning said target area with the aim of said beam in a selective pattern;

means for controlling the operation of said beam to selectively deposit material from said gas phase on said target area during said scanning pattern, including

computer means operatively coupled to the directing means to monitor the aim of said beam during the scanning pattern;

said computer means being programmed with information indicative of the desired boundaries of a plurality of cross-sectional regions of said part;

said computer means being operable for modulating said beam when the aim of said beam is within the desired boundaries of the first cross-sectional region to deposit a first layer of material in said target area,

and for modulating said beam when the aim of said beam is within the desired boundaries of the second cross-sectional region to deposit a second layer of material and join said first and second layers of material,

and for modulating said beam when the aim of said beam is within succeeding desire boundaries of succeeding cross-sectional regions to deposit succeeding layers of material and join said layers to form said part.

30. The apparatus of claim 29 wherein said chamber substantially contains said gas phase.

31. The apparatus of claim 29, wherein said computer means being programmed with the desired boundaries of a plurality of serially-arranged, parallel, cross-sectional regions of said part.

32. The apparatus of claim 29 wherein,

the computer means being programmed with the overall dimensions and configuration of said part,

the computer means further being operative to numerically divide said part into a plurality of serial, parallel, discrete, cross-sectional regions and to derive the desired boundaries for each region.

33. The apparatus of claim 29 wherein said directed energy beam comprises at least one laser beam.

34. The apparatus of claim 29 wherein said directed energy beam comprises at least one ion beam.

35. The apparatus of claim 29 wherein said directed energy beam comprises at least one electron beam.

36. The apparatus of claim 29 wherein said directed energy beam comprises at least one focused plasma beam.

37. The apparatus of claim 29 wherein said scanning means comprises a pair of mirrors driven by respective galvonometers.