Chemically sensitive transducer

• US 5,039,390 A
• Filed: 04/11/1990
• Issued: 08/13/1991
• Est. Priority Date: 08/11/1988
• Status: Expired due to Fees

• Current Assignee: Christoff Brauchle, Norbert Hampp
• Original Assignee: Christoff Brauchle, Norbert Hampp
• Inventors: Hampp, Norbert, Brauchle, Christoff
• Primary Examiner(s): Niebling, John F.
• Assistant Examiner(s): Phasge, Arun S.
• Application Number:
  US07/466,303
• Time in Patent Office: 489 Days
• Field of Search: 357/25, 204/416, 204/412
• US Class Current: 204/412
• CPC Class Codes: G01N 27/4148 Integrated circuits therefor, e.g. fabricated by CMOS processing CMOS processing per se H01L21/82
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/3011 Impedance
• CPC Class Codes: H01L 2924/3025 Electromagnetic shielding

Abstract

A chemically sensitive transducer for selectively determining a chemical property of a fluid and providing a measurement signal to an amplifying circuit. The transducer has a measuring electrode coupled to the amplifying circuit and provides a measurement signal to the amplifying circuit. A membrance covers the measuring electrode, this membrane being sensitive to a specified chemical property. A carrier plate, with first and second sides, has the measuring electrode arranged on its first side and the amplifying circuit on its second side. The carrier plate has a conductor extending between the first and second sides which electrically couples the measuring electrode and the amplifying circuit.

Claims

1. A chemically sensitive transuducer for selectively determining a chemical property of a fluid and providing a measurement signal to an amplifying circuit that contains a field-effect transistor, comprising;

a measuring electrode coupled to the amplifying circuit and providing a measurement signal to the amplifying circuit;

a membrane covering said measuring electrode, said membrane being sensitive to a specified chemical property;

a carrier plate composed of an insulating material and having first and second sides, with said measuring electrode being arranged said first side and the amplifying circuit being arranged on said second side, said carrier plate including a conductor extending between said first and second sides, said conductor electrically coupling said measuring electrode to the amplifying circuit; and

means for encapsulating the transducer to isolate said transducer from the fluid except for said membrane.

2. A transducer according to claim 1, wherein said insulating material is one of SiO₂ ;

a ceramic material;

Al₂ O₃ ;

glass;

an epoxy resin; and

a plastic material.

3. A transducer according to claim 2, further comprising a conducting layer between said carrier plate and the amplifying circuit, said conducting layer being arranged opposite said measuring electrode.

4. A transducer according to claim 3, wherein said conductor is a borehole running completely through said carrier plate and having a diameter of less than 0.1 mm, said borehole being coated at least on its sidewalls with a conducting material.

5. A transducer according to claim 4, wherein said measuring electrode, said conductor and said conducting layer are compared of a material which is chemically inert to the fluid whose chemical property is selectively determined.

6. A transducer according to claim 5, wherein said material is one of:

gold, platinum silver, copper, palladium, or alloys thereof or a conductive polymer.

7. A transducer according to claim 6, further comprising a mask plate on said carrier plate, said mask plate restricting the area of said measuring electrode.

8. A transducer according to claim 7, wherein said mask plate covers said borehole.

9. A transducer according to claim 7, further comprising an insulating layer covering said borehole and interposed between said mask plate and said carrier plate.

10. A transducer according to claim 9, wherein said insulating layer is composed of one of the following:

SiO₂, polyimide, epoxy resin, aluminum oxide or a silicone resin.

11. A transducer according to claim 10, wherein said mask plate is removable.

12. A transducer according to claim 1, wherein said membrane is a membrane that is applicable by electrochemical reactions or in a dissolved form.

13. A transducer according to claim 7, wherein said carrier plate, said mask plate and said means for encapsulating are composed of the same insulating material.

14. A transducer according to claim 13, wherein a space encompassing the amplifying circuit and enclosed by the combination of said carrier plate and the means for encapsulating is filled under pressure with an inert gas.

15. A transducer according to claim 1, wherein said transducer includes at least one pair of differential sensors having an active measuring electrode and an inactive electrode.

16. A chemically sensitive transducer for selectively determining a chemical property of a fluid and providing a measurement signal to an amplifying circuit that contains a field-effect transistor, comprising:

A measuring electrode coupled to the amplifying circuit and providing a measurement signal to the amplifying circuit;

a membrane covering said measuring electrode, said membrane being sensitive to a specified chemical property;

a carrier plate composed of an insulating material and having first and second sides, with said measuring electrode being arranged on said first side and the amplifying circuit being arranged on said second side, said carrier plate including a borehole extending between said first and second sides, said borehole including a conductor extending between said first and second sides, said conductor electrically coupling said measuring electrode to the amplifying circuit; and

means for encapsulating the transducer to isolate said transducer from the fluid except for said membrane.