Laterally driven resonant microstructures

• US 5,025,346 A
• Filed: 02/17/1989
• Issued: 06/18/1991
• Est. Priority Date: 02/17/1989
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Tang, William C., Howe, Roger T.
• Primary Examiner(s): GRIFFIN, DONALD
• Application Number:
  US07/312,642
• Time in Patent Office: 851 Days
• Field of Search: 361/283, 361/286, 361/296, 361/297, 361/298, 73/336.5, 73/517 AV, 73/704
• US Class Current: 361/283.1
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G03F 7/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor using photoresist structures for special production processes, see the relevant places, e.g. B44C, H01L, e.g. H01L21/00, H05K
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 9/02275 Comb electrodes
• CPC Class Codes: H03H 9/2431 Ring resonators
• CPC Class Codes: Y10S 73/01 Vibration

Abstract

A microbridge device for use as a sensor or an actuator is driven parallel to a substrate as a resonant microstructure. The microstructure comprises a stationary thin-film electrode secured to the substrate and located in a plane above it. A movable plate overlaying the substrate is suspended above it. The movable plate and electrode are patterned to provide for each at least one comb with fingers interdigitated with those of the other.

Claims

1. A linear, lateral-drive structure including in combination:

a substrate,

a stationary thin-film electrode secured to said substrate and located in a plane thereabove,

a movable plate overlying said substrate and suspended by flexible supporting arms above said substrate,

said movable plate and electrode being patterned to provide for each at least one comb with fingers interdigitated with those of the other.

2. The structure of claim 1 wherein the motion of said movable plate is linear.

3. The structure of claim 1 wherein the motion of said movable plate is torsional.

4. The structure of claim 1 having a set of folded beams supporting a linear resonant plate.

5. The said folded beams in claim 4 are anchored near the center of the stucture.

6. The structure of claim 1 having a spiral, anchored at the center of the structure, supporting a torsional resonant plate.

7. The structure of claim 1 having a serpentine spring, supporting a torsional resonant plate.

8. The said serpentine spring in claim 7 is anchored at the center of the structure.

9. The comb structure of claim 1 having comb fingers which are segments of concentric arcs.

10. A resonant microstructure for use as a sensor or an actuator, including in combination:

a silicon substrate,

a movable plate, suspended above and anchored to such substrate, and

lateral-drive means for driving said plate electrostatically in a plane parallel to and above said substrate.

11. The microstructure of claim 10 wherein said lateral-drive means comprises a lateral comb structure for driving said plate with induced electrostatic forces.

12. A lateral-drive structure including in combination:

a silicon substrate,

a stationary electrode secured to and elevated above said substrate comprising a plurality of comb fingers, and

a movable plate suspended by flexible supporting arms in the same plane as said stationary electrodes and comprising a comb with a plurality of fingers on said stationary electrodes.

13. The structure of claim 12 wherein motion of said movable plate is linear.

14. The structure of claim 12 wherein the motion of said movable plate is torsional.

15. The structure of claim 12 having a set of folded beams supporting a linear resonant plate.

16. The said folded beams in claim 15 are anchored near the center of the structure.

17. The structure of claim 15 having a spiral, anchored at the center of the structure, supporting a torsional resonant plate.

18. The structure of claim 12 having a serpentine spring, supporting a torsional resonant plate.

19. The said serpentine spring in claim 18 is anchored at the center of the structure.

20. The comb structure of claim 12 having comb fingers which are segments of concentric arcs.