Process for selectively growing thin metallic film of copper or gold
First Claim
1. A process for growing a thin metallic film, comprising the steps of:
- maintaining a substrate, having on the surface thereof a first material consisting of metal or a metallic silicide and a second material selected from the group consisting of silicon oxide, silicon nitride and titanium nitride, under a reduced pressure;
heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same;
heating said substrate to a temperature equal to or higher than the decomposition temperature, on said first material, of a vapor of said evaporated starting material; and
feeding a gas stream consisting essentially of the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof and a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said first material.
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Accused Products
Abstract
A process for growing a thin metallic film of gold or copper selectively on a predetermined area of a substrate. An organic complex or organometallic compound of gold or copper as a starting material is heated to evaporate the same, while a substrate having on the surface thereof a metal or a metallic silicide as a first material and an oxide or a nitride as a second material is heated at a temperature equal to or higher than the decomposition temperature, on the first material, of a vapor of the starting material. The vapor of the evaporated starting material is fed together with a reducing gas onto the heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of the first material.
112 Citations
21 Claims
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1. A process for growing a thin metallic film, comprising the steps of:
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maintaining a substrate, having on the surface thereof a first material consisting of metal or a metallic silicide and a second material selected from the group consisting of silicon oxide, silicon nitride and titanium nitride, under a reduced pressure; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said first material, of a vapor of said evaporated starting material; and feeding a gas stream consisting essentially of the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof and a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said first material. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A process for growing a thin metallic film, comprising the steps of:
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heating a starting material consisting of bis-dipivaloylmethanato-copper or dimetyl-gold-hexafluoroacetylaacetonato at a temperature of 70°
to 180°
C. to evaporate the same;heating a substrate having on the surface thereof a metal or a metallic silicide as a first material and an oxide or a nitride as a second material to a temperature of 200 °
to 450°
C;feeding the vapor of said evaporated starting material through a gas ejecting orifice being heated at a temperature equal to or higher than 70°
C. but lower than 200°
C. together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said first material.
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8. A process for growing a thin metallic film comprising the steps of:
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heating a starting material consisting of cyclopentadienyl-triethylphosphine-copper at a temperature of 50°
to 120°
C. to evaporate the same;heating a substrate having on the surface thereof a metal or a metallic silicide as a first material and an oxide or a nitride as a second material to a temperature of 200°
to 350°
C;feeding the vapor of said evaporated starting material through a gas ejecting orifice being heated at a temperature equal to or higher than 50°
C. but lower than 200°
C. together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of copper only on the surface of said first material.
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9. A process for growing a thin metallic film, comprising steps of:
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forming an insulating layer made of an oxide or a nitride on a semiconductor substrate; forming a hole in a predetermined area of said insulating layer to partially expose the surface of said substrate in an area thereof corresponding to said predetermined area; forming on the exposed surface of said substrate a priming layer made of at least one member selected from the group consisting of aluminum, silicon, titanium, tungsten, chromium, molybdenum, zirconium, tantalum, vanadium, and silicides thereof; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on said priming layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A process for growing a thin metallic film, comprising steps of:
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forming a second layer made of an oxide or a nitride on an priming layer serving as a first layer and made of a metal or a metallic silicide; forming a hole in a predetermined area of said second layer to partially expose the surface of said priming layer in an area thereof corresponding to said predetermined area; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said priming layer together with said second layer to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated priming layer and said second layer to selectively grow a thin metallic film of gold or copper only on the exposed surface of said priming layer.
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18. A process for growing a thin metallic film, comprising steps of:
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forming a first insulating layer on a semiconductor substrate; forming a hole in a predetermined area of said first insulating layer to partially expose the surface of said substrate; forming a polycrystalline silicon layer on the remaining first insulating layer and the exposed surface of said substrate; forming on said polycrystalline silicon layer a priming layer made of at least one member selected from the group consisting of aluminum, titanium, tungsten, molybdenum, chromium, zirconium, tantalum, vanadium, and silicides thereof; patterning said polycrystalline silicon layer together with said priming layer; forming a second insulating layer on the remaining priming layer; forming a hole in predetermined area of said second insulating layer to partially expose the surface of said remaining priming layer; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said remaining priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the exposed surface of said remaining priming layer. - View Dependent Claims (19, 20)
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21. A process for growing a thin metallic film, comprising steps of:
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forming a first insulating layer on a semiconductor substrate; forming a hole in a predetermined area of said first insulating layer to partially expose the surface of said substrate; forming a polycrystalline silicon layer on the remaining first insulating layer and the exposed surface of said substrate; patterning said polycrystalline silicon layer; forming a second insulating layer on the remaining polycrystalline silicon layer; forming a hole in a predetermined area of said second insulating layer to partially expose the surface of said remaining polycrystalline silicon layer; forming on the exposed surface of said remaining polycrystalline silicon layer a priming layer made of at least one member selected from the group consisting of aluminum, titanium, tungsten, molybdenum, chromium, zirconium, tantalum, vanadium, and silicides thereof to fill up therewith said hole; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said priming layer.
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Specification