Method for fabricating side drive electrostatic micromotor

• US 5,043,043 A
• Filed: 06/22/1990
• Issued: 08/27/1991
• Est. Priority Date: 06/22/1990
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Howe, Roger T., Mehregany, Mehran, Schlecht, Martin F., Lang, Jeffrey H., Schmidt, Martin A., Senturia, Stephen D., Tavrow, Lee S.
• Primary Examiner(s): Powell, William A.
• Application Number:
  US07/542,435
• Time in Patent Office: 431 Days
• Field of Search: 156/629, 156/633, 156/634, 156/643, 156/645, 156/650, 156/651, 156/652, 156/653, 156/655, 156/656, 156/657, 156/659.1, 156/662, 310/309, 310/42, 310/90.5
• US Class Current: 216/17
• CPC Class Codes: H02N 1/004 in which a body is moved along a path due to interaction with an electric field travelling along the path

Abstract

An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.

Claims

1. A method of fabricating an electrostatic micromotor comprising the steps of:

providing a substrate in a plane;

providing on the substrate a first structural layer patterned over a first sacrificial layer such that the sacrificial layer separates portions of the first structural layer from the substrate, the first structural layer patterned to form a first member and a second member spaced across a micron wide gap from each other in a common plane parallel to the plane of the substrate, the second member being connected to the substrate;

providing electrical means for selectively generating and sustaining an operational strength electrostatic field across the micron wide gap between the first and second members in the common plane; and

etching the first sacrificial layer to free the first member such that the second member provides a stator and the first member provides a moveable member with respect to the stator under generated electrostatic forces.

2. A method as claimed in claim 1 wherein one of the steps of providing a substrate and providing on the substrate a first structural layer patterned over a first sacrificial layer includes depositing and patterning an insulating layer over the substrate.

3. A method as claimed in claim 1 wherein the step of providing on the substrate includes patterning from the first structural layer bushings coupled to the first member.

4. A method as claimed in claim 1 wherein the step of providing on the substrate a first structural layer patterned over a first sacrificial layer includes:

etching micron wide channels through one side of the first structural layer to outline at least the first and second members;

depositing the first sacrificial layer over the one side of the structural layer to seal the channels;

connecting the substrate to the first sacrificial layer and inverting the first structural layer such that the substrate serves as a support and an opposite side of the first structural layer is an exposed upper planar surface; and

grinding down the first structural layer from the side opposite the one side to ends of the channels to form the first and second members spaced across the micron wide gap from each other in a common plane.

5. A method as claimed in claim 1 wherein the step of providing a substrate includes (a) depositing and patterning an insulating layer on the substrate, and (b) etching into the substrate to form a cavity;

and

the step of providing on the substrate includes (a) providing the first sacrificial layer in the cavity by local oxidation, and (b) depositing and patterning the first structural layer over the first sacrificial layer on the substrate to form in one plane the first member over the first sacrificial layer and the second member partly over the first sacrificial layer spaced apart from the first member by a micron amount and connected to the insulating layer.

6. A method as claimed in claim 1 further comprising the step of providing a bearing connected to one of the substrate and the second member for limiting one of lateral and vertical movement of the moveable member with respect to the stator.

7. A method as claimed in claim 6 wherein the step of providing a bearing includes:

depositing a second sacrificial layer over at least the first member;

depositing and patterning a second structural layer over the second sacrificial layer to form a bearing; and

etching the second sacrificial layer along with the etching of the first sacrificial layer.