Apparatus with layered microwave window used in microwave plasma chemical vapor deposition process

• US 5,038,712 A
• Filed: 12/18/1989
• Issued: 08/13/1991
• Est. Priority Date: 09/09/1986
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Fujiyama, Yasutomo
• Primary Examiner(s): Lawrence, Evan
• Application Number:
  US07/449,054
• Time in Patent Office: 603 Days
• Field of Search: 118/501, 118/723, 219/10.55 A, 427/45.1, 333/252, 333/99 PL
• US Class Current: 118/723.0MW
• CPC Class Codes: C23C 16/511 using microwave discharges
• CPC Class Codes: G03G 5/082 and not being incorporated in a bonding material, e.g. vacuum deposited
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32238 Windows
• CPC Class Codes: H01J 37/32284 Means for controlling or selecting resonance mode

Abstract

An improved apparatus for the formation of a functional deposited film using a microwave plasma chemical vapor deposition process characterized in that a microwave transmissible dielectric material is used for the microwave introducing window, and the window has a structure wherein the dielectric material is divided into blocks of the same or different dielectric materials having a specific inductive capacity of more than 1.0. In this way it is possible to adjust not only the resonant frequency characteristics but also the electromagnetic resonant mode of the window to resonate with the microwave oscillation frequency so as to enhance microwave transmission.

Claims

1. In an apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process comprising a substantially enclosed deposition chamber which is provided with a substrate supporting means, a raw material gas feeding means, an exhaust means and a window allowing transmission of microwaves from a microwave power source as a constituent wall member of the deposition chamber, the improvement which comprises a plurality of layers laminated concentrically in the center of the window and in the direction of microwave transmission, each of said layers comprising a microwave transmissible material having a specific inductive capacity of more than 1.0, whereby the laminated window acts as a microwave resonator and provides enhanced microwave transmission.

2. The apparatus according to claim 1, wherein said plurality of layers are comprised of the same microwave transmissible material.

3. The apparatus according to claim 2, wherein said microwave transmissible material is alumina.

4. The apparatus according to claim 2, wherein said microwave transmissible material is alumina ceramic.

5. The apparatus according to claim 1, wherein said plurality of layers are comprised of different microwave transmissible materials.

6. The apparatus according to claim 5, wherein one of said different microwave transmissible materials is alumina and the other is quartz glass.

7. The apparatus according to claim 1, wherein the microwave transmissible material to constitute each of said plurality of layers has a specific inductive capacity of 10.

8. The apparatus according to claim 1, wherein said plurality of layers vary in thickness.

9. The apparatus according to claim 8, wherein the thickness of one of said plurality of layers corresponds to a half wavelength of the microwave used.

10. The apparatus according to claim 1, wherein each of said plurality of layers is shaped in a circular form.

11. The apparatus according to claim 10, wherein the circular layers have different radii.

12. The apparatus according to claim 1, wherein the side wall of one of said plurality of layers is tapered.

13. The apparatus according to claim 1 which further comprises a dielectric plate member being disposed on the upper layer, and said dielectric plate member comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.

14. The apparatus according to claim 13 which further comprises a plurality of dielectric blocks respectively having a small radius being disposed on said dielectric plate member, each of said dielectric blocks comprising a microwave transmissible material having a specific inductance capacity of more than 1.0.

15. The apparatus according to claim 14, wherein said plurality of dielectric blocks are arranged so as to intersect with the electric lines of force of microwave transmission.

16. The apparatus according to claim 15, wherein each of the arranged blocks comprises two dielectric blocks being piled.

17. The apparatus according to claim 1 which further comprises a plurality of dielectric plate members being placed on the upper layer of said plurality of layers, the size of each of said plurality of dielectric plate members being smaller than that of said upper layer, and each of the dielectric plate members comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.

18. The apparatus according to claim 17 which further comprises a plurality of dielectric blocks respectively having a small radius being arranged on the upper dielectric member of said plurality of said dielectric plate members, each of said dielectric blocks comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.

19. The apparatus according to claim 18, wherein said plurality of dielectric blocks are arranged so as to intersect with the electric lines of force of microwave transmission.

20. The apparatus according to claim 19, wherein each of the arranged blocks comprises two dielectric blocks being piled.

21. In an apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process comprising a substantially enclosed deposition chamber which is provided with a substrate supporting means, a raw material gas feeding means, an exhaust means and a window allowing transmission of microwave from a microwaves power source as a constituent wall member of the deposition chamber, the improvement which comprises a plurality of dielectric blocks being arranged in the center of said window to intersect with the electric lines of force of microwave transmission, each of said dielectric blocks having a small radius and comprising a microwave transmissible material having a specific inductive capacity of more than 1.0, whereby said window having said plurality of dielectric blocks acts as a microwave resonator and provides enhanced microwave transmission.

22. The apparatus according to claim 21, wherein said plurality of dielectric blocks are comprised of the same microwave transmissible material.

23. The apparatus according to claim 21, wherein said plurality of dielectric blocks are comprised of different microwave transmissible materials.

24. The apparatus according to claim 21, wherein said plurality of dielectric blocks are arranged as a plurality of layers laminated concentrically in the center and in the direction of microwave transmission, each of said layers comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.

25. The apparatus according to claim 24, wherein said plurality of layers are comprised of the same microwave transmissible material.

26. The apparatus according to claim 25, wherein said microwave transmissible material is alumina.

27. The apparatus according to claim 25, wherein said microwave transmissible material is alumina ceramic.

28. The apparatus according to claim 24, wherein said plurality of layers are comprised of different microwave transmissible materials.

29. The apparatus according to claim 28, wherein one of said different microwave transmissible materials is alumina and the other is quartz glass.

30. The apparatus according to claim 24, wherein the microwave transmissible material to constitute each of said plurality of layers has a specific inductive capacity of 10.

31. The apparatus according to claim 24, wherein said plurality of layers have different thicknesses.

32. The apparatus according to claim 31, wherein the thickness of one of said plurality of layers corresponds to a half wavelength of the microwave used.

33. The apparatus according to claim 24, wherein each of said plurality of layers is shaped in a circular form.

34. The apparatus according to claim 33, wherein the circular layers have different radiuses.

35. The apparatus according to claim 24, wherein the side wall of one of said plurality of layers is tapered.

36. The apparatus according to claim 24 which further comprises a dielectric plate member being disposed on the upper layer of said plurality of layers, the size of said dielectric plate member being smaller than that of said upper layer, and said dielectric plate member comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.

37. The apparatus according to claim 24, wherein each of the arranged blocks comprises two dielectric blocks being piled.