Humidity measuring apparatus

• US 5,027,077 A
• Filed: 08/22/1989
• Issued: 06/25/1991
• Est. Priority Date: 08/22/1988
• Status: Expired due to Term

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Yanagisawa, Michio, Uchiyama, Shouichi, Miyazaki, Hajime, Ikejiri, Masahisa, Inoue, Kunihiro, Muranaka, Tsukasa
• Primary Examiner(s): Wieder, Kenneth
• Assistant Examiner(s): Mueller, Robert W.
• Application Number:
  US07/397,619
• Time in Patent Office: 672 Days
• Field of Search: 324/691, 324/693, 324/694, 324/711, 324/710, 324/712, 324/696, 324/724, 324/606, 73/73, 73/335, 73/336.5, 340/602
• US Class Current: 324/712
• CPC Class Codes: G01N 27/121 for determining moisture content, e.g. humidity, of the fluid moisture content of the tested material G01N27/048
• CPC Class Codes: G01N 27/122 Circuits particularly adapted therefor, e.g. linearising circuits

Abstract

A humidity sensing apparatus which includes a humidity sensor which detects humidity as a function of impedance is provided. A reference resistor has a predetermined resistance value. A charge switching circuit selectively couples one of the reference resistor or the humidity sensor in series with a reference capacitor which has a predetermined capacitance. A voltage judging circuit determines whether the terminal voltage of the reference capacitor is high or low. A charge/discharge switch selectively charges and discharges the reference capacitor in accordance with the output of the voltage judging circuit. A sensor direction switching circuit inverts the direction of current flowing through the humidity sensor during charging of the reference capacitor. An oscillation frequency counter counts the number of charge/discharge cycles which are repeated during a predetermined time period. A humidity sensor resistance value calculating circuit calculates the resistance value of the humidity sensor in accordance with the number of repeated charge/discharge cycles when the reference capacitor is coupled to the reference resistor for charging and the number of repeated charge/discharge cycles when the reference capacitor is coupled to the humidity sensor during charging. A humidity determining circuit determines the humidity from the resistance value of the humidity sensor calculated by the humidity sensor resistance value calculating circuit.

Claims

1. A humidity measuring apparatus comprising:

humidity sensor means for sensing humidity as a function of resistance;

a reference resistor having a predetermined resistance value;

a reference capacitor having a predetermined capacitance;

charge switching means for selectively coupling one of said reference resistor or said humidity sensor means in series to said reference capacitor to charge said reference capacitor;

voltage judging means for determining whether the terminal voltage of the reference capacitor is at about a predetermined high voltage (H) or at about a predetermined low voltage (L);

charge/discharge switching means for selectively charging and discharging said reference capacitor in accordance with the output of said voltage judging means producing an oscillating charge/discharge cycle in response to the output of the voltage judging means;

sensor direction switching means coupled to said charge/discharge switching means for inverting the direction of current flowing through said humidity sensor means during at least a portion of the period said reference capacitor is charged through said humidity sensor means in response to the output of the charge/discharge switching means;

determining means coupled to said voltage judging means for determining the resistive value of said humidity sensor means and said humidity as a function of the charge/discharge cycle.

2. A humidity measuring apparatus of claim 1, wherein said humidity determining means comprises:

oscillation frequency counter means for counting the number of charge/discharge cycles of said reference capacitor which are repeated during a predetermined time period;

humidity sensor resistance value calculating means for calculating a resistance value for said humidity sensor means in accordance with said number of repeated charge/discharge cycles when said reference capacitor is coupled to the reference resistor for charging and said number of repeated charge/discharge cycles when said reference capacitor is coupled to said humidity sensor for charging; and

humidity identifying means for identifying the humidity from said resistance value of said humidity sensor calculated by said humidity sensor resistance value calculating means.

3. The humidity measuring apparatus of claim 1, wherein the sensor direction switching means inverts the direction of current periodically.

4. The humidity measuring apparatus of claim 3, wherein the sensor direction switching means inverts the direction of current that flows in the humidity sensor means in each direction determined in response to the output of the voltage judging means.

5. The humidity measuring apparatus of claim 1, further comprising a discharge resistor coupled to said charge/discharge switching means, said discharge resistor providing a load resistance for said reference capacitor during the discharge of said reference capacitor.

6. The humidity measuring apparatus of claim 1, wherein said humidity sensor means includes a first terminal and a second terminal, said humidity sensor means and said reference resistor being electrically connected to said charge switching means for alternative connection to the reference capacitor, said sensor direction switching means further comprising a first switch connected to said first terminal of said humidity sensor means and a second switch connected to said second terminal of said humidity sensor means, said sensor direction switching means inverting the direction of current flowing through said humidity sensor by switching the electrical connection of said charge switching means and said humidity sensor means between said first and second terminals of said humidity sensor.

7. The humidity measuring apparatus of claim 6, wherein said sensor direction switching means further includes flip flop means clocked by the output of said voltage judging means, said first and second switches being actuated by an output from said flip flop means.

8. The humidity measuring apparatus of claim 7, wherein said voltage judging means comprises a logic inverting gate having hysteresis properties.

9. The humidity measuring apparatus of claim 1, wherein said charge/discharging switching means, said sensor direction switching means and said charge switching means include analog switches.

10. The humidity measuring apparatus of claim 1, wherein said humidity sensor includes an insulating substrate;

a pair of electrodes formed on said insulating substrate;

a porous silica film including carbon particles formed on an exposed surface of said insulating substrate and electrode; and

a silica film formed on said porous silica film.

11. The humidity measuring apparatus of claim 10, wherein said electrodes are Cr and include a terminal portion for connection to a lead electrode, said terminal portion further including a layer of Au formed on each Cr electrode, a layer of NiCr formed on the layer of Au and a layer of Au formed on the layer of NiCr.

12. The humidity measuring apparatus of claim 10, wherein a silica sol used in forming said porous silica film contains between about 1 and 4 weight % of said carbon particles.

13. The humidity measuring apparatus of claim 12, wherein said porous silica film contains about 2.5 weight % of said carbon particles.

14. The humidity measuring apparatus of claim 12, wherein the amount of carbon particles is selected to provide a stable humidity sensor.

15. The humidity measuring apparatus of claim 12, wherein the amount of carbon particles is selected to provide accurate humidity measurements.

16. The humidity apparatus of claim 12, wherein said silica sol containing carbon particles is formed by dispersing silica particles and carbon particles in a hydrolyzed solution of silicon alkoxide.

17. The humidity measuring apparatus of claim 10, wherein the insulating substrate is alumina.

18. The humidity measuring apparatus of claim 10, wherein said porous silica film containing carbon particles is produced by forming a silica sol including carbon particles into a film and heat treating said film.

19. The humidity measuring apparatus of claim 10, wherein the electrodes are interleaved comb electrodes.

20. A method of avoiding electrolysis in a humidity or temperature sensor comprising the step of alternatively charging and discharging a capacitor through a moisture sensitive humidity or temperature sensor and through a reference resistor, and periodically changing the direction of charging current through the humidity or temperature sensor in accordance with the charge/discharge cycle of the charging and discharging of said capacitor.