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Electrostatic capacitance type pressure detector

  • US 5,042,308 A
  • Filed: 06/22/1989
  • Issued: 08/27/1991
  • Est. Priority Date: 06/23/1988
  • Status: Expired due to Fees
First Claim
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1. A pressure detector for measuring the pressure of a pressurized fluid by means of electrostatic capacitances comprising:

  • a diaphragm displaceable in response to the pressure; and

    a pair of fixed electrodes, one of each of said fixed electrodes being located on each side of said diaphragm and being electrostatically capacitively coupled to said diaphragm, each of said fixed electrodes being shaped to essentially eliminate electrostatic capacitances that are not differentially linear with respect to the pressure.

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