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Infrared detector

CAFC
  • US 5,021,663 A
  • Filed: 10/15/1990
  • Issued: 06/04/1991
  • Est. Priority Date: 08/12/1988
  • Status: Expired due to Term
First Claim
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1. An array of bolometers for detecting radiation in a spectral range, comprising:

  • (a) a substrate including an array of bolometer circuit elements adjacent a first surface;

    (b) an array of resistors, each of said resistors having leads and spaced from said surface by about one quarter wavelength of the center of said spectral range, said resistor plus leads being formed from a stack including a first conductive layer, a resistive layer, and a second conductive layer with said second conductive layer the closest layer to said surface, each of said resistors further oriented to receive radiation, and located over and electrically connected to a corresponding set of said circuit elements.

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