Plasma generating apparatus for large area plasma processing

• US 5,032,202 A
• Filed: 10/03/1989
• Issued: 07/16/1991
• Est. Priority Date: 10/03/1989
• Status: Expired due to Fees

• Current Assignee: Martin Marietta Energy Systems, Inc.
• Original Assignee: Martin Marietta Energy Systems, Inc.
• Inventors: Gorbatkin, Steven M., Tsai, Chin-Chi, Berry, Lee A.
• Primary Examiner(s): Fisher, Richard V.
• Assistant Examiner(s): BURNS, TODD
• Application Number:
  US07/416,804
• Time in Patent Office: 651 Days
• Field of Search: 156/345, 156/643, 219/399, 219/121.36, 219/121.43, 204/298.38, 204/298.37, 315/111.21, 315/111.41, 315/111.71, 315/111.81, 118/722, 118/723
• US Class Current: 156/345.42
• CPC Class Codes: H01J 2237/0817 Microwaves
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32678 Electron cyclotron resonance
• CPC Class Codes: H01J 37/32688 Multi-cusp fields
• CPC Class Codes: H01J 37/32706 Polarising the substrate

Abstract

A plasma generating apparatus for plasma processing applications is based on a permanent magnet line-cusp plasma confinement chamber coupled to a compact single-coil microwave waveguide launcher. The device creates an electron cyclotron resonance (ECR) plasma in the launcher and a second ECR plasma is created in the line cusps due to a 0.0875 tesla magnetic field in that region. Additional special magnetic field configuring reduces the magnetic field at the substrate to below 0.001 tesla. The resulting plasma source is capable of producing large-area (20-cm diam), highly uniform (±5%) ion beams with current densities above 5 mA/cm². The source has been used to etch photoresist on 5-inch diam silicon wafers with good uniformity.

Claims

1. A plasma generating apparatus comprising:

a vacuum vessel;

a processing gas introduced into said vacuum vessel;

a microwave generator;

a launcher waveguide connected for receiving microwaves from said microwave generator and conveying said microwaves into said vacuum vessel;

a solenoid coil disposed about said launcher waveguide and producing a high flux magnetic field, said high flux magnetic field interacting with said microwaves and said processing gas to produce a dense ECR plasma, said dense ECR plasma diffusing into said vacuum vessel; and

a soft iron magnetic flux return positioned around said solenoid coil, said magnetic flux return interacting with said high flux magnetic field to reduce the exciting current in said solenoid coil required for said dense ECR plasma condition and minimize stray magnetic field in said vacuum vessel.

2. A plasma generating apparatus according to claim 1, further comprising a hybrid waveguide polarizer disposed between said microwave generator and said launcher waveguide for passing right hand circularly polarized microwaves and left hand circularly polarized microwaves to said launcher waveguide.

3. A plasma generating apparatus according to claim 1, wherein said launcher waveguide has a rectangular output end.

4. A plasma generating apparatus according to claim 1, wherein said launcher waveguide has a conical output end.

5. A plasma generating apparatus according to claim 1, wherein said processing gas further includes a component for deposition onto a substrate.

6. A plasma etch apparatus for large area plasma etching of a sample comprising:

a vacuum vessel comprising a bottom plate, cylindrical wall, and top plate;

a sample holder disposed in said vacuum vessel;

a processing gas introduced into said vacuum vessel;

a microwave waveguide launcher attached to said top plate and coaxial with said cylindrical wall;

a microwave generator;

a waveguide disposed in said microwave waveguide launcher for receiving microwaves from said microwave generator;

a launcher waveguide disposed in the vacuum vessel end of said microwave waveguide launcher;

a microwave window disposed in said microwave waveguide launcher between said waveguide and said launcher waveguide;

a solenoid coil disposed around said microwave waveguide launcher, said solenoid coil providing a coaxial induced high flux magnetic field within said microwave waveguide launcher, and said processing gas, microwaves, and magnetic field producing a dense ECR plasma in the vacuum vessel end of said launcher waveguide in said microwave waveguide launcher, and said dense ECR plasma diffusing into said vacuum vessel to produce a main plasma therein;

a plurality of line cusp permanent magnet columns equally spaced about said cylindrical wall, said line cusp permanent magnets producing a line cusp magnetic field at said cylindrical wall, and said processing gas, microwaves and line cusp magnetic field producing a line cusp ECR plasma at said permanent magnet columns, and said line cusp ECR plasma diffusing into said vacuum vessel and contributing to the formation of said main plasma; and

a cylindrically-shaped soft iron magnetic flux return disposed around said solenoid coil, said flux return interacting with said high flux magnetic field to reduce the exciting current in said solenoid coil required for said dense ECR plasma condition and minimize stray magnetic field in said vacuum vessel.

7. A plasma etch apparatus according to claim 6, further comprising upper ring magnets mounted in grooves in said top plate and lower ring magnets mounted in grooves in said bottom plate, the innermost of said upper ring magnets having polarity opposite to that of said solenoid coil, and the innermost of said lower ring magnets having polarity identical to that of said innermost upper ring magnet.

8. A plasma etch apparatus according to claim 6, further comprising a hybrid waveguide polarizer disposed between said microwave generator and said microwave waveguide launcher and capable of providing controllable amounts of right hand circularly polarized microwaves and left hand circularly polarized microwaves from said microwave generator to said microwave waveguide launcher.

9. A plasma etch apparatus according to claim 6, wherein said processing gas is oxygen.

10. A plasma generating apparatus comprising:

a vacuum vessel;

a processing gas introduced into said vacuum vessel;

a microwave generator;

a launcher waveguide connected for receiving microwaves from said microwave generator and conveying said microwaves into said vacuum vessel;

a solenoid coil disposed around said launcher waveguide and producing a high flux magnetic field, said high flux magnetic field interacting with said microwaves and said processing gas to produce a dense ECR plasma, said dense ECR plasma diffusing into said vacuum vessel to produce a uniform and dense main plasma therein;

a soft iron magnetic flux return positioned around said solenoid coil, said magnetic flux return interacting with said high flux magnetic field to reduce the exciting current in said solenoid coil required for said dense ECR plasma condition and minimize stray magnetic field in said vacuum vessel; and

a plurality of line cusp permanent magnet columns equally spaced about said vacuum vessel, said magnet columns producing a line cusp magnetic field for confining said main plasma.

11. A plasma generating apparatus comprising:

a vacuum vessel;

a processing gas introduced into said vacuum vessel;

a microwave generator;

a launcher waveguide connected for receiving microwaves from said microwave generator and conveying said microwaves into said vacuum vessel;

a solenoid coil disposed around said launcher waveguide and producing a high flux magnetic field, said high flux magnetic field interacting with said microwaves and said processing gas to produce a dense ECR plasma, said dense ECR plasma diffusing into said vacuum vessel to produce a uniform and dense main plasma therein;

a soft iron magnetic flux return positioned around said solenoid coil, said magnetic flux return interacting with said high flux magnetic field to reduce the exciting current in said solenoid coil required for said dense ECR plasma condition and minimize stray magnetic field in said vacuum vessel; and

a plurality of line cusp permanent magnet columns equally spaced about said vacuum vessel, said permanent magnets being of strong magnetic field to produce the ECR plasma formation condition at said line cusp columns, said processing gas, microwaves and line cusp magnetic field interacting to produce a line cusp ECR plasma at said permanent magnet columns, and said line cusp ECR plasma diffusing into said vacuum vessel and contributing to the formation of said main plasma.

12. A plasma generating apparatus according to claim 11, wherein said line cusp permanent magnet columns are comprised of samarium cobalt magnets.

13. A plasma generating apparatus according to claim 11, further comprising at least one additional microwave feed introducing microwaves into said line cusp ECR plasma region.