Infrared detector
CAFCFirst Claim
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1. An array of bolometers for detecting radiation in a spectral range, comprising:
- (a) a substrate including an array of bolometer circuit elements adjacent a first surface;
(b) an array of resistors, each of said resistors having leads and spaced from said surface by about one quarter wavelength of the center of said spectral range, said resistor plus leads being formed from a stack including a first conductive layer, a resistive layer, and a second conductive layer with said second conductive layer the closest layer to said surface, each of said resistors further oriented to receive radiation, and located over and electrically connected to a corresponding set of said circuit elements.
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Accused Products
Abstract
Preferred embodiments include a monolithic uncooled infrared detector array of bolometers fabricated over a silicon substrate (142); the bolometers include a stack (144) of oxide (146) TiN (148), a-Si:H (150), TiN (152), oxide (154) with the TiN forming the infrared absorbers and resistor contacts and the a-Si:H the resistor with a high temperature coefficient of resistivity. The resistor is suspended over the silicon substrate (142) by metal interconnects (154 and 156) and related processing circuitry is formed in the silicon substrate (142) beneath the resistor.
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Citations
31 Claims
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1. An array of bolometers for detecting radiation in a spectral range, comprising:
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(a) a substrate including an array of bolometer circuit elements adjacent a first surface; (b) an array of resistors, each of said resistors having leads and spaced from said surface by about one quarter wavelength of the center of said spectral range, said resistor plus leads being formed from a stack including a first conductive layer, a resistive layer, and a second conductive layer with said second conductive layer the closest layer to said surface, each of said resistors further oriented to receive radiation, and located over and electrically connected to a corresponding set of said circuit elements. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A bolometer for detecting radiation in a spectral range, comprising:
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(a) a resistor formed from a planar stack, said stack including (i) a planar layer of resistive material with first and second surfaces, the resistivity of said resistive material depending upon temperature, (ii) a first layer of a first conducting material abutting said first surface, (iii) a second layer of a second conducting material abutting said second surface, said first layer split into first and second regions which form the two terminals of the resistor; (b) said resistor oriented to receive radiation in a spectral range; and (c) a detector for detecting the resistivity of said resistor. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method of detecting radiation in a spectral range, comprising the steps of:
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(a) providing a resistive material which is substantially transparent to radiation in a spectral range; (b) providing conducting material on said resistive material; (c) providing a reflecting material spaced from said conducting material by a substantially transparent material; (d) wherein the thickness and conductivity of said conducting material and said reflecting material spacing are characterized by at least 50% absorption about the center of a spectral range; and (e) measuring the temperature of said resistive material when exposed to radiation in the spectral range. - View Dependent Claims (16, 17)
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18. A method of fabrication of an infrared imager, comprising the steps of:
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(a) forming an array of bolometer circuitry at a surface of a substrate; (b) forming a spacer layer over said circuitry; (c) forming a resistor stack on said spacer layer; (d) forming connections from said resistor stack to said circuitry; and (e) removing said spacer layer. - View Dependent Claims (19, 20)
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21. An array of bolometers for detecting radiation in a spectral range, comprising:
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a substrate including an array of bolometer circuitry elements adjacent a first surface of said substrate; and an array of resistors the value of which varies with received radiation, each of said resistor spaced from a corresponding circuit element by about one quarter wavelength of the center of said spectral range, oriented to receive radiation, and located over and electrically connected said corresponding set of said circuit elements.
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22. An array of bolometers for detecting radiation in an spectral range, comprising:
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a substrate having a first surface; an array of resistors the value of which varies with received radiation, oriented to receive radiation, each of said resistors having a selected and spaced above said substrate a selected distance so as to substantially cover a selected area of said first surface; and an array of bolometer circuit elements sets formed at said first surface, selected ones of said circuit element sets connected to corresponding ones of said variable resistors in said array, and located within said selected area below said corresponding resistors. - View Dependent Claims (23, 24, 25, 26, 27)
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28. An array of bolometers having resistors which vary with received radiation in a spectral range, said array comprising:
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(a) a plurality of pixels formed in a layered structure; and (b) said layered structure including a substrate, circuit elements formed on said substrate, a conducting radiation reflecting layer insulated from and located on said circuit elements, said conducting layer acting as a ground plane and radiation reflector, a spacer layer located on said reflector layer, said spacer layer defining a well above said circuit elements, and said radiation variable resistors supported by said spacer layer and located above said well. - View Dependent Claims (29, 30, 31)
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Specification