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Electrostatically deformable single crystal dielectrically coated mirror

  • US 5,022,745 A
  • Filed: 09/07/1989
  • Issued: 06/11/1991
  • Est. Priority Date: 09/07/1989
  • Status: Expired due to Term
First Claim
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1. A resonant cavity for a laser formed by two opposing mirrors one of which is an electrostatically deformable single crystal dielectrically coated mirror comprising:

  • a thick substrate;

    an insulating layer on said thick substrate, from which a central region has been removed;

    a thin substrate on said insulating layer having at least one polished surface on a side opposite said insulating layer,;

    a mirror layer on said polished surface of said thin substrate which thin substrate is substantially thicker than 10 microns and is sufficiently thick to support said mirror layer but thin enough to deform upon application of a potential between said thin and thick substrates; and

    at least one electrical contact adapted to provide a potential between said thick substrate and said thin substrate to cause said thin substrate to deform and thereby change the resonance of the cavity to tune the laser frequency.

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