×

Compound semiconductor MESFET device with passivation film

  • US 5,023,676 A
  • Filed: 08/01/1989
  • Issued: 06/11/1991
  • Est. Priority Date: 08/01/1988
  • Status: Expired due to Term
First Claim
Patent Images

1. A metal-semiconductor field effect transistor, comprising:

  • a substrate of a group III-V compound semiconductor material having a zinc blend structure;

    a gate electrode provided on the substrate so as to extend in a <

    011>

    direction of the substrate;

    a channel region defined in the substrate in alignment with the gate electrode and extending in a <

    011>

    direction of the substrate;

    a source region defined in the substrate at one side of the channel region;

    a drain region defined in the substrate at the other side of the channel region;

    a source electrode provided on the substrate so as to cover a first part of the source region spaced from the gate electrode while leaving a second part of the source region adjacent the gate electrode uncovered;

    a drain electrode provided on the substrate so as to cover a first part of the drain region spaced from the gate electrode while leaving a second part of the drain region adjacent the gate electrode uncovered; and

    a passivation film of a material experiencing a compressive stress during operation, said passivation film being provided so as to cover the gate electrode, said second part of the source region and said second part of the drain region, said passivation film comprising an inner area part covering a part of said second part of the source region adjacent the gate electrode and a part of said second part of the drain region adjacent the gate electrode, said film also comprising a marginal area part covering a part of said second part of the source region spaced from the gate electrode and a part of said second part of the drain region spaced from the gate electrode, said marginal area part having a thickness that is substantially less than that of said inner area part.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×