Product defect detection using thermal ratio analysis

• US 5,032,727 A
• Filed: 09/14/1990
• Issued: 07/16/1991
• Est. Priority Date: 09/14/1990
• Status: Expired due to Term

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Digital Equipment Corporation (HP Inc.)
• Inventors: Rolla, Michael P., Cox, Eldon E. Jr.
• Primary Examiner(s): Cuchlinski, Jr., William A.
• Assistant Examiner(s): BENNETT, GEORGE B
• Application Number:
  US07/582,102
• Time in Patent Office: 305 Days
• Field of Search: 356/237, 356/389, 356/391, 356/394, 356/445, 358/106, 358/113, 374/4, 374/5, 374/10, 374/45, 374/57, 250/330, 250/332, 250/341, 250/342, 382/1, 382/34
• US Class Current: 250/330
• CPC Class Codes: G01N 25/72 Investigating presence of flaws

Abstract

A method and apparatus for indicating defects in manufactured products employs, instead of the conventional thermal image subtraction, "thermal ratio analysis", which involves ratios of thermal data and their analysis including statistical analysis. Various techniques for "image" enhancement and for suppression of known artifacts are employed to facilitate the decision as to when a defect is detected. The thermal ratio analysis technique is particularly useful for detecting hidden defects in electronic circuitry, such as integrated circuits.

Claims

1. A method of detecting defects in a test sample of a product, comprising the steps of:

generating a reference record for at least one reference sample of the product that does not have defects, comprising the sub-steps of;

(1) making an ambient-temperature thermal record of the reference sample at ambient temperature;

(2) making a plurality of elevated temperature thermal records of the reference sample at a plurality of respective elevated temperatures, including applying a respective thermal stimulus to the reference sample, and

(3) making a first difference record for the reference sample from the ambient-temperature thermal records and one of the plurality of elevated temperature thermal records and at least a second difference record for the reference sample involving at least another of the plurality of elevated temperature thermal records,

generating first and at least second difference records for the test sample by repeating sub-steps (1)-(3) with the test sample replacing the reference sample;

deriving at least one ratio record from the difference records for the reference sample and the test sample;

forming a composite record including at least the derived one ratio record; and

generating a defect indication when the composite record yields a statistical significant deviation from an expected value.

2. The method of detecting a defect according to claim 1, in which the sub-steps of making a plurality of elevated temperature thermal records include employing computerized control of the temperature.

3. The method of detecting a defect according to claim 1, in which the sub-steps of making a plurality of elevated temperature thermal records include allowing the passage of a fixed interval of time while each stimulus is applied.

4. The method of detecting a defect according to claim 1, in which the sub-step of making an ambient-temperature thermal record comprises stabilizing the thermal state of the sample by rapidly flowing gas from a compressed gas source around the sample at an effective temperature substantially equal to ambient temperature.

5. The method of detecting a defect according to claim 1, in which the sub-step of applying a respective thermal stimulus to the sample comprises employing the stimulus for a respective period of time different from a period of time for another respective thermal stimulus.

6. The method of detecting a defect according to claim 5, in which the sub-steps of making a plurality of elevated temperature thermal records include employing computerized control of each respective period of time.

7. The method of detecting a defect according to claim 5, in which the sub-steps of making a plurality of elevated temperature thermal records include allowing some temperature stabilization after an elevated temperature is reached.

8. The method of detecting a defect according to claim 4, in which the sub-step of stabilizing a sample at ambient temperature comprises rapidly flowing gas from a compressed gas source around it at an effective temperature substantially equal to ambient temperature.

9. A method of detecting a defect in a test sample of a product, comprising the steps of:

establishing a reference record for at least one reference sample of the product that does not have defects, comprising the sub-steps of;

(1) making a base thermal record of the reference sample at a base value of a thermal stimulus;

(2) making a plurality of changed value thermal records of the reference sample at a plurality of respective changed values of the thermal stimulus, including applying a respective changed-value thermal stimulus to the reference sample; and

(3) making a first difference record for the reference sample from the base-value thermal record and one of the plurality of elevated value thermal records and a second difference record for the reference sample involving at least another of the plurality of elevated value thermal records;

generating first and second difference records for the test sample by repeating sub-steps (1)-(3) with test sample replacing the reference sample;

deriving at least one ratio record from the four difference records consisting of the first and second difference records for the reference sample and the first and second difference records for the test sample;

generating a defect indication when the composite ratio record yields a statistically significant deviation from an expected value.

10. The method of detecting a defect according to claim 9, in which the sub-step of making a plurality of changed value thermal records include employing computerized control of the value of the stimulus.

11. The method of detecting a defect according to claim 9, in which the sub-step of making a plurality of changed value thermal records include allowing some stabilization period after the stimulus is first applied.

