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Optical system and method for sample analyzation

  • US 5,019,715 A
  • Filed: 03/02/1990
  • Issued: 05/28/1991
  • Est. Priority Date: 03/02/1990
  • Status: Expired due to Term
First Claim
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1. An optical system for analyzing samples comprising:

  • a source of radiant energy emitting radiant energy along an optical path of the optical system;

    a sample plane in the optical path;

    a sample to be analyzed having a surface thereof placed at the sample plane;

    means for directing the incident radiant energy to the sample surface including first mask means removably positioned approximately at a Fourier plane or conjugate thereof of the optical system to selectively allow only certain radiant energy to pass therethrough to target that radiant energy at preselected angles of incidence to the sample surface;

    means for collecting energy reflected, emitted or transmitted from the sample including second mask means removably positioned approximately at a Fourier plane or conjugate thereof of the optical system to selectively allow only certain reflected, emitted and/or transmitted radiant energy to pass therethrough which has emanated from the sample at preselected angles of reflection, emission or transmission, anda detector in the optical path receiving the radiant energy passing through the second mask means to analyze selected aspects of the sample.

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