Process for modifying large polymeric surfaces

• US 5,041,303 A
• Filed: 03/07/1988
• Issued: 08/20/1991
• Est. Priority Date: 03/07/1988
• Status: Expired due to Fees

• Current Assignee: Polyplasma Incorporated
• Original Assignee: Polyplasma Incorporated
• Inventors: Wertheimer, Michael R., Schreiber, Henry P.
• Primary Examiner(s): Beck, Shrive
• Assistant Examiner(s): Burke, Margaret
• Application Number:
  US07/165,047
• Time in Patent Office: 1,261 Days
• Field of Search: 427/38, 427/45.1, 427/39, 427/40
• US Class Current: 427/575
• CPC Class Codes: C08J 7/123 Treatment by wave energy or particle radiation C08J7/18 takes precedence
• CPC Class Codes: C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
• CPC Class Codes: C23C 16/401 containing silicon
• CPC Class Codes: C23C 16/511 using microwave discharges

Abstract

The disclosure herein describes a process for modifying large polymeric surfaces; a thin, uniform coating is deposited at near ambient temperature on the surfaces in a large-volume plasma apparatus, the plasma state being produced by using electromagnetic energy in the microwave frequency range. The surfaces thus coated constitute a barrier against permeation by oxygen and moisture.

Claims

1. A method of providing a plasma generated thin permeation barrier, against transmission of a gas or vapor, on a large polymeric surface, said method comprising:

depositing a film by plasma at substantially ambient temperature on said surface, said plasma being produced by electromagnetic energy in the microwave frequency range using slow wave structure applicator means;

whereby to form on said surface said plasma generated thin permeation barrier.

2. A method as defined in claim 1, wherein said barrier is one against transmission of oxygen, carbon dioxide and water vapor.

3. A method as defined in claim 2, wherein said barrier is an inorganic film.

4. A method as defined in claim 3, wherein said barrier is a silicon compound made by co-reacting silane with a second gas, or gas mixture, chosen among the following group:

ammonia, nitrogen, nitrous oxide or other oxides of nitrogen, water vapor, hydrocarbon and an inert gas.

5. A method as defined in claim 4, wherein said second gas, or gas mixture, is nitrogen and ammonia;

said inorganic film being plasma silicon nitride.

6. A method as defined in claim 4, wherein said second gas is nitrous oxide or other oxide of nitrogen, or water vapor;

said inorganic film being plasma silicon dioxide.

7. A method as defined in claim 4, wherein said second gas is a mixture comprising a source of nitrogen and a source of oxygen, said inorganic film being plasma silicon oxynitride.

8. A method as defined in claim 4, wherein said second gas is a hydrocarbon or other source of carbon;

said inorganic film being plasma silicon carbide.

9. A method as defined in claim 4, wherein said second gas is a mixture of nitrous oxide and phosphine;

said inorganic film being phosphosilicate glass.

10. A method as defined in claim 4, wherein said second gas is taken from the group including Ar, He, Ne and hydrogen;

said inorganic film being amorphous, hydrogenated silicon.

11. A method as defined in claim 3, wherein said inorganic film is a metal compound made from a volatile organometallic compound.

12. A method as defined in claim 1, wherein said barrier is derived from an organosilicon monomer.

13. A method as defined in claim 12, wherein said monomer is reacted in the presence of an inert gas.

14. A method as defined in claim 12, wherein said monomer is reacted with oxygen to yield plasma silicon oxide.

15. A method as defined in claim 12, wherein said monomer is reacted with oxygen and ammonia to yield plasma silicon oxynitride.

16. A method as defined in claim 12, wherein said monomer is reacted with oxygen and nitrogen to yield plasma silicon oxynitride.

17. A method as defined in claim 1, wherein said large surface consists of polyethylene terephthalate.

18. A method as defined in claim 1, wherein said large surface consists of polycarbonate.

19. A method as defined in claim 1, wherein said large surface consists of polypropylene.

20. A method as defined in claim 1, wherein said large surface consists of polyethylene.

21. A method as defined in claim 1, wherein said large surface consists of polyvinyl chloride.

22. A method as defined in claim 1, wherein said large surfaces consist of polyacetal, polyamide, laminates of two or more polymers, and polyblends, polyalloys, interpenetrating network polymers.