12. The method of detecting a defect according to claim 9, in which the sub-step of making a base thermal record comprises stabilizing the sample by rapidly flowing gas from a compressed gas source around the sample at an effective temperature substantially equal to ambient temperature.

13. A method of detecting a defect in a test sample of a product, comprising the steps of:

establishing a reference record for at least one reference sample of the product that does not have defects, comprising the sub-steps of;

(1) making an ambient-temperature thermal record of the reference sample at ambient temperature,

(2) making a plurality of elevated temperature thermal records of the reference sample at a plurality of respective voltages applied to the sample to produce heating therein, including applying a respective voltage to the reference sample;

(3) making a first difference record from the ambient-temperature thermal records and one of the plurality of elevated temperature thermal records and a second difference record involving at least another of the plurality of elevated temperature;

generating a test record for the test sample by repeating sub-steps (1)-(3) with the test sample replacing the reference sample;

(4) deriving at least one ratio record from the four difference records consisting of the first and second difference records for the test sample and the first and second difference records for the reference sample;

forming a composite record including the at least one ratio record; and

generating a defect indication when the composite record yields a statistically significant deviation from an expected value.

14. The method of detecting a defect according to claim 13, in which the sub-steps of making a plurality of elevated temperature thermal records include employing computerized control of the voltage.

15. The method of detecting a defect according to claim 13, in which the sub-steps of making a plurality of elevated temperature thermal records include allowing a period temperature stabilization after a respective voltage is first applied.

16. The method of detecting a defect according to claim 13, in which the sub-step of making an ambient-temperature thermal record comprises stabilizing the sample at ambient temperature by rapidly flowing gas from a compressed gas source around it at an effective temperature substantially equal to ambient temperature.

17. A system for thermally detecting a defect in a test sample of a product, comprising

means for recording infrared data of a reference sample that does not have defects at ambient and elevated temperatures and for recording infrared data of the test sample at ambient and elevated temperatures;

means for forming a reference sample difference record from the infrared data of the reference sample at the ambient and elevated temperatures, and for forming a test sample difference record from the infrared data of the test sample at the ambient and elevated temperatures;

means for deriving at least one ratio from two of four difference records comprising said reference sample and test sample difference records;

means for converting the ratio into a composite record involving all the difference records; and

means for generating a defect indication when the composite record yields a statistically significant deviation from an expected value.

18. The system of claim 17, further comprising means for enhancing the ratio record to remove potentially false defect indications.

19. The system of claim 18 further comprising means for removing speckle noise from the ratio record.

20. The system of claim 19 further comprising means for preprocessing the thermal records, or the difference records, prior to deriving the ratio record.

21. A method of detecting defects in a test sample of a product, comprising the steps of:

generating a reference record for at least one reference sample of the product that does not have defects, comprising the sub-steps of;

(1) making an ambient-temperature thermograph of the reference sample at ambient temperature;

(2) making a plurality of elevated temperature thermographs of the reference sample at a plurality of respective elevated temperatures, including applying a respective thermal stimulus to the reference sample, and

(3) making a first difference record for the reference sample from the ambient-temperature thermograph and one of the plurality of elevated temperature thermographs and a second difference record for the reference sample involving at least another of the plurality of elevated temperature thermographs, the first and second difference records each comprising a plurality of image-type data points in an image-related array,

generating first and second difference records for the test sample by repeating sub-steps (1)-(3) with the test sample replacing the reference sample;

deriving at least one second ratio record from the four difference records consisting of the first and second difference records for the reference sample and the first and second difference records for the test sample, the ratio record including data points corresponding to respective data points in at least one of the difference records;

generating a defect indication when the composite record has at least one discrete region of substantially greater than average contrast with respect to surrounding regions.

22. The method of detecting a defect according to claim 21, in which the sub-steps of making a plurality of elevated temperature thermographs include employing computerized control of the thermal stimulus.

23. The method of detecting a defect according to claim 21, in which the sub-steps of making a plurality of elevated temperature thermographs include allowing the passage of a fixed interval of time while each stimulus is applied.

24. The method of detecting a defect according to claim 21, in which the sub-step of making an ambient-temperature thermograph comprises stabilizing the thermal state of the sample by rapidly flowing gas from a compressed gas source around the sample at an effective temperature substantially equal to ambient temperature.

25. The method of detecting a defect according to claim 21, in which the sub-step of applying a respective thermal stimulus to the sample comprises employing the stimulus for a respective period of time difference from a period of time for another respective thermal stimulus.

26. The method of detecting a defect according to claim 25, in which the sub-steps of making a plurality of elevated temperature thermographs include employing computerized control of each respective period of time.

27. The method of detecting a defect according to claim 25, in which the sub-steps of making a plurality of elevated temperature thermographs include allowing some temperature stabilization after an elevated temperature is reached.

28. The method of detecting a defect according to claim 24, in which the sub-step of stabilizing a sample at ambient temperature comprises rapidly flowing gas from a compressed gas source around it at an effective temperature substantially equal to ambient temperature.

29. A method of detecting a defect in a test sample of a product, comprising the steps of:

establishing a reference record for at least one reference sample of the product that does not have defects, comprising the sub-steps of;

(1) making a base thermograph of the reference sample at a base value of a thermal stimulus;

(2) making a plurality of changed value thermographs of the reference sample at a plurality of respective changed values of the thermal stimulus, including applying a respective changed-value thermal stimulus to the reference sample; and

(3) making a first difference record for the reference sample from the base-value thermograph and one of the plurality of elevated value thermographs and a second difference record for the reference sample involving at least another of the plurality of elevated value thermographs, the first and second difference records each comprising a plurality of image-type data points in an image-related array;

generating first and second difference records for the test sample by repeating sub-steps (1)-(3) with the test sample replacing the reference sample;

deriving at least one ratio record from the four difference records consisting of the first and second difference records for the reference sample and the first and second difference records for the test sample, the ratio record including data points corresponding to the respective data points in at least one of the difference records;

forming a composite record including at least the one derived ratio record; and

generating a defect indication when the composite record has at least one discrete region of substantially greater than average contrast with respect to surrounding regions.

30. The method of detecting a defect according to claim 29, in which the sub-step of making a plurality of changed value thermographs include employing computerized control of the value of the stimulus.

31. The method of detecting a defect according to claim 29, in which the sub-step of making a plurality of changed value thermographs include allowing some stabilization period after the stimulus is first applied.

32. The method of detecting a defect according to claim 29, in which the sub-step of making a base thermograph comprises stabilizing the sample by rapidly flowing gas from a compressed gas source around the sample at an effective temperature not exceeding ambient temperature.

33. A method of detecting a defect in a test sample of a product, comprising the steps of:

establishing a reference record for at least one reference sample of the product that does not have defects, comprising the sub-steps of;

(1) making an ambient-temperature thermograph of the reference sample at ambient temperature,

(2) making a plurality of elevated temperature thermographs of the reference sample at a plurality of respective voltages applied to the sample to produce heating therein, including applying a respective voltage to the reference sample;

(3) making a first difference record from the ambient-temperature thermographs and one of the plurality of elevated temperature thermographs and a second difference record involving at least another of the plurality of elevated temperature thermographs, the first and second difference records each comprising a plurality of image-type data points in an image-related array;

generating a test record for the test sample by repeating sub-steps (1)-(3) with the test sample replacing the reference sample;

(4) deriving at least one ratio record from the four difference records consisting of the first and second difference records for the test sample and the first and second difference records for the reference sample, the ratio record including data points corresponding to respective data points in at least one of the difference records;

forming a composite record including the at least one ratio record; and

generating a defect indication when the composite record has at least one discrete region of substantially greater than average contrast with respect to surrounding regions.

34. The method of detecting a defect according to claim 33, in which the sub-steps of making a plurality of elevated temperature thermographs include employing computerized control of the voltage.

35. The method of detecting a defect according to claim 33, in which the sub-steps of making a plurality of elevated temperature thermographs include allowing a period temperature stabilization after a respective voltage is first applied.

36. The method of detecting a defect according to claim 33, in which the sub-step of making an ambient-temperature thermograph comprises stabilizing the sample at ambient temperature by rapidly flowing gas from a compressed gas source around it at an effective temperature not exceeding ambient temperature.

37. A system for thermally detecting a defect in a test sample of a product, comprising

means for forming infrared images of a reference sample that does not have defects at ambient and elevated temperatures and for forming infrared images of the test sample at ambient and elevated temperatures, each of the images comprising a plurality of image data points;

means for forming reference sample difference records from the images of the reference sample at the ambient and elevated temperatures, and for forming test sample difference records from the images of the test sample at the ambient and elevated temperatures;

means for forming at least one ratio record from two of four difference records comprising said reference sample difference records and test sample difference records;

means for converting the ratio record into a composite record involving all the difference records; and

means for generating a defect indication when the composite record has at least one discrete region of substantially greater than average contrast with respect to surrounding regions.

38. The system of claim 37, further comprising means for enhancing the ratio record to remove potentially false defect indications.

39. The system of claim 38 further comprising means for removing speckle noise from the ratio record.

40. The system of claim 38 further comprising means for preprocessing the thermographs, or the difference records, prior to deriving the ratio record